MEMS谐振器中的能量损耗及其对惯性和射频器件的影响

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285418

M. Weinberg, R. Candler, S. Chandorkar, J. Varsanik, T. Kenny, Amy Duwel1

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引用次数: 89

摘要

在本文中，我们回顾了目前对微机械(MEMS和NEMS)器件能量损失机制的理解。我们描述了高品质因子(Q)对用于射频应用的MEMS陀螺仪和MEMS谐振器性能的重要性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Energy loss in MEMS resonators and the impact on inertial and RF devices

In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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