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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/mems46641.2020.9056329
{"title":"MEMS 2020 Keyword Index","authors":"","doi":"10.1109/mems46641.2020.9056329","DOIUrl":"https://doi.org/10.1109/mems46641.2020.9056329","url":null,"abstract":"","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"11 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81945719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation DETF MEMS谐振器的热稳定性:数值模拟与实验验证
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056338
V. Zega, A. Opreni, G. Mussi, Hyun-Keun Kwon, G. Vukasin, G. Gattere, G. Langfelder, A. Frangi, T. Kenny
{"title":"Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation","authors":"V. Zega, A. Opreni, G. Mussi, Hyun-Keun Kwon, G. Vukasin, G. Gattere, G. Langfelder, A. Frangi, T. Kenny","doi":"10.1109/MEMS46641.2020.9056338","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056338","url":null,"abstract":"The design, fabrication and experimental validation of two MicroElectroMechanical Systems (MEMS) Double-Ended Tuning-Fork (DETF) resonators that exhibit an intrinsic sub-350 ppm thermal stability in the temperature range [5°C–85°C] are reported. A strategy for the optimization of the design of MEMS resonators that exhibit high thermal stability and high quality factor is also provided and a good agreement with experimental data is achieved. The main advantage of the proposed strategy is that it does not require any experimental calibration of the model parameters and can be in principle applied to different kind of resonators, thus representing a powerful tool for the apriori design of thermally stable MEMS resonators with high quality factors.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"20 1","pages":"1207-1210"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81968246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Long-Rangeultrasound Wake-Up Receiver with a Piezoelectric Nanoscale Ultrasound Transducer (pNUT) 带压电纳米级超声换能器的远程超声唤醒接收器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056287
Pietro Simeoni, Matteo Castellani, G. Piazza
{"title":"Long-Rangeultrasound Wake-Up Receiver with a Piezoelectric Nanoscale Ultrasound Transducer (pNUT)","authors":"Pietro Simeoni, Matteo Castellani, G. Piazza","doi":"10.1109/MEMS46641.2020.9056287","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056287","url":null,"abstract":"We report on the first implementation of a long-range wake-up receiver (WuRx) enabled by an aggressively scaled 100 nm thick aluminum nitride transducer that occupies an area of only $100 mu mathrm{m} times 100 mu mathrm{m}$. This piezoelectric Nanoscale Ultrasound Transducer (pNUT) offers the same sensitivity and characteristic impedance of its microscale counterparts but enables “dust-like” WuRx because of its dramatically reduced size. We validate this concept by synthesizing a WuRx using a pNUT and off-the-shelf electronic components forming a voltage amplifier, an envelope detector and a comparator (Fig. 1). We demonstrate robust data transfer over a range of 0.5 m when operating with a 40 kHz carrier signal modulated at 250Hz. Based on these measurements we extrapolate the device performance at resonance to show that communication over> 10m is possible without increasing the WuRx area.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"849-852"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78240346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
High-Speed and Stepping MEMS Rotary Actuator for Multimodal, 360° Side-Viewing Endoscopic Probes 高速和步进MEMS旋转致动器多模态，360°侧视内窥镜探头
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056226
S. Jayhooni, B. Assadsangabi, G. Hohert, P. Lane, H. Zeng, K. Takahata
{"title":"High-Speed and Stepping MEMS Rotary Actuator for Multimodal, 360° Side-Viewing Endoscopic Probes","authors":"S. Jayhooni, B. Assadsangabi, G. Hohert, P. Lane, H. Zeng, K. Takahata","doi":"10.1109/MEMS46641.2020.9056226","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056226","url":null,"abstract":"This paper reports, for the first time, a MEMS rotary actuator that enables side-viewing microendoscopic probes with different modalities for luminal tissue analysis. The developed tubular-form micro rotary actuator offers both high-speed and stepping motions that are compatible with the use for optical coherence tomography (OCT) and Raman spectroscopy, respectively. The actuator, improved from its preceding designs, shows up to 125× higher revolution speeds per power while enabling arbitrary angle-resolved stepping rotations in a ∼50% thinner body, with significantly reduced heating effect for biologically safe operation in vivo. Preliminary testing of the OCT endoscopic probe integrated with the developed rotary actuator/scanner successfully demonstrates real-time 360° imaging of live human skin tissue.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"376-379"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78650549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Nanopin - A MEMS Based Sensor for the Analysis of Single Cell Mechanical Properties 用于单细胞力学性能分析的MEMS传感器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056113
M. Kumemura, L. Kudo, Zhongcai Ma, S. Karsten
{"title":"Nanopin - A MEMS Based Sensor for the Analysis of Single Cell Mechanical Properties","authors":"M. Kumemura, L. Kudo, Zhongcai Ma, S. Karsten","doi":"10.1109/MEMS46641.2020.9056113","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056113","url":null,"abstract":"We developed a MEMS based sensor, Nanopin, for mechanical characterization of individual adherent cells. Nanopin consists of sensing tip that forms a contact with a cell, a displacement sensor, and an actuator. The feasibility of sensing was evaluated using various concentrations of agarose gel, and then the stiffness measurements of human carcinoma cells were conducted on different surfaces. After the measurements of cells, we confirmed that cells grow normally in an incubator.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"311-314"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75455890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Compact Microcontroller-Based MEMS Rate Integrating Gyroscope Module with Automatic Asymmetry Calibration 一种基于微控制器的MEMS速率积分陀螺仪自动非对称校正模块
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056317
R. Gando, D. Ono, S. Kaji, H. Ota, T. Itakura, Y. Tomizawa
{"title":"A Compact Microcontroller-Based MEMS Rate Integrating Gyroscope Module with Automatic Asymmetry Calibration","authors":"R. Gando, D. Ono, S. Kaji, H. Ota, T. Itakura, Y. Tomizawa","doi":"10.1109/MEMS46641.2020.9056317","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056317","url":null,"abstract":"This paper presents the first microcontroller-based module-level MEMS rate integrating gyroscope (RIG) for direct angle measurement after automatic asymmetry calibration. The 5-cm prototype module integrates a vacuum-sealed donut-mass gyroscope device on analog and digital PCBs. In automatic calibration mode, the initial frequency and decay-time asymmetries are electrically tuned and reduced by >40 and >18 times, respectively. The sensing mode is enabled by built-in digital controls of vibration energy and frequency. Continuous angle measurement is confirmed with an angular random walk (ARW) of 0.6 deg/rt-h and a bias instability (BI) of 4.3 deg/h, proving comparable performances with previous FPGA-based large RIG systems. This module paves the way for RIG commercialization studies.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"1296-1299"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72602014","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Modeling and First Characterization of Broad-Spectrum Vibration Rejection of Frequency Modulated Gyroscopes 调频陀螺仪广谱抗振的建模与初步表征
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056265
M. Bestetti, V. Zega, G. Langfelder
{"title":"Modeling and First Characterization of Broad-Spectrum Vibration Rejection of Frequency Modulated Gyroscopes","authors":"M. Bestetti, V. Zega, G. Langfelder","doi":"10.1109/MEMS46641.2020.9056265","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056265","url":null,"abstract":"The work presents a detailed modeling and the first-ever characterization of a frequency modulated (FM) yaw gyroscope in presence of vibrations from low frequency (30 Hz), through the main modes, and up to 40 kHz. The gyroscope two in-plane axes (around 25 kHz) are operated under a Lissajous trajectory (70 Hz period) by an integrated circuit (IC) including oscillators, frequency digitization, and digital demodulation stages. In presence of $2-g_{pk-pk}$ vibrations, no effects are visible across the spectrum apart from the region including the modes. In this range, as predicted by theory, for each axis no effect is observed for accelerations at the axis resonance (< 0.1 dps/g), but a huge effect (tens of dps/g) is visible for accelerations at an offset frequency from resonance corresponding to the mode split.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"259-262"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75072469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Concentric, Mems-Based Optoelectromechanical Pacer for Multimodal Cardiac Excitation 同心mems光电起搏器用于多模态心脏兴奋
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056115
Tobias Weber, C. Zgierski-Johnston, Eric Klein, S. Ayub, P. Kohl, O. Paul, P. Ruther
{"title":"Concentric, Mems-Based Optoelectromechanical Pacer for Multimodal Cardiac Excitation","authors":"Tobias Weber, C. Zgierski-Johnston, Eric Klein, S. Ayub, P. Kohl, O. Paul, P. Ruther","doi":"10.1109/MEMS46641.2020.9056115","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056115","url":null,"abstract":"This paper reports on the fabrication, assembly, characterization and validation of a novel opto-electrical cardiac stimulator designed to augment a mechanical pacing device. The integration of miniaturized electrodes and blue light-emitting diode (LED) chips on the pacer tip with a diameter of 1 mm enables the application of multimodal stimuli in one location on the surface of isolated murine hearts. The opto-electrical stimulator is based on two separate polyimide (PI) substrates each with a thickness of $10 mu mathrm{m}$ combined into a functional unit based on dedicated assembly and encapsulation processes using silicone rubber. The experimental validation in isolated, whole hearts compares electrical, optical and mechanical stimuli exerted at frequencies of up to 8 Hz on Langen-dorff-perfused hearts expressing channelrhodopsin-2. The integrated iridium oxide electrodes implemented above the LED chips enable simultaneous electrical recordings of local cardiac electrical activity.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"361-364"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80162608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Planar Single-Actuator Bi-Stable Mechanical Latch as an Electrical Switch 平面单致动器双稳定机械锁存器作为电气开关
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056413
Yang Bu, Yue Jiang, Saeko Kawano, B. S. T. Tam, Sheng Ni, Liying Lin, O. Tabata, T. Tsuchiya, X. Wang, M. Wong
{"title":"A Planar Single-Actuator Bi-Stable Mechanical Latch as an Electrical Switch","authors":"Yang Bu, Yue Jiang, Saeko Kawano, B. S. T. Tam, Sheng Ni, Liying Lin, O. Tabata, T. Tsuchiya, X. Wang, M. Wong","doi":"10.1109/MEMS46641.2020.9056413","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056413","url":null,"abstract":"A micro-fabricated planar bi-stable mechanical latch is demonstrated and presently reported. The compact size of the bi-stable mechanism is achieved by enclosing an anchored latch groove in the center of other movable structures. Driven using a single actuator, the device can be switched mechanically between two stable states by applying respective setting and resetting voltage of 10.3 V and 9.5 V. Exhibiting good durability and promising potential for applications demanding micro-switches, the device was demonstrated as an electrical switch to control a light-emitting diode.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"42 1","pages":"493-496"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91221825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-Recovering 3-Dimensional Micro Pore Structure Pressure Sensor Using Shape Memory Polymer 基于形状记忆聚合物的自恢复三维微孔结构压力传感器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056168
Byunggeon Park, Young Jung, M. Shin, J. Ko, Hanchul Cho
{"title":"Self-Recovering 3-Dimensional Micro Pore Structure Pressure Sensor Using Shape Memory Polymer","authors":"Byunggeon Park, Young Jung, M. Shin, J. Ko, Hanchul Cho","doi":"10.1109/MEMS46641.2020.9056168","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056168","url":null,"abstract":"Shape memory polymer (SMP) is a polymer based on PU that has the property of restoring to its original shape at a specific temperature like a shape memory alloy. This ability could improve durability of sensors in cyclic loading. We fabricate a porous structured sensor having a self-recovery ability. This sensor shows good durability and sensitivity than other polyurethane porous structure. Also, the developed sensor is rapidly restored in 30 seconds in a 70 °C oven. We propose a self-recovering capacitive pressure sensor which has excellent durability. Furthermore, it works in the wide pressure range (∼400kPa) with good linearity.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"71 1","pages":"685-688"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91227717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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