{"title":"The Ballistic Injection in IGZO GAA VFET With Scaled Source/Drain Extension and Its Impact on On-Current Enhancement","authors":"Liankai Zheng;Ziheng Wang;Zhiyu Lin;Mengwei Si","doi":"10.1109/LED.2026.3706796","DOIUrl":"https://doi.org/10.1109/LED.2026.3706796","url":null,"abstract":"In this work, the impact of source/drain (S/D) extension scaling on the performance of indium-gallium-zinc oxide (IGZO) gate-all-around (GAA) vertical field-effect transistors (VFETs) is systematically studied both theoretically and experimentally. The electron transport at the S/D extension is investigated by drift-diffusion (DD) simulation and ballistic injection simulation. It is observed that the I-V characteristics at high V<sub>DS</sub> of IGZO GAA VFET with scaled S/D extension deviate significantly from the velocity saturation model due to the electron velocity overshoot at the S/D extension region. A ballistic injection model is introduced that can well explain the experimental I-V characteristics. It is found that the S extension scaling, rather than the D extension scaling, is more effective for on-current (I<inline-formula> <tex-math>${}_{text {on}}text {)}$ </tex-math></inline-formula> enhancement. By S extension scaling (down to 5 nm), the I<sub>on</sub> enhancement is demonstrated experimentally, showing a high I<sub>on</sub> of <inline-formula> <tex-math>$569~mu $ </tex-math></inline-formula>A/<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>m (V<inline-formula> <tex-math>${}_{text {D}} =2.2$ </tex-math></inline-formula> V).","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1587-1590"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148626702","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Seed-Iteration-Epitaxy Technique Achieving High-Mobility Poly-Si Channel for BEOL-Compatible Three-Dimensional Integration","authors":"Jinbiao Liu;Xianglie Sun;Zhuo Chen;Jianfeng Gao;Xiaobin He;Wenjuan Xiong;Chenchen Zhang;Junfeng Li;Chao Zhao;Shujuan Mao;Jun Luo","doi":"10.1109/LED.2026.3705796","DOIUrl":"https://doi.org/10.1109/LED.2026.3705796","url":null,"abstract":"In this work, we demonstrate a back-end-of-line (BEOL)-compatible seed-iteration-epitaxy (SIE) technique, achieving high-quality Si crystallization with a grain size of <inline-formula> <tex-math>$1.83~mu $ </tex-math></inline-formula>m and an integrity factor of 0.9. The SIE technique consists of two sequential steps: (1) grain-filter (GF)-based seed preparation to form high-quality poly-Si seeds and (2) seed-assisted crystallization, where liquid phase epitaxy (LPE)-like growth occurs using the underlying seeds as templates. At the device level, by utilizing the SIE approach, excellent electrical performance is achieved for NMOS, showing ON-OFF current ratio (<inline-formula> <tex-math>${I}_{text {ON}}$ </tex-math></inline-formula>/<inline-formula> <tex-math>${I}_{text {OFF}}text {)}$ </tex-math></inline-formula> of <inline-formula> <tex-math>$2.1times 10^{{7}}$ </tex-math></inline-formula>, subthreshold swing (<italic>SS</i>) of 82.8 mV/dec, and field-effect mobility (<inline-formula> <tex-math>$mu _{text {FE}}text {)}$ </tex-math></inline-formula> of 605 cm<sup>2</sup>/V<inline-formula> <tex-math>$cdot $ </tex-math></inline-formula>s. This approach provides a promising pathway for integrating high-mobility channel materials with potential relevance to future three-dimensional integration and memory applications.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1627-1630"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148627312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Changes to the Editorial Board","authors":"Kelin J. Kuhn","doi":"10.1109/LED.2026.3707329","DOIUrl":"https://doi.org/10.1109/LED.2026.3707329","url":null,"abstract":"","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1499-1499"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11627133","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148628028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiaohang Long;Yang Chen;Yifeng Huang;Zairan Liu;Guichen Song;Jun Chen;Shaozhi Deng;Fei Liu;Juncong She
{"title":"On-Chip Integrated CsPbBr3 Sheet-Cathode Vacuum Nanodiode for Direct Electron Irradiation Detection","authors":"Xiaohang Long;Yang Chen;Yifeng Huang;Zairan Liu;Guichen Song;Jun Chen;Shaozhi Deng;Fei Liu;Juncong She","doi":"10.1109/LED.2026.3699323","DOIUrl":"https://doi.org/10.1109/LED.2026.3699323","url":null,"abstract":"We demonstrate an on-chip integrated vacuum nanodiode with a CsPbBr<sub>3</sub> sheet-cathode for direct electron detection. Under 5 keV electron irradiation at a beam current of 100 pA, the device achieves an on/off ratio of 248 at a cathode-anode bias of 15 V, enabling high contrast detection due to the low dark current of ~100 pA. At a bias of 23.5 V, the detection efficiency reaches 141%, exceeding the theoretical gain from impact ionization and thus enabling high sensitivity detection. This work extends vacuum nanodiodes to direct electron detection. The high responsivity and on-chip integrability make the device promising for detector arrays in high-throughput multi-beam scanning electron microscopy.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1647-1650"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148628237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"CMP-Free Organic Hybrid Bonding Based on Mechanical Interlock Structure via Surface Treatments for 3-D Integration","authors":"Jinzhu Li;Qicun Lou;Xinyao Wang;Mingze Ban;Wenchao Wang;Ziyu Liu;Hao Zhu;Qingqing Sun;Lin Chen;Yabin Sun;David Wei Zhang","doi":"10.1109/LED.2026.3704582","DOIUrl":"https://doi.org/10.1109/LED.2026.3704582","url":null,"abstract":"Conventional hybrid bonding relies heavily on chemical mechanical polishing (CMP) to achieve ultra-fine surface planarity, and this reliance significantly restricts the scalability and reliability of the integration process. This work proposes a CMP-free hybrid bonding strategy named Mechanical Interlock Bonding-Hybrid (MIB-H) that combines a ‘Cu protrusion-Polyimide (PI) recess’ interlocking structure. However, the bonding quality of this interlocking structure depends critically on the surface treatment during the pre-bonding stage. Specifically, the inherent property mismatch between hydrophobic PI and oxidation-prone Cu leads to poor interfacial reactivity and promotes void and defect formation. Therefore, through the synergistic treatment of Ar plasma activation and citric acid immersion, a hydroxyl (−OH) active layer was successfully formed simultaneously on the surfaces of Cu/Ti, PI, and SiO<sub>2</sub>. Additionally, the increased total surface area provides more adsorption sites for -OH groups. Based on this, the Cu/Ti/Cu interface achieved at 250°<bold>C</b> exhibits sufficient atomic diffusion. Notably, the 0. <bold>5</b> <inline-formula> <tex-math>$mu $ </tex-math></inline-formula><bold>m</b>gaps reserved between Cu and PI in the interlocking structure have disappeared, which is attributed to the expansion of PI filling the gaps at high temperatures. This Cu/PI interlocking structure based on the co-hydroxylation strategy shows great potential for high-density heterogeneous chip integration.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1623-1626"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148628387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Wide-Temperature-Range Stable Memristor PUF Using WS2/Graphene Heterostructure","authors":"Yuan Cao;Ya Su;Zhao Huang;Tianao Liu;Xi Wan;Yu Liu;Hangyufei Zhang","doi":"10.1109/LED.2026.3703953","DOIUrl":"https://doi.org/10.1109/LED.2026.3703953","url":null,"abstract":"This letter presents a novel physical unclonable function (PUF) based on WS<sub>2</sub>/Graphene heterostructured memristors, where a sulfur-deficient WS<sub>2</sub> layer is confined within a two-dimensional (2D) heterostructure. This tailored layer endows the memristors with superior thermally stable resistive switching and consistent entropy generation over a wide temperature range. Hybrid physical entropy, which is derived from fabrication-induced random spatial distributions of defect states and sulfur vacancies, plus residual conductive filament (CF) configurations, ensures highly reliable secret key generation. An <inline-formula> <tex-math>$8times 8$ </tex-math></inline-formula> memristor array is fabricated and characterized, and a differential voltage-based readout scheme in the 1T1R architecture is employed to suppress common-mode variations. Experimental results demonstrate that the proposed PUF exhibits excellent entropy stability and anti-interference capability, and long-term endurance (<inline-formula> <tex-math>${10}^{{6}}$ </tex-math></inline-formula> SET/RESET cycles) across <inline-formula> <tex-math>$-{100}~^{circ } text {C}$ </tex-math></inline-formula> to <inline-formula> <tex-math>${250}~^{circ } text {C}$ </tex-math></inline-formula> with an ultra-low intra-chip Hamming distance (Intra-HD) of 0.68%. It is promising for industrial and security electronics operating under harsh conditions.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1667-1670"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148626524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"IEEE Electron Device Letters Information for Authors","authors":"","doi":"10.1109/LED.2026.3709237","DOIUrl":"https://doi.org/10.1109/LED.2026.3709237","url":null,"abstract":"","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1684-1685"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11627135","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148626585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Changes to the Editorial Board","authors":"Kelin J. Kuhn","doi":"10.1109/LED.2026.3707332","DOIUrl":"https://doi.org/10.1109/LED.2026.3707332","url":null,"abstract":"","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1502-1502"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11627139","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148626588","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sheung Hun Kim;Youngkeun Park;Batzorig Buyantogtokh;Jaejoong Jeong;Chanmi Yu;Seungbum Hong;Byung Jin Cho
{"title":"Enhanced Disturbance Immunity in Ferroelectric FETs Using La-Doped HfO2 Film","authors":"Sheung Hun Kim;Youngkeun Park;Batzorig Buyantogtokh;Jaejoong Jeong;Chanmi Yu;Seungbum Hong;Byung Jin Cho","doi":"10.1109/LED.2026.3703446","DOIUrl":"https://doi.org/10.1109/LED.2026.3703446","url":null,"abstract":"In this work, we introduce La-doped HfO<sub>2</sub> (HLO) as a ferroelectric layer to replace the conventional HfZrO<sub>2</sub> (HZO). Compared to HZO, HLO shows a higher remanent polarization (<inline-formula> <tex-math>${P}_{text {r}}text {)}$ </tex-math></inline-formula>, with a <inline-formula> <tex-math>$2{P}_{text {r}}$ </tex-math></inline-formula> of <inline-formula> <tex-math>$47.8~mu $ </tex-math></inline-formula>C/cm<sup>2</sup>. In addition, field- and time-dependent measurements confirm that switched polarization (<inline-formula> <tex-math>${P}_{text {sw}}text {)}$ </tex-math></inline-formula> of HLO shows a steeper increment than that of HZO, which is attributed to a narrow domain switching distribution. As a result, HLO-FeFETs achieve a 16.0% wider memory window (MW) and reduced threshold voltage (<inline-formula> <tex-math>${V}_{text {T}}text {)}$ </tex-math></inline-formula> shifts under disturb cycling, compared to HZO-FeFETs. These results indicate that HLO is a promising candidate to overcome the disturbance issues in FeFETs.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"47 8","pages":"1551-1554"},"PeriodicalIF":4.6,"publicationDate":"2026-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148627680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}