一个交叉结通道无阀微泵集成热线流体应用

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285662

V. Dau, T. Otake, T. X. Dinh, K. Tanaka, R. Amarasinghe, S. Sugiyama

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引用次数: 1

摘要

本文提出了一种具有交叉通道和集成热线的新型无阀泵。该泵由PZT隔膜驱动，产生用于流体应用的气体射流。基于PZT隔膜的瞬态流体分析和实验结果，设计和仿真了微泵的特性预测，可靠性高。研究了两种不同喷嘴的泵体设计，研究了喷嘴的三维效应。采用标准MEMS工艺制备微泵。进行了实验，仿真结果与实验结果吻合较好。在驱动电压为40 Vpp，频率响应为7.9 kHz时，流量达到4.3sccm。在40 Vpp下测得放电压力为0.18 kPa，在0.4mA恒定施加电压下，热线输出电压为1.07V

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A cross-junction channel valveless-micropump with integrated hotwires for fluidic application

This paper proposes a new valve-less pump with cross-junction channels and integrated hotwires. The pump was actuated by PZT diaphragm to create a gas jet flow for fluidic application. The design and simulation are based on transient fluidic analysis with experimental result of PZT diaphragm so that features of micropump is predicted with high reliability. Two designs of the pumps with different nozzles were investigated to study 3D nozzle effect. The micro pump was fabricated by standard MEMS process. Experiment was performed and agreement has been achieved between simulated and experimental results. The flow rate of 4.3sccm was achieved at the driving voltage of 40 Vpp in frequency response of 7.9 kHz. The discharge pressure of 0.18 kPa was measured at 40 Vpp and the output voltage of the hotwire was 1.07V at the constant applied voltage of 0.4mA

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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