采用本体微加工技术制作的简易微型皮拉尼真空计

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285508

Jinwen Zhang, Weiping Jiang, Jilong Zhou, Xin Wang

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引用次数: 10

摘要

本文介绍了一种非常简单的单晶硅微真空皮拉尼计。它是通过标准的大块微机械加工制造的，只有三个掩模。皮拉尼压力表的高纵横比结构具有较大的有效气体传热面积，从而可以提高皮拉尼压力表的灵敏度。皮拉尼表的动态范围为2Pa ~ 400Pa，如果电流源功率大，灵敏度高，动态范围应更大。平均灵敏度为184 K/W/Pa。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A simple micro pirani vasuum gauge fabricated by bulk micromachining technology

In this paper, a very simple micro vacuum pirani gauge made of single crystal silicon is presented. It was fabricated by standard bulk micromachining with only three masks. The high aspect ratio structure of the pirani gauge has large efficient gaseous heat transfer area, thus can increase the sensitivity of the pirani gauge. The dynamic range of the pirani gauge is 2Pa to 400Pa which should be larger if the power of the current source be larger with high sensitivity. And the average sensitivity is 184 K/W/Pa.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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