基于快速MEMS流量传感器的精确给药控制系统

M. Goetz, S. Messner, M. Ashauer, R. Zengerle
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引用次数: 1

摘要

我们提出了一种低成本精确液体剂量的系统方法。高度集成的系统工作流量为0-10mL /min,背压为0-75kPa。它可以显著降低脉动,最大偏差为1.5%。该系统的实现基于商用低成本流体元件与响应时间为1ms的基于MEMS的热质量流量传感器的智能组合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor
We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0–10mL/min and with a back pressure of 0–75kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The realization of the system is based on a smart combination of commercially available low cost fluidic components with a MEMS based thermal mass flow sensor of 1ms response time.
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