{"title":"Miniaturized On-Chip Bandpass Filter With Multi-Transmission Zeros Using Interwound Winding Transformer","authors":"Chang Xu;Xiaolong Wang;Cong Wang;Geyu Lu","doi":"10.1109/LED.2025.3549368","DOIUrl":"https://doi.org/10.1109/LED.2025.3549368","url":null,"abstract":"In this letter, a miniaturized on-chip bandpass filter (BPF) with multi-transmission zeros (TZs) is proposed in the gallium arsenide (GaAs)-based integrated passive device (IPD) technology. The proposed BPF consists of two symmetrical LC ring structures, which are connected by an interwound winding transformer (IWT). Three TZs are newly created by coupling capacitors between two interwound spiral inductors in IWT without adding extra circuit components. Through even- and odd-mode analysis, general simultaneous equations for the circuit parameters are newly derived. Two TZs in the upper stopband can be significantly tuned by adjusting the extra variable parameter (<inline-formula> <tex-math>${L}_{{1}}$ </tex-math></inline-formula>) without affecting passband performance. Considering the trade-off between achievable coupling factor, coupling capacitor and performance, narrower bandwidths are preferred for better RL and SR in fabrication. For validation, a prototype filter with a 3-dB fractional bandwidth (FBW) of 48.5% (3.9-6.4 GHz) is manufactured in GaAs-IPD technology. The measured BPF exhibits multi-TZs in the stopband and insertion loss is 2.25 dB at the center frequency <inline-formula> <tex-math>${f}_{{0}} = 5$ </tex-math></inline-formula> GHz. The filter has a compact size of <inline-formula> <tex-math>$0.016 ; lambda _{{0}} times 0.007 ; lambda _{{0}}$ </tex-math></inline-formula>, where <inline-formula> <tex-math>$lambda _{{0}}$ </tex-math></inline-formula> is the wavelength in air at <inline-formula> <tex-math>${f}_{{0}}$ </tex-math></inline-formula>.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"713-716"},"PeriodicalIF":4.1,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"P-Type SnO Thin-Film Transistor With Scaled Channel Lengths for High-Density Monolithic Integration in Complementary Logic Circuits Applications","authors":"Tsung-Che Chiang;Zhen-Hao Li;Cheng-Wei Wang;Pei-Yun Huang;Jo-Lin Chen;Yu-Ming Zhang;Yao-Chen Chien;Kai-Cheng Syu;You-Syuan Zhou;Po-Tsun Liu","doi":"10.1109/LED.2025.3549439","DOIUrl":"https://doi.org/10.1109/LED.2025.3549439","url":null,"abstract":"This work successfully developed an optimized p-type oxide semiconductor thin-film transistor (TFT) using an 8 nm-thick tin monoxide (SnO) channel. The device shows a high hole mobility of ~2 cm2/V<inline-formula> <tex-math>$cdot $ </tex-math></inline-formula>s, an on-off current ratio (ION/I<inline-formula> <tex-math>${}_{text {OFF}}text {)}$ </tex-math></inline-formula> over <inline-formula> <tex-math>$10^{{4}}$ </tex-math></inline-formula>, and a subthreshold swing (S.S.) of less than 0.3 V/decade. When the channel length (L<inline-formula> <tex-math>${}_{text {CH}}text {)}$ </tex-math></inline-formula> is reduced to 100 nm, the devices achieve high drain current density, a low S.S. of ~0.3 V/dec, and a near-enhancement mode threshold voltage (V<inline-formula> <tex-math>${}_{text {TH}}text {)}$ </tex-math></inline-formula> of 0.18 V. Additionally, short-channel transistors, including ITO n-TFT and SnO p-TFT, were integrated through a bottom-up fabrication approach to create full-oxide complementary logic circuits, such as inverters and NAND gates, within a monolithic three-dimensional (M3D) architecture. These circuits demonstrate excellent performance, including a high voltage gain of 73 V/V at V<inline-formula> <tex-math>${}_{text {DD}}=3.6$ </tex-math></inline-formula> V and a large noise margin (NMH/NM<inline-formula> <tex-math>${}_{text {L}}text {)}$ </tex-math></inline-formula> of 1.14 V/1.12 V at V<inline-formula> <tex-math>${}_{text {DD}}=2.8$ </tex-math></inline-formula> V. The fabrication is compatible with back-end-of-line (BEOL) process and operates under a low thermal budget, making it promising for M3D integrated circuits (M3D-ICs).","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"769-772"},"PeriodicalIF":4.1,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Tunable Synaptic Transistor With Volatile and Non-Volatile Switching Capabilities for Hierarchical Data Processing","authors":"Guocheng Zhang;Hongyu Wang;Shixian Qin;Jianchuan Tang;Zili Zeng;Changqiang Su;Xin Yi;Xianghong Zhang;Huipeng Chen","doi":"10.1109/LED.2025.3549491","DOIUrl":"https://doi.org/10.1109/LED.2025.3549491","url":null,"abstract":"The hierarchical processing capabilities of the human visual system can significantly enhance the efficiency of data processing in the central nervous system. Volatile and non-volatile devices are key components in simulating the central nervous system. Realizing both volatile and non-volatile functionalities on a single device is ideal; however, challenges such as complex preparation and cumbersome switching persist. In this study, a tunable synaptic transistor with volatile and non-volatile switching capabilities is developed, offering ease of fabrication and convenient switching. It can simulate various forms of synaptic plasticity and exhibits excellent storage performance in non-volatile mode. Finally, we design an image preprocessing and classification system based on visual selective attention, which enables efficient neuromorphic computation through hierarchical data processing.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"789-792"},"PeriodicalIF":4.1,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892487","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Multiple-Independent-Gate Reconfigurable FETs Processed on Industrial 300 mm FDSOI","authors":"N. Bhattacharjee;Y. He;G. Galderisi;V. Havel;S. Slesazeck;V. Sessi;M. Drescher;M. Zier;M. Simon;K. Ruttloff;K. Li;A. Zeun;A.-S. Seidel;C. Metze;M. Grothe;S. Jansen;J. Hoentschel;T. Mikolajick;J. Trommer","doi":"10.1109/LED.2025.3549531","DOIUrl":"https://doi.org/10.1109/LED.2025.3549531","url":null,"abstract":"Reconfigurable Field Effect Transistors are emerging devices able to extend CMOS circuit functionality, since they can be operated as either n-type or p-type transistors. In this work, we demonstrate the fabrication of RFETs with multiple independent top gates on an industrial fully-depleted silicon-on-insulator technology featuring an ultra-thin buried oxide. The devices are fabricated using industrial 300 mm CMOS processes including the complete back-end-of-line. Two different RFET variants, featuring two and three independent top gates, are presented and their operation is analyzed. Electrical characteristics are discussed in detail, reporting larger than 106 on/off ratios, off-state currents as low as 10 pA/<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>m, and minimal subthreshold swings below 90 mV/dec, depending on the operation mode. Exploiting the body bias option offered by the FDSOI channels, we show that it is possible to boost the individual device performance, thus obtaining high on-state current densities of 32 (35) <inline-formula> <tex-math>$mu $ </tex-math></inline-formula>A/<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>m for n-type (p-type) operation.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"689-692"},"PeriodicalIF":4.1,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Linear Fine-Tuning VFB and Improved Interface via Novel Al₂O₃ Atomic in-situ Dipole Buffer Layer (DBL) in ALD La₂O₃ Dipole-First Stack","authors":"Yanzhao Wei;Jiaxin Yao;Yu Wang;Qingzhu Zhang;Jianfeng Gao;Xiaolei Wang;Jun Luo;Huaxiang Yin","doi":"10.1109/LED.2025.3549003","DOIUrl":"https://doi.org/10.1109/LED.2025.3549003","url":null,"abstract":"In this letter, a novel Al2O3 atomic in-situ dipole buffer layer (DBL) technique is proposed for achieving VFB linear fine-tunability and interface improvement in La2O3 dipole-first gate stack. 10 VFB levels with minimum 9 mV linear fine-tuning step in 400 mV range are achieved by manipulating sub-5-Å Al2O3 between SiO2 interfacial layer (IL) and La2O3 dipole layer in metal-oxide-semiconductor capacitors (MOSCAPs). Furthermore, the Si/SiO2 interface is improved with more than 60.3% interface trap density (Dit) decrease by suppressing La-Si interdiffusion with Al-DBL. A mechanism of La-dipole fine-tuning is proposed and indicates that the Al-DBL is one of the promising techniques for multi-VT integration in future NS GAA-FETs.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"825-828"},"PeriodicalIF":4.1,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"p-NiO/LiNiO-GaN Heterojunctions: A Potential Alternative to p-GaN for Advanced Devices","authors":"Zheng Hao;Alessandro Floriduz;Yuan Zong;Uiho Choi;Mounir Mensi;Elison Matioli","doi":"10.1109/LED.2025.3549252","DOIUrl":"https://doi.org/10.1109/LED.2025.3549252","url":null,"abstract":"In this work, we introduce a p-NiO/LiNiO stack grown via low-temperature deposition processes, offering an effective alternative for creating localized p-type regions in GaN devices. This stack combines a high hole concentration p-NiO film ([h] <inline-formula> <tex-math>$= 2times 10^{{19}}$ </tex-math></inline-formula> cm<inline-formula> <tex-math>${}^{-{3}}$ </tex-math></inline-formula>) with an epitaxially crystalline p-LiNiO film, resulting in a high-quality p-type layer that can be flexibly deposited and patterned on GaN devices. Here, we investigate the transport and breakdown properties of the p-NiO/LiNiO-GaN heterojunction by fabricating a p-NiO/LiNiO-GaN PiN diode. The PiN diode exhibited excellent electrical performance, including a low turn-on voltage (<inline-formula> <tex-math>${V} _{text {ON}}$ </tex-math></inline-formula>) of 1.7 V, a low specific on-state resistance (R<inline-formula> <tex-math>${}_{text {ON},text {sp}}$ </tex-math></inline-formula>) of 1.15 m<inline-formula> <tex-math>$Omega cdot $ </tex-math></inline-formula>cm2, and a high breakdown voltage (BV) exceeding 1000 V, comparable to those achieved with epitaxial GaN homojunctions. These results highlight the potential of utilizing conductive and compatible p-NiO/LiNiO stacks to replace p-GaN for high-quality localized p-n junctions, simplifying the manufacturability of GaN-based devices and enabling advanced device concepts where p-GaN is challenging to be implemented.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"729-732"},"PeriodicalIF":4.1,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Seokjun Kim;Eungkyun Kim;Husam Walwil;Daniel C. Shoemaker;Jimy Encomendero;Matthew T. DeJarld;Maher B. Tahhan;Eduardo M. Chumbes;Jeffrey R. Laroche;Debdeep Jena;Huili G. Xing;Sukwon Choi
{"title":"Thermal Characterization and Design of AlN/GaN/AlN HEMTs on Foreign Substrates","authors":"Seokjun Kim;Eungkyun Kim;Husam Walwil;Daniel C. Shoemaker;Jimy Encomendero;Matthew T. DeJarld;Maher B. Tahhan;Eduardo M. Chumbes;Jeffrey R. Laroche;Debdeep Jena;Huili G. Xing;Sukwon Choi","doi":"10.1109/LED.2025.3548853","DOIUrl":"https://doi.org/10.1109/LED.2025.3548853","url":null,"abstract":"AlN/GaN/AlN high electron mobility transistors (HEMTs) offer enhanced carrier confinement and higher breakdown voltage than conventional AlGaN/GaN HEMTs. In this work, Raman thermometry was used to characterize the self-heating behavior of a single-finger AlN/GaN/AlN HEMT on 6H-SiC. A 3D finite element analysis model was created to optimize the thermal design of the device structure. Simulation results reveal that the optimal buffer layer thicknesses to minimize the channel temperature rise of AlN/GaN/AlN HEMTs on 6H-SiC and diamond substrates are <inline-formula> <tex-math>$sim 2~mu $ </tex-math></inline-formula>m and <inline-formula> <tex-math>$sim 0.7~mu $ </tex-math></inline-formula>m, respectively. Moreover, diamond substrate integration further enhances the thermal performance, achieving a ~45% and ~53% reduction in the device thermal resistance as compared to those of an AlN/GaN/AlN HEMT on 6H-SiC and an AlGaN/GaN HEMT on 4H-SiC, respectively.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"817-820"},"PeriodicalIF":4.1,"publicationDate":"2025-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Binzhou Zuo;Zeyu Wu;Junyuan Zhao;Bo Niu;Yumo Lei;Lixin Cao;Yinfang Zhu;Jinling Yang
{"title":"Bi-Mode Inverse Design of 3D Structures for MEMS Resonators","authors":"Binzhou Zuo;Zeyu Wu;Junyuan Zhao;Bo Niu;Yumo Lei;Lixin Cao;Yinfang Zhu;Jinling Yang","doi":"10.1109/LED.2025.3548612","DOIUrl":"https://doi.org/10.1109/LED.2025.3548612","url":null,"abstract":"This work presents an automated algorithm for MEMS resonator structure generation based on inverse design, integrating deep learning and neural networks to predict key physical properties, including resonance frequency (f), quality factor of thermoelastic damping (Q<inline-formula> <tex-math>${}_{textit {TED}}$ </tex-math></inline-formula>), and motional impedance (Rx). Unlike traditional methods relying on finite element analysis (FEA), this approach leverages a database-driven deep learning model, achieving prediction speeds 9,740 times faster than the conventional FEA software with an average accuracy of 97.5%, 96.5%, 96.4 for f, Q<inline-formula> <tex-math>${}_{textit {TED}}$ </tex-math></inline-formula> and Rx,respectively. The algorithm supports flexural and Lamé modes and could generate resonators with a broad frequency range from ~8 to ~63 MHz, significantly surpassing existing methods. By efficiently predicting seed structures, the method guides the inverse design process, generating high Q, and low Rx resonator structures within 10 minutes. The generated devices exhibit deviations of less than 3% from target performance metrics. Simulations and experimental results validate the feasibility and effectiveness of the proposed algorithm, highlighting its potential for accelerating MEMS design with enhanced performance and precision.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"841-844"},"PeriodicalIF":4.1,"publicationDate":"2025-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Stabilizing ALD Ultrathin In₂O₃ TFTs Under High Humidity Ambient by an Added IGZO Layer","authors":"Shanshan Ju;Jinxiong Li;Yupu Tang;Wei Qian;Fangxing Zhang;Jianzhang Zhu;Xu Tian;Songjie Yang;Lining Zhang;Lei Lu;Shengdong Zhang;Xinwei Wang","doi":"10.1109/LED.2025.3548694","DOIUrl":"https://doi.org/10.1109/LED.2025.3548694","url":null,"abstract":"Atomic-layer-deposited (ALD) ultrathin In2O3 thin-film transistors (TFTs) are highly promising for applications in state-of-the-art displays, flexible electronics, and back-end-of-line (BEOL) integration. However, these TFTs often suffer from pronounced bias-stress instability, which is further magnified under humid ambient. To address this issue, we herein propose a bilayer strategy, where an InGaZnO (IGZO) layer is directly sputtered on the ALD In2O3 channel layer to afford In2O3/IGZO TFTs. The added IGZO layer not only can prevent any direct gas adsorption on the sensitive In2O3 surface, but it also can substantially reduce the surface field strength near S/D to mitigate the risk of water electrolysis from a humid ambient. As a result, the In2O3/IGZO TFTs show one-order-of-magnitude improvement in threshold voltage (<inline-formula> <tex-math>${V}_{textit {th}}$ </tex-math></inline-formula>) shift under both PBS and NBS conditions in high-humidity ambient (85% relative humidity (RH)).","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"773-776"},"PeriodicalIF":4.1,"publicationDate":"2025-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Damage-Free Neutral Beam Etching for Gate Recess in E-Mode AlGaN/GaN HEMTs","authors":"Yi-Ho Chen;Fu-Chuan Chu;Muhammad Aslam;Yao-Jen Lee;Yiming Li;Seiji Samukawa","doi":"10.1109/LED.2025.3548676","DOIUrl":"https://doi.org/10.1109/LED.2025.3548676","url":null,"abstract":"Recess gate etching is a critical technique for achieving enhancement-mode (E-mode) AlGaN/GaN high-electron mobility transistors (HEMTs) because the interface is susceptible to the etching damage. This study fabricates recess gates using the neutral beam etching (NBE) technique. By adjusting the aperture thickness in the NBE apparatus, we simulate both NB-mode and plasma-mode etching. The electrical characteristics of E-mode HEMTs fabricated using these two modes are analyzed and compared through DC, noise, and pulsed IV measurements. The results demonstrate that NB-recessed HEMTs exhibit superior performance.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 5","pages":"705-708"},"PeriodicalIF":4.1,"publicationDate":"2025-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143892544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}