一种大位移压电驱动硅xy微台

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285429

M. Sabri, T. Ono, M. Esashi

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引用次数: 6

摘要

本文介绍了硅- pzt杂化xy微舞台的制作和集成过程。制作了一个尺寸为20×20×0.4 mm的硅xy型微台，并对其进行了评价。实验结果表明，该微台采用商用压电陶瓷作动器，Moonie角为2°，在70 V电压下，X和Y方向的位移分别为82µm和60µm。制造的微工作台表明，所设计的放大机构能够将冲程放大18倍。

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A large displacement piezodriven silicon XY-microstage

This paper present the fabrication and integration processes employed in order to realize the Si-PZT hybrid XY-microstage. A silicon XY-microstage with dimensions of 20×20×0.4 mm containing Moonie amplification mechanisms is fabricated and evaluated. The experimental results show that this microstage containing a commercial PZT actuator and Moonie angle of 2 degrees produced a displacement of 82 µm and 60 µm at 70 V for the X and Y directions, respectively. The fabricated microstage demonstrates that the designed amplification mechanism is able to magnify the stroke up to 18 times.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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