Chang Yeol Lee, Sungchul Kim, Hongshin Jun, Kyung Whan Kim, S. Hong
{"title":"TSV technology and challenges for 3D stacked DRAM","authors":"Chang Yeol Lee, Sungchul Kim, Hongshin Jun, Kyung Whan Kim, S. Hong","doi":"10.1109/VLSIT.2014.6894397","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894397","url":null,"abstract":"A successful integration of Via-middle TSV process in DRAM technology with major process issues is introduced. Fast TSV open/short detection and how to trade-off in choice repair scheme is discussed. Process development for TSV volume shrink required to reduce dynamic power for driving TSV. Fast Cu leak monitor method is essential to sustaining good quality and Fab process control.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115128999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Embedded STT-MRAM for energy-efficient and cost-effective mobile systems","authors":"Seung H. Kang","doi":"10.1109/VLSIT.2014.6894354","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894354","url":null,"abstract":"STT-MRAM is a logic-friendly nonvolatile memory that can realize a combination of high speed, low energy, and high endurance. Embedded STT-MRAM is positioned attractively not only for emerging low standby-power connectivity systems such as wearables, IOT (Internet-of-Things), and secure elements, but also for high-performance mobile SOC as an embedded nonvolatile working memory. With recent breakthroughs in CoFeB-based perpendicular magnetic tunnel junctions (MTJ), embedded STT-MRAM has become more energy-efficient and cost-effective in conjunction with robust data retention, scalable for advanced logic nodes.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122033085","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Mertens, R. Ritzenthaler, A. Hikavyy, J. Franco, J. Lee, D. Brunco, G. Eneman, L. Witters, J. Mitard, S. Kubicek, K. Devriendt, D. Tsvetanova, A. Milenin, C. Vrancken, J. Geypen, H. Bender, G. Groeseneken, W. Vandervorst, K. Barla, N. Collaert, N. Horiguchi, A. Thean
{"title":"Performance and reliability of high-mobility Si0.55Ge0.45 p-channel FinFETs based on epitaxial cladding of Si Fins","authors":"H. Mertens, R. Ritzenthaler, A. Hikavyy, J. Franco, J. Lee, D. Brunco, G. Eneman, L. Witters, J. Mitard, S. Kubicek, K. Devriendt, D. Tsvetanova, A. Milenin, C. Vrancken, J. Geypen, H. Bender, G. Groeseneken, W. Vandervorst, K. Barla, N. Collaert, N. Horiguchi, A. Thean","doi":"10.1109/VLSIT.2014.6894360","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894360","url":null,"abstract":"We present a comprehensive study of Si0.55Ge0.45-cladded p-channel FinFETs, including a comparison with planar SiGe quantum-well devices. The SiGe-cladded FinFETs exhibit ~2× higher hole mobility, ~2× better ION/IOFF, and improved DIBL compared to Si control devices. Superior NBTI reliability over equivalent Si FinFETs is demonstrated for cladding thicknesses down to 3 nm. The dependencies of drive current and hole mobility on both SiGe thickness and device width are examined in detail. This analysis shows that SiGe thickness conformality and epitaxial facet control are crucial for the optimization of SiGe-cladded FinFETs.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128502082","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Ge CMOS: Breakthroughs of nFETs (Imax=714 mA/mm, gmax=590 mS/mm) by recessed channel and S/D","authors":"Heng Wu, M. Si, Lin Dong, Jingyun Zhang, P. Ye","doi":"10.1109/VLSIT.2014.6894374","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894374","url":null,"abstract":"We report a new approach to realize the Ge CMOS technology based on the recessed channel and source/drain (S/D). Both junctionless (JL) nFETs and pFETs are integrated on a common GeOI substrate. The recessed S/D process greatly improves the Ge n-contacts. A record high maximum drain current (I<sub>max</sub>) of 714 mA/mm and trans-conductance (g<sub>max</sub>) of 590 mS/mm, high I<sub>on</sub>/I<sub>off</sub> ratio of 1×10<sup>5</sup> are archived at channel length (L<sub>ch</sub>) of 60 nm on the nFETs. Scalability studies on Ge nFETs are conducted in sub-100 nm region down to 25 nm for the first time. Considering the Fermi level (E<sub>F</sub>) pining near the valence band edge (EV) of Ge, a novel hybrid CMOS structure with the inversion-mode (IM) Ge pFET and the JL accumulation-mode (JAM) Ge nFET is proposed.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130419760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Hong-Yu Chen, B. Gao, Haitong Li, Rui Liu, Peng Huang, Zhe Chen, Bing Chen, Feifei Zhang, Liang Zhao, Zizhen Jiang, Lifeng Liu, Xiaoyan Liu, Jinfeng Kang, Shimeng Yu, Y. Nishi, H. Wong
{"title":"Towards high-speed, write-disturb tolerant 3D vertical RRAM arrays","authors":"Hong-Yu Chen, B. Gao, Haitong Li, Rui Liu, Peng Huang, Zhe Chen, Bing Chen, Feifei Zhang, Liang Zhao, Zizhen Jiang, Lifeng Liu, Xiaoyan Liu, Jinfeng Kang, Shimeng Yu, Y. Nishi, H. Wong","doi":"10.1109/VLSIT.2014.6894434","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894434","url":null,"abstract":"3D RRAM array suffers more serious reliability issues than 2D array due to the additional dimension involved. This paper systematically assesses the cell-location-dependent write-access (selected cells) and disturbance issues (unselected cells) for a 3D vertical RRAM array. Using a combination of experiments and simulations, a methodology is developed to enable array-level evaluation by conducting single-device measurements and without the need to fabricate a full 3D array. Based on this evaluation method, it is found that a double-sided bias (DSB) scheme improves write-disturb tolerance by a factor of 1800 and reduces write latency by 19 % under worst-case analyses.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130454031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Deep insights into low frequency noise behavior of tunnel FETs with source junction engineering","authors":"Qianqian Huang, Ru Huang, Cheng Chen, Chunlei Wu, Jiaxin Wang, Chao Wang, Yangyuan Wang","doi":"10.1109/VLSIT.2014.6894371","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894371","url":null,"abstract":"The low frequency noise (LFN) mechanisms of TFETs with different source junction design are experimentally studied for the first time, including the random telegraph signal (RTS) noise. Different from MOSFET, due to the non-local band-to-band tunneling (BTBT) mechanism and small LFN-generating area, both 1/f and 1/f2 LFN dependence can be observed in large TFETs with large device to device variability, as well as high noise. It is found that the “active” traps responsible for the noise mechanism are located in the area where electron-hole pairs generated by non-local BTBT, and the trap located at the maximum junction electric field tends to have relatively weak impacts on the TFET noise. With new abrupt tunnel junction design, it is observed that the device variability can be effectively alleviated with much lower noise level. In addition, a single-trap-induced RTS noise in TFETs with different source junction design is also experimentally investigated. New features, including strong VD dependence of RTS parameters and significantly high amplitude (~28%), indicate the desirable requirement for the source junction optimization in TFETs.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"53 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132973484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. C. Liu, D. Yaung, J. Sze, C. Wang, Gene Hung, C. Wang, T. Hsu, R. Lin, T. Wang, W. D. Wang, H. Cheng, J. Lin, S. Tsai, S. Tsai, C. Chuang, W. Hsu, S. Y. Chen, K. C. Huang, W. H. Wu, S. Takahashi, Y. Tu, C. Tsai, R. Lee, W. P. Mo, F. J. Shiu, Y. Chao, S. Wuu
{"title":"Advanced 1.1um pixel CMOS image sensor with 3D stacked architecture","authors":"J. C. Liu, D. Yaung, J. Sze, C. Wang, Gene Hung, C. Wang, T. Hsu, R. Lin, T. Wang, W. D. Wang, H. Cheng, J. Lin, S. Tsai, S. Tsai, C. Chuang, W. Hsu, S. Y. Chen, K. C. Huang, W. H. Wu, S. Takahashi, Y. Tu, C. Tsai, R. Lee, W. P. Mo, F. J. Shiu, Y. Chao, S. Wuu","doi":"10.1109/VLSIT.2014.6894429","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894429","url":null,"abstract":"This paper demonstrates an advanced 1.1um pixel backside illuminated CMOS image sensor with a 3D stacked architecture. The carrier wafer in conventional BSI is replaced by ASIC wafer, which contains a part of periphery circuit and is connected to the sensor wafer through bonding technology. With proper layout design and process improvement, the impact of 3D connection (Through Via, TV) on the sensor performance can be significantly minimized. In addition, for the first time, the degradation of stacked pixel performance during the folded circuit operation under sensor array is found and improved. The final stacked sensor exhibits the comparable pixel performances to conventional BSI. Furthermore, stacked architecture provides the opportunity to enhance sensor performance by the separate process tuning for sensor wafers (without any effect on ASIC wafers), leading to a further improvement of dark performance.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128260719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Ragnarsson, S. Chew, H. Dekkers, M. T. Luque, B. Parvais, A. De Keersgieter, K. Devriendt, A. Van Ammel, T. Schram, N. Yoshida, A. Phatak, K. Han, B. Colombeau, A. Brand, N. Horiguchi, A. Thean
{"title":"Highly scalable bulk FinFET Devices with Multi-VT options by conductive metal gate stack tuning for the 10-nm node and beyond","authors":"L. Ragnarsson, S. Chew, H. Dekkers, M. T. Luque, B. Parvais, A. De Keersgieter, K. Devriendt, A. Van Ammel, T. Schram, N. Yoshida, A. Phatak, K. Han, B. Colombeau, A. Brand, N. Horiguchi, A. Thean","doi":"10.1109/VLSIT.2014.6894359","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894359","url":null,"abstract":"A scalable multi-VT enabled RMG CMOS integration process with highly conformal ALD TiN/TiAl/TiN is described. The multi-VT is implemented by metal gate tuning using two different options. The first relies on bottom-barrier thickness control, the second on implantation of nitrogen into the work function metal. A shift in the effective work function (eWF) of ~400 mV is realized by adjusting the TiN bottom barrier thickness underneath TiAl, while over 200 mV shifts are achieved by means of implantation of nitrogen into ALD TiN/TiAl/TiN. The gate-stack Tinv, JG, DIT and reliability as well as the device performance are shown to be unaffected by the multi VT process.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"291-294 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133777984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Ota, M. Saitoh, C. Tanaka, D. Matsushita, T. Numata
{"title":"Systematic study of RTN in nanowire transistor and enhanced RTN by hot carrier injection and negative bias temperature instability","authors":"K. Ota, M. Saitoh, C. Tanaka, D. Matsushita, T. Numata","doi":"10.1109/VLSIT.2014.6894417","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894417","url":null,"abstract":"We experimentally study the random telegraph noise (RTN) in nanowire transistor (NW Tr.) with various widths (W), lengths (L), and heights (H). Time components of RTN such as time to capture (τ<sub>c</sub>) and emission (τ<sub>e</sub>) are independent of NW size, while threshold voltage fluctuation (ΔV<sub>th</sub>) by RTN can be well fitted with 1/{L(W+2H)}<sup>0.5</sup> corresponding to the conventional carrier number fluctuations regardless of the side surface orientation. Hot carrier injection (HCI) and negative bias temperature instability (NBTI) induced additional carrier traps leading to the increase in the number of observed RTN. Moreover, ΔV<sub>th</sub> is enhanced by HCI and NBTI and enhancement of ΔV<sub>th</sub> becomes larger in narrower W.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115488149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Further understandings on random telegraph signal noise through comprehensive studies on large time constant variation and its strong correlations to thermal activation energies","authors":"Jiezhi Chen, Y. Higashi, Koichi Kato, Y. Mitani","doi":"10.1109/VLSIT.2014.6894418","DOIUrl":"https://doi.org/10.1109/VLSIT.2014.6894418","url":null,"abstract":"Comprehensive studies on random telegraph signal (RTS) noise have been done to understand carrier trapping processes, with a main focus on the large variations of time constants. It is observed that time constant distributions, as well as thermal activation energy distributions, weakly depend on the substrate doping concentrations or surface orientations. For individual traps, time constants are quite stable under strong negative bias stressing with serious interface degradation. More importantly, correlations of time constants and thermal activation energies with a narrow distribution window are experimentally observed for the first time. With further discussions, it is concluded that the activation energy variation is the main reason for large time constant distributions, and carrier trapping process is thought to be most likely from multiphonon-assisted tunneling process.","PeriodicalId":105807,"journal":{"name":"2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115743386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}