Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor

Abstract

We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0–10mL/min and with a back pressure of 0–75kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The realization of the system is based on a smart combination of commercially available low cost fluidic components with a MEMS based thermal mass flow sensor of 1ms response time.