{"title":"用于小型电力系统燃料输送的MEMS涡轮泵","authors":"C. Waits, M. McCarthy, R. Ghodssi","doi":"10.1109/SENSOR.2009.5285407","DOIUrl":null,"url":null,"abstract":"The design, fabrication, and characterization of a microball bearing supported turbopump for fuel delivery in smallscale power systems are reported. A spiral-groove viscous pump is integrated with a microball bearing and a radial in-flow microturbine. Using water as the working fluid, pumping is demonstrated at rotational speeds, flow rates, and pressure rises of up to 10 krpm, 80 mL/hour, and 8.2 kPa, respectively. In addition, bearing and turbine performances are improved from previous work through design and fabrication changes, enabling continuous stable operation for over 4.5 million revolutions and maximum demonstrated speeds above 85 krpm.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A MEMS turbopump for fuel delivery in small-scale power systems\",\"authors\":\"C. Waits, M. McCarthy, R. Ghodssi\",\"doi\":\"10.1109/SENSOR.2009.5285407\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design, fabrication, and characterization of a microball bearing supported turbopump for fuel delivery in smallscale power systems are reported. A spiral-groove viscous pump is integrated with a microball bearing and a radial in-flow microturbine. Using water as the working fluid, pumping is demonstrated at rotational speeds, flow rates, and pressure rises of up to 10 krpm, 80 mL/hour, and 8.2 kPa, respectively. In addition, bearing and turbine performances are improved from previous work through design and fabrication changes, enabling continuous stable operation for over 4.5 million revolutions and maximum demonstrated speeds above 85 krpm.\",\"PeriodicalId\":247826,\"journal\":{\"name\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2009.5285407\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2009.5285407","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A MEMS turbopump for fuel delivery in small-scale power systems
The design, fabrication, and characterization of a microball bearing supported turbopump for fuel delivery in smallscale power systems are reported. A spiral-groove viscous pump is integrated with a microball bearing and a radial in-flow microturbine. Using water as the working fluid, pumping is demonstrated at rotational speeds, flow rates, and pressure rises of up to 10 krpm, 80 mL/hour, and 8.2 kPa, respectively. In addition, bearing and turbine performances are improved from previous work through design and fabrication changes, enabling continuous stable operation for over 4.5 million revolutions and maximum demonstrated speeds above 85 krpm.
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