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Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer 在PDMS弹性体中嵌入悬浮定向单壁碳纳米管束的微触觉传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285465
M. Lu, D. Lee, T. Yeom, T. Cui
{"title":"Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer","authors":"M. Lu, D. Lee, T. Yeom, T. Cui","doi":"10.1109/SENSOR.2009.5285465","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285465","url":null,"abstract":"A tactile sensor utilizing a patterned and suspended SWNT film as a sensing element is reported in this paper. Dense and oriented SWNT films were self-assembled using dielectrophoresis through the monitoring of the dc resistance of the film. The SWNT film was patterned by lithography and oxygen plasma etching to form a suspended SWNT beam. PDMS primer was spin-coated on the SWNT structure, and cured to realize a robust tactile sensor. In nanoindentation test, a piezoresistive sensitivity of 5%/mN and a detection limitation of 2 µN were demonstrated. This simple and low temperature fabrication technology is believed to be very promising for flexible tactile sensors and sensor arrays in applications to smart robots, implantable clinic tools, or embedded pressure sensors in microfluidic systems.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121207008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design and implementation of high performance CMOS-MEMS capacitive sensors 高性能CMOS-MEMS电容式传感器的设计与实现
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285414
M. Tsai, Chih-Ming Sun, Yu-Chia Liu, Chuanwei Wang, W. Fang
{"title":"Design and implementation of high performance CMOS-MEMS capacitive sensors","authors":"M. Tsai, Chih-Ming Sun, Yu-Chia Liu, Chuanwei Wang, W. Fang","doi":"10.1109/SENSOR.2009.5285414","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285414","url":null,"abstract":"This study presents a novel design to improve the sensitivity and resolution of the capacitive-type CMOS-MEMS sensors. This design employs the dielectric films as the MEMS structures, and the metal films as the electrodes and sacrificial layers. There are three merits of this design, (1) the parasitic capacitance is significantly reduced by the dielectric structure, (2) very small in-plane and out-of-plane sensing gaps are realized to increase the sensitivity, and (3) plate-type instead of finger-type out-of-plane sensing electrodes is exploited to increase the sensing area. In application, 3-axis CMOS-MEMS capacitive accelerometers are demonstrated. Measurements show the sensitivities respectively reach 11.5mV/G (in X-,Y-axis) and 7.8mV/G (in Z-axis) which are near 20-fold larger than existing designs. Moreover, a much better sensing resolution of 10mG is also achieved.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121230055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An ESD preotection device using normally-on MEMS switch 采用常导通MEMS开关的ESD保护装置
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285717
T. Ikehashi, Tomohiro Saito
{"title":"An ESD preotection device using normally-on MEMS switch","authors":"T. Ikehashi, Tomohiro Saito","doi":"10.1109/SENSOR.2009.5285717","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285717","url":null,"abstract":"We investigate normally-off and normally-on MEMS switches as ESD protection devices. The normally-on type switch behaves as an ESD protection only when the system power is off. We show that the optimized normally-on switch realizes ≫4000V HBM-ESD robustness with parasitic capacitance as small as 1.8fF.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114109717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Tactle array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer 斜铬/硅压阻悬臂嵌入弹性体的触觉阵列传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285509
M. Sohgawa, T. Mima, H. Onishi, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, M. Higuchi, H. Noma
{"title":"Tactle array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer","authors":"M. Sohgawa, T. Mima, H. Onishi, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, M. Higuchi, H. Noma","doi":"10.1109/SENSOR.2009.5285509","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285509","url":null,"abstract":"Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 × 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics so that it is shown that magnitude and direction of shear stress can be obtained by difference of output voltages of adjacent sensor cantilevers. The sensor output has good reproducibility for multiple measurement. The output from sensor element drastically changes with shifting applying position of force. It is considered that we can obtain pressed position from distribution of output from sensor element array.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114209140","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 26
Individual nanowire chemical sensor system self-powered with energy scavenging technologies 单个纳米线化学传感器系统自供电与能量清除技术
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285391
J. Prades, R. Jiménez-Díaz, F. Hernandez-Ramírez, A. Cirera, A. Romano-Rodríguez, J. Morante
{"title":"Individual nanowire chemical sensor system self-powered with energy scavenging technologies","authors":"J. Prades, R. Jiménez-Díaz, F. Hernandez-Ramírez, A. Cirera, A. Romano-Rodríguez, J. Morante","doi":"10.1109/SENSOR.2009.5285391","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285391","url":null,"abstract":"A fully autonomous chemical gas sensor system is presented. This system is based on the exploitation of dissipated power at individual nanowires by Joule effect due to the bias current applied in conductometric measurements (self-heating), which enables heating the tiny mass of these wires up to the optimum temperatures for gas sensing applications. This novel approach only requires few miliwatts to bias, heat and measure the sensors. We also demonstrate that the low-power requirements of these devices can be supplied by state-of-the-art energy scavenging technologies, like thermoelectric microgenerators. For all this, the here-presented system is an important step forward toward fully autonomous and distributed gas sensor networks without the need of battery replacement.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114368962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Surface plasmon tweezers-induced nanoparticle patterning in microfluidics 微流体中表面等离子体镊子诱导的纳米颗粒图案
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285791
J. Shi, Y. B. Zheng, X. xi, S. S. Lin, J. Du, B. Tittmann, T. J. Huang
{"title":"Surface plasmon tweezers-induced nanoparticle patterning in microfluidics","authors":"J. Shi, Y. B. Zheng, X. xi, S. S. Lin, J. Du, B. Tittmann, T. J. Huang","doi":"10.1109/SENSOR.2009.5285791","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285791","url":null,"abstract":"Here we report on dynamic patterning of nanoparticles in microfluidic channels using patterned surface plasmon polaritons (SPP) from a gold thin film with highly ordered nanohole arrays. In particular, the constructive interference of SPPs from neighboring holes leads to a periodic distribution of SPP intensities. Such a SPP distribution drives the nanoparticles into positions of minimal SPP intensities, where the net force is minimal and nanoparticles are most stable. This distribution comprises the patterning of nanoparticles. This technique is simple and cost-effective in fabrication, and only requires a laser intensity of 1/10,000 of that used in conventional optical tweezers, implying less damage to the targeted nanoparticles..","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116473116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A selective release method using electrolytically generated bubbles for cell array applications 一种用于电池阵列应用的使用电解产生气泡的选择性释放方法
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285447
T. Kurakazu, K. Kuribayashi, Y. Tsuda, H. Kimura, T. Fujii, Y. Sakai, S. Takeuchi
{"title":"A selective release method using electrolytically generated bubbles for cell array applications","authors":"T. Kurakazu, K. Kuribayashi, Y. Tsuda, H. Kimura, T. Fujii, Y. Sakai, S. Takeuchi","doi":"10.1109/SENSOR.2009.5285447","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285447","url":null,"abstract":"This paper describes a method of selective release of particles/cells by bubbles generated by electrolysis. The particles/cells trapped into microchambers that were produced with SU-8 on the top of an electrode of indium tin oxide (ITO) patterned on glass. The bubbles of oxygen and chlorine (or hydrogen) were selectively generated in a target chamber by applying voltage through the electrodes. We successfully released a microbead (100 µm in diameter) confined in the microchamber. Since this method is gentle enough to maintain the cellular activity, we believe that this method will be useful for quantitative analysis of cells in a microarray.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"20 5-6","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114027937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Scalable cascaded snap-in actuators for large-stroke displacements 用于大冲程位移的可扩展级联卡扣式执行器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285742
N. Golay, A. Masse, Y. Petremand, W. Noell, J. Manceau, N. D. de Rooij
{"title":"Scalable cascaded snap-in actuators for large-stroke displacements","authors":"N. Golay, A. Masse, Y. Petremand, W. Noell, J. Manceau, N. D. de Rooij","doi":"10.1109/SENSOR.2009.5285742","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285742","url":null,"abstract":"This paper will focus on the design, and first measurements of a cascaded in-plane parallel plate snap-in actuator. The actuator is based on a rather simple micro-fabrication process and can achieve a total displacement of several tenths of microns. Compared to classical non-cascaded transducer device based on parallel plates or comb-drive actuator, the actuation voltage is relatively low due to the snap-in phenomenon of electrostatic actuators. The electromechanical response of such a device is sequential. The fabricated 4-stage device shows a total stroke of 75 µm at 60 V. It is possible to easily increase the total stroke of the actuator by increasing the number of stages. Only one input electrode is required. Simulations with CoventorWare showed easy scalability of the concept for up to 19 stages with a total displacement of 350 µm.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127921214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A simple micro pirani vasuum gauge fabricated by bulk micromachining technology 采用本体微加工技术制作的简易微型皮拉尼真空计
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285508
Jinwen Zhang, Weiping Jiang, Jilong Zhou, Xin Wang
{"title":"A simple micro pirani vasuum gauge fabricated by bulk micromachining technology","authors":"Jinwen Zhang, Weiping Jiang, Jilong Zhou, Xin Wang","doi":"10.1109/SENSOR.2009.5285508","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285508","url":null,"abstract":"In this paper, a very simple micro vacuum pirani gauge made of single crystal silicon is presented. It was fabricated by standard bulk micromachining with only three masks. The high aspect ratio structure of the pirani gauge has large efficient gaseous heat transfer area, thus can increase the sensitivity of the pirani gauge. The dynamic range of the pirani gauge is 2Pa to 400Pa which should be larger if the power of the current source be larger with high sensitivity. And the average sensitivity is 184 K/W/Pa.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"94 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131956577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
A microchip for automated extraction of RNA from Gram-positive bacteria 用于从革兰氏阳性细菌中自动提取RNA的微芯片
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285553
P. Vulto, C. Hermann, P. Zahn, U. Maier, G. Dame, G. Urban
{"title":"A microchip for automated extraction of RNA from Gram-positive bacteria","authors":"P. Vulto, C. Hermann, P. Zahn, U. Maier, G. Dame, G. Urban","doi":"10.1109/SENSOR.2009.5285553","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285553","url":null,"abstract":"A Lab-on-a-Chip for fully automated quantitative extraction of RNA from Gram-positive bacterial cells is presented. The method combines thermo-electric lysis with electrophoretic purification. The chip is capable of RNA extraction proportional to the deployed amount of cells down to 1 colony forming units (CFU). The performance of the chip is demonstrated for transfer-messenger RNA (tmRNA) from the Gram-positive bacterium Streptococcus thermophilus (S.thermophilus). The RNA extraction lasts 10.5 minutes and the RNA yield is higher than for commercially available extraction kits. The extraction is particularly efficient for low molecular weight RNAs and may find broad application in clinical diagnostics and drug discovery.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132019833","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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