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Tuning the quality factor of microcantilever using hydrodynamic coupling of micro structures 利用微结构的水动力耦合调节微悬臂梁的质量因子
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285421
J. Lee, Y. Lau, C. Yao, W. Fang
{"title":"Tuning the quality factor of microcantilever using hydrodynamic coupling of micro structures","authors":"J. Lee, Y. Lau, C. Yao, W. Fang","doi":"10.1109/SENSOR.2009.5285421","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285421","url":null,"abstract":"This study demonstrates the concept of controlling the quality factor of a micro-cantilever using hydrodynamic coupling of active mechanical structures. The active micro structures (auxiliary-cantilevers) adjacent to the micro-cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of the operating-cantilever. Thus, the quality factor of operating-cantilever can be increased or decreased by changing the phase of the excitation force on the auxiliary-cantilevers. In addition, the tuning range of quality factor can be controlled by varying the magnitude of the excitation force on the auxiliary-cantilevers or the adjacent distance between micro-cantilevers. In application, magnetic actuated micro-cantilever arrays were fabricated and characterized. Measurements demonstrate that the variation of quality factor is from −39% to +28% using the proposed approach.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"24 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132026922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A novel endoscopic oidrs system for non-invasive early diagnosis of esophageal cancers 一种用于食管癌无创早期诊断的新型内镜系统
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285490
K. Balareddy, A. Garcia-Uribe, J. Zou, Lihong V. Wang, Kenneth K Wang
{"title":"A novel endoscopic oidrs system for non-invasive early diagnosis of esophageal cancers","authors":"K. Balareddy, A. Garcia-Uribe, J. Zou, Lihong V. Wang, Kenneth K Wang","doi":"10.1109/SENSOR.2009.5285490","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285490","url":null,"abstract":"In this paper, we report the design, fabrication and testing of a new endoscopic OIDRS (oblique incidence diffuse reflectance spectroscopy) system for non-invasive early diagnosis of human esophageal pre-cancers and cancers. The endoscopic OIDRS system consists of an automated data acquisition interface and a micro “side-viewing” optical probe. The optical probe is capable of delivering oblique light incidence onto and collecting the resulting diffuse reflectance from the interrogated tissue in parallel. The entire OIDRS system has been successfully tested to measure the diffuse reflectance from human esophageal tissue samples and achieved 100% accuracy in differentiating cancerous and benign cases.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134084981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Repeatedly usable bio-molecule cantilever sensors with a coordination-bond breaking and re-linking technique 具有配位键断裂和重连接技术的可重复使用的生物分子悬臂式传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285722
Haitao Yu, Jungang Li, Xiaohua Gan, Min Liu, P. Xu, Xinxin Li
{"title":"Repeatedly usable bio-molecule cantilever sensors with a coordination-bond breaking and re-linking technique","authors":"Haitao Yu, Jungang Li, Xiaohua Gan, Min Liu, P. Xu, Xinxin Li","doi":"10.1109/SENSOR.2009.5285722","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285722","url":null,"abstract":"This paper reports a method for recycled immobilizing and erasing antibody at micro-cantilever surface by a coordination-bond breaking and re-linking technique. With the new method, the sensor can be re-used to immuno-detect bio-molecules for many times. By our sensing experiment to killed vaccine of Bacillus Anthracis (BA) spores with concentration of 2000 spores/ml for three times, the target loaded on the cantilever surface causes a decrease of its frequency shift by 106 Hz, 100 Hz and 107 Hz, respectively. The biosensor detection sensitivity shows no decrease after multiple sensing cycles.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133948327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
3DOF equivalent circuit model of a comb-drive actuator 梳状驱动器的三维等效电路模型
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285743
Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tuchiya, S. Mochizuoki, G. Hashiguchi
{"title":"3DOF equivalent circuit model of a comb-drive actuator","authors":"Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tuchiya, S. Mochizuoki, G. Hashiguchi","doi":"10.1109/SENSOR.2009.5285743","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285743","url":null,"abstract":"We have derived a 3DOF (degree of freedom) mechanical equivalent circuit of a comb-drive actuator from Lagrange equation and applied it to simulation of an asymmetrical comb-drive actuator, and we can obtain that experimental data is in good agreement with the simulation. We also mentioned the quadric model of a comb-drive actuator which should be used under no DC bias operation. Using these models complicated MEMS devices are represented fully by an electrical equivalent circuit including mechanical parts, and can be simulated only by electrical simulator such as SPICE.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134298321","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Coupling of quantum states with mechanical heterostructures 量子态与力学异质结构的耦合
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285457
J. D. Makowski, B. D. Anderson, W. Chan, M. Saarinen, C. Palmstrøm, J. Talghader
{"title":"Coupling of quantum states with mechanical heterostructures","authors":"J. D. Makowski, B. D. Anderson, W. Chan, M. Saarinen, C. Palmstrøm, J. Talghader","doi":"10.1109/SENSOR.2009.5285457","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285457","url":null,"abstract":"Mechanical positioning is used to control the wavelength of light emission from semiconductor heterostructures. In our work, a SixN/InP cantilever containing an InGaAs surface well collapses over another InGaAs quantum well. The spacing between the wells varies along the collapsed cantilever, changing the coupling between heterostructures and thus the electron states. In an essence, we are altering the bandgap by the mechanical bending of the cantilever. This is very much similar to the control of photon states by coupling optical cavities with tunable mirrors. Here we report a wavelength shift of up to 22 nm in photoluminescence measurements of two coupled 200 Å surface wells. Associated theory shows that mechanical quantum coupling enables interband or intersubband devices with unprecedented spectral tuning ranges for gain or absorption.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"131 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131500563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Polysilicon sensors for CMOS-MEMS electrothermal probes 用于CMOS-MEMS电热探头的多晶硅传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285434
J. Liu, M. Noman, J. Bain, T. E. Schlesinger, G. Fedder
{"title":"Polysilicon sensors for CMOS-MEMS electrothermal probes","authors":"J. Liu, M. Noman, J. Bain, T. E. Schlesinger, G. Fedder","doi":"10.1109/SENSOR.2009.5285434","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285434","url":null,"abstract":"We describe multiple embedded polysilicon resistive sensors in CMOS-MEMS electrothermal probes as a step toward creating probe arrays for passing current on ICs to reconfigure resistance change (RC) vias. When not in contact, a low-resistivity unsilicided polysilicon (LP) resistor detects probe displacement indirectly through the temperature coefficient of resistance (TCR) effect. When in contact with a load force, the difference of two LP resistors, one under stress in the flexure and the other cantilevered, cancels the TCR and extracts the piezoresistive (PZR) change, thus working as a force sensor. With a 10 V, 37.15 mW drive, at loads less than 10 µN, the achieved force sensitivity is constant and matches within 3.1% to the sensitivity extracted by mechanically pushing on the tip. The sensitivity decreases at large loads due to the unequal thermal boundary conditions of the two LP resistors. A third silicided polysilicon (SP) resistor having near zero piezoresistance is added to detect the thermal boundary condition change thereby extending the maximum detectable load.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130818018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Autonomous microfluidic sensing device employing liquid crystal for detection of biological interactions 采用液晶检测生物相互作用的自主微流控传感装置
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285551
D. Cheng, I. Lin, N. Abbott, H. Jiang
{"title":"Autonomous microfluidic sensing device employing liquid crystal for detection of biological interactions","authors":"D. Cheng, I. Lin, N. Abbott, H. Jiang","doi":"10.1109/SENSOR.2009.5285551","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285551","url":null,"abstract":"We report the design of an autonomous sensing device, which employs a thermotropic nematic liquid crystal (LC) to conduct chemical or biological sensing tasks. The development of highly reproducible methods to create uniform LC thin film is critical for utilizing LCs for sensing. Herein, we describe the use of shear forces generated by the laminar flow of liquid within a microfluidic channel to create thin LC films stabilized within microfabricated structures. The orientational response of the supported LC films to targeted analytes in aqueous phases was observed through changes in the optical birefringence of the LC thin films. Experiments employing two systems are reported: (i) dodecyl trimethylammonium bromide (DTAB) dissolved in aqueous solution, and (ii) the hydrolysis of phospholipids by the enzyme phospholipase A2 (PLA2).","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130830749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor 基于快速MEMS流量传感器的精确给药控制系统
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285859
M. Goetz, S. Messner, M. Ashauer, R. Zengerle
{"title":"Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor","authors":"M. Goetz, S. Messner, M. Ashauer, R. Zengerle","doi":"10.1109/SENSOR.2009.5285859","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285859","url":null,"abstract":"We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0–10mL/min and with a back pressure of 0–75kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The realization of the system is based on a smart combination of commercially available low cost fluidic components with a MEMS based thermal mass flow sensor of 1ms response time.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131007627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Energy harvesting by MEMS vibrational devices with electrets 具有驻极体的MEMS振动装置的能量收集
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285374
N. Sato, K. Ono, T. Shimamura, K. Kuwabara1, M. Ugajin, S. Mutoh, H. Morimura, H. Ishii, J. Kodate, Y. Sato
{"title":"Energy harvesting by MEMS vibrational devices with electrets","authors":"N. Sato, K. Ono, T. Shimamura, K. Kuwabara1, M. Ugajin, S. Mutoh, H. Morimura, H. Ishii, J. Kodate, Y. Sato","doi":"10.1109/SENSOR.2009.5285374","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285374","url":null,"abstract":"This paper presents experimental proof of energy harvesting with MEMS-based vibrational devices. To clarify the effect of the coupling of vibration of MEMS devices and electrical field of electrets for current generation, a slit-and-slider structure was developed. This structure enables to combine the MEMS devices and electrets after their vibrational and electrical properties have been characterized separately. In the fabrication, the movable gold electrodes were released and then aligned by chip-on-chip mounting to face the fixed electrodes. A 1-mm-square electrode resonated around 1166 Hz with external vibration of a magnitude of acceleration of 1 m/s2. The surface and rear potentials of the electret were around −150 and +100 V, respectively. The coupling of the mechanical and electrical properties produced an AC current of 170 pA. The results pave the way to designing and fabricating small-sized vibrational energy harvesters.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130844577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Rapid prototyping of micro-direct methanol fuel cell in PDMS with microchannel-integrated Nafion strip 微型直接甲醇燃料电池在PDMS中的快速成型与微通道集成Nafion条带
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285379
M. Shen, S. Walter, M. Gijs
{"title":"Rapid prototyping of micro-direct methanol fuel cell in PDMS with microchannel-integrated Nafion strip","authors":"M. Shen, S. Walter, M. Gijs","doi":"10.1109/SENSOR.2009.5285379","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285379","url":null,"abstract":"We demonstrate a planar direct methanol fuel cell by integrating a 200 µm-wide Nafion strip in a polydimethylsiloxane (PDMS) structure. The design is based on two 200 µm-wide parallel microfluidic channels, sandwiching the Nafion strip. We mechanically clamp the PDMS/ Nafion assembly with a catalyst-covered glass chip and use 1 M CH<inf>3</inf>OH/ 0.5 M H<inf>2</inf>SO<inf>4</inf> as fuel in the anodic channel and O<inf>2</inf>-saturated 0.5 M H<inf>2</inf>SO<inf>4</inf> as oxidant solution in the cathodic channel. The fuel cell has a stable maximum power density of 0.52 mW/cm<sup>2</sup> at room temperature with fuel and oxidant flow rates in the 20–160 µL/min range.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131000515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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