NANO-G分辨率微机械地震仪的设计、制造和测试

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285413

W. Pike, I. Standley, W. Karl, S. Kumar, T. Stemple, S. Vijendran, T. Hopf

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引用次数: 21

摘要

我们设计了一种高分辨率的微地震仪，将低谐振频率、高质量因数的悬架与电磁反馈控制下的灵敏横向电容式换能器相结合。它已被制造和测试，首次展示了一种能够分辨地球周围地震活动的微机械地震仪，具有迄今为止任何微机械设备中最好的加速度分辨率，自噪声降至4ng/√(Hz)。

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Design, fabrication and testing of a micromachined seismometer with NANO-G resolution

We have designed a high resolution microseismometer by combining a low-resonant-frequency, high-quality-factor suspension with a sensitive lateral capacitive transducer under electromagnetic feedback control. It has been fabricated and tested to demonstrate for the first time a micromachined seismometer capable of resolving the Earth's ambient seismicity and with the best acceleration resolution of any micromachined device to date, with a self noise down to 4ng/√(Hz).

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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