An ESD preotection device using normally-on MEMS switch

Abstract

We investigate normally-off and normally-on MEMS switches as ESD protection devices. The normally-on type switch behaves as an ESD protection only when the system power is off. We show that the optimized normally-on switch realizes ≫4000V HBM-ESD robustness with parasitic capacitance as small as 1.8fF.