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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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In-Plane Mode Resonant Cantilever Sensor to Detect Kinetic/Thermodynamic Parameters for Aptamer-Ligand Binding 平面模式共振悬臂传感器检测适配体-配体结合动力学/热力学参数
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056123
Xuefeng Wang, Yarong Cheng, Shengran Cai, P. Xu, Ying Chen, Haitao Yu, Xinxin Li
{"title":"In-Plane Mode Resonant Cantilever Sensor to Detect Kinetic/Thermodynamic Parameters for Aptamer-Ligand Binding","authors":"Xuefeng Wang, Yarong Cheng, Shengran Cai, P. Xu, Ying Chen, Haitao Yu, Xinxin Li","doi":"10.1109/MEMS46641.2020.9056123","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056123","url":null,"abstract":"An in-plane mode resonant cantilever sensor working in solution is developed for detecting physicochemical parameters of aptamer-ligand binding. The cantilever body is enclosed inside a hydrophobic parylene shell, and a ring-shaped hydrophobic slit is designed to prevent the solution leak inside the shell, allowing the cantilever structure keeps high-Q resonance in air while the binding sensing pool is exposed to aqueous solution for the biological binding. The resonant cantilever continuously records the frequency-shift according to the binding induced mass change on the cantilever. The frequency signal is useful for revealing kinetic/thermodynamic mechanism of the interface binding by fitting the detected sensorgram with classic equations. This detection strategy is label-free and calibration-free, with all the measurement completed using one device to avoid system error.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"88-91"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86273885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fully Additively Manufactured, Nanostructured, Miniature Ionic Liquid Electrospray Sources 完全增材制造，纳米结构，微型离子液体电喷雾源
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056405
D. Melo-Máximo, L. Velásquez-García
{"title":"Fully Additively Manufactured, Nanostructured, Miniature Ionic Liquid Electrospray Sources","authors":"D. Melo-Máximo, L. Velásquez-García","doi":"10.1109/MEMS46641.2020.9056405","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056405","url":null,"abstract":"We report the design, fabrication, and characterization of the first fully additively manufactured ionic liquid electrospray sources in the literature. The devices are diodes composed of an emitting electrode and an extractor electrode: the emitting electrode is a monolithic array of digital light projection (DLP)-printed solid, conical, polymeric needles covered by a conformal layer of hydrothermally grown zinc oxide (ZnO) nanowires as wicking material, while the extractor electrode is a stainless-steel plate with an array of apertures that matches the pattern of the array of needles. Devices with 1, 7, and 19 2.5 mm-long, $sim 100 mu mathrm{m}$ tip diameter needles (2.1 mm pitch), covered with a forest of $1.2 mu mathrm{m}$ long, 150 nm diameter ZnO nanowires, were designed, fabricated, and characterized in vacuum (∼10−6 Torr) in a triode configuration (i.e. with an external collector electrode) in the negative polarity. Devices emit up to ∼86% of the current produced by the emitting electrode, and attain peremitter currents as high as $15 mu mathrm{A}$ –a tenfold larger than cleanroom-microfabricated counterparts.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"598-601"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83128324","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
$0.0062 {}^{circ}/sqrt{hr}$ Angle Random Walk and $0.027 {}^{circ}/hr$ Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes $0.0062 {}^{circ}/sqrt{hr}$角度随机游走和$0.027 {}^{circ}/hr$偏置不稳定性
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056391
Sajal Singh, J. Woo, G. He, J. Cho, K. Najafi
{"title":"$0.0062 {}^{circ}/sqrt{hr}$ Angle Random Walk and $0.027 {}^{circ}/hr$ Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes","authors":"Sajal Singh, J. Woo, G. He, J. Cho, K. Najafi","doi":"10.1109/MEMS46641.2020.9056391","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056391","url":null,"abstract":"This paper reports measured results for a fused-silica precision shell integrating (PSI) micro gyroscope employing out-of-plane drive/sense transduction mechanism. The PSI gyroscope is made with a 5 mm radius shell resonator operating in $n=2$ wine-glass mode at a frequency ($f_{n=2}$) of 5.803 kHz with as-fabricated frequency split ($Delta f$) of 2.1 Hz. Large and reasonably uniform capacitance (∼0.25 pF) is achieved with flat surface electrodes. The gyroscope is operated in the force-rebalance mode by interfacing with an ultra-low-noise transimpedance amplifier (TIA). Near-navigation grade angle random walk (ARW) of $0.0062 deg/sqrt{mathrm{h}}mathrm{r}$, in-run bias instability (BI) of 0.027 deg/hr and scale factor of 158 mV/deg/s without any temperature compensation are achieved.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"737-740"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82086317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Self-Cleaning Drop Free Glass Operated by Acoustic Atomization/Oscillation for Autonomous Driving and IoT Technology 用于自动驾驶和物联网技术的声学雾化/振荡自清洁无滴玻璃
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056111
Seungmin Lee, Youngbin Hyun, Kang-Young Lee, Jeongmin Lee, S. Chung
{"title":"Self-Cleaning Drop Free Glass Operated by Acoustic Atomization/Oscillation for Autonomous Driving and IoT Technology","authors":"Seungmin Lee, Youngbin Hyun, Kang-Young Lee, Jeongmin Lee, S. Chung","doi":"10.1109/MEMS46641.2020.9056111","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056111","url":null,"abstract":"This paper presents self-cleaning drop free glass (DFG) through acoustic atomization and oscillation for autonomous driving and IoT technology. The behavior of an oscillating droplet actuated by a ring-piezoactuator is investigated by high-speed images in a wide range of acoustic amplitudes and frequencies. The atomization and oscillation of a droplet are separately tested using prepared DFG samples. The droplet atomization remains tiny satellite droplets on the surface of the DFG after the operation, while the droplet oscillation clearly removes the droplet from the surface. The DFG can be used to efficiently clean water and viscous droplets generated on the surface of various optical sensors.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"36-37"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82466971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Massive Integration of Light Driving Gel Actuator for Single Cell Manipulation 用于单细胞操作的光驱动凝胶驱动器的大规模集成
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056395
Yuha Koike, Hiroki Wada, Y. Yokoyama, T. Hayakawa
{"title":"Massive Integration of Light Driving Gel Actuator for Single Cell Manipulation","authors":"Yuha Koike, Hiroki Wada, Y. Yokoyama, T. Hayakawa","doi":"10.1109/MEMS46641.2020.9056395","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056395","url":null,"abstract":"We propose drive method of on-chip gel actuator using light irradiation for massive integration of gel actuators. The gel actuator is made of temperature responsive gel and patterned on a chip with light absorbing material. Thus, it can be driven by irradiation of light to control its temperature. By using this method, we can selectively drive an actuator among massively integrated actuators by irradiating patterned light and it can be applied to high-throughput cell manipulations. In this study, we demonstrated an example of cell manipulation by using this method. We made a flow channel for cell transportation by irradiating light. We succeeded in making straight channel by irradiating actuators with sheet laser. In this channel, we observed that motile cells moved and we succeeded in trapping the motile cells by turning off the laser and swelling the actuators.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"41 1","pages":"1094-1097"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81737390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and Implementation of a Novel Skull Vibration Sensing Module for Bone Conduction Microphone 一种新型骨传导麦克风颅骨振动传感模块的设计与实现
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056312
Bo-Cheng You, Sung-Cheng Lo, Chun-Kai Chan, Hsien-Lung Ho, Shih-Chia Chiu, Guan-Hong Hsieh, W. Fang
{"title":"Design and Implementation of a Novel Skull Vibration Sensing Module for Bone Conduction Microphone","authors":"Bo-Cheng You, Sung-Cheng Lo, Chun-Kai Chan, Hsien-Lung Ho, Shih-Chia Chiu, Guan-Hong Hsieh, W. Fang","doi":"10.1109/MEMS46641.2020.9056312","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056312","url":null,"abstract":"This study presents a packaged MEMS acoustic or air pressure sensing module (Fig. 1) to detect the skull vibration for bone conduction microphone (BCM) application. The proposed microphone design has two merits: (1) the packaged module (Fig. 1) enable the skull vibration detection using the MEMS sensor; (2) no sound port is required to remove the environmental and wind noise and to avoid the damage from dust and water (Fig. 1a). The device with the dimensions of $3.5times 2.65times 1.48 text{mm}^{3}$ is implemented using the packaging and assembly of existing MEMS sensor with polymer diaphragm and metal proof-mass. Measurements show the device has a sensitivity of −39.1dB/g, $text{THD} < 0.22 %$ at 1kHz, and ±5dB bandwidth for 100Hz∼6.7kHz. Frequency responses of different samples show good repeatability.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"4 1","pages":"118-121"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89235155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Dandelion Flower Like, APTES Functionalized Gallium Nitirde Microsphere for Fluorescence Detection of Bovine Serum Albumin Protein 蒲公英花状APTES功能化氮化镓微球荧光检测牛血清白蛋白
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056337
Manimuthu Veerappan, Fei Wang
{"title":"Dandelion Flower Like, APTES Functionalized Gallium Nitirde Microsphere for Fluorescence Detection of Bovine Serum Albumin Protein","authors":"Manimuthu Veerappan, Fei Wang","doi":"10.1109/MEMS46641.2020.9056337","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056337","url":null,"abstract":"In this abstract, we present GaN microsphere with dandelion flower-like morphology and high crystalline quality, synthesized using the optimized ammonothermal-ammonolysis hybrid method. The GaN micro-spherical flower are further functionalized with APTES for immobilization of biomolecules. Therefore, GaN microsphere has been first ever utilized for BSA protein biosensor. We studied the influence of the ammonolysis temperature on the BSA sensing performance of the GaN based protein biosensors. By varying the band-gap of the material, APTES modified GaN microspheres have demonstrated tunable blue and green fluorescent emission from BSA, which shows promising application for protein detection.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"342-345"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89606929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Origami-Structured Flexible Electronic Substrate with Faces Parallel to Target-of-Attachment Surfaces 一种面与附着目标面平行的折纸结构柔性电子基板
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056110
H. Yasuga, Atsushi Eda, K. Suto, T. Tachi, E. Iwase
{"title":"An Origami-Structured Flexible Electronic Substrate with Faces Parallel to Target-of-Attachment Surfaces","authors":"H. Yasuga, Atsushi Eda, K. Suto, T. Tachi, E. Iwase","doi":"10.1109/MEMS46641.2020.9056110","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056110","url":null,"abstract":"We propose a flexible electronic substrate structured by Origami folding of non-stretchable film with faces parallel to target-of-attachment surfaces. A folding (“Origami”) or cutting (“Kirigami”) of a thin film have opened up the application of non-stretchable materials to flexible electronic devices attached to a curved surface. In this paper, we propose origami-structured flexible electronic substrates which have faces parallel to the target-of-attachment surface. The parallel faces have engineering importance and usefulness for taking direct contact with target-of-attachment surfaces and mounting electronic elements, e.g. sensors or light emitters. These characteristics are expected to allow for the realization of flexible devices capable of sensing shear force or flow velocity parallel to object's surfaces.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"38 44","pages":"909-912"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91514377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integrated Phosphate and pH Sensing System for Water Quality Monitoring 用于水质监测的综合磷酸盐和pH传感系统
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056230
Renuka Bowrothu, T. Schumann, Hae-in Kim, Kyoung-Tae Kim, S. Hwang, Yoonseok Lee, Y. Yoon
{"title":"Integrated Phosphate and pH Sensing System for Water Quality Monitoring","authors":"Renuka Bowrothu, T. Schumann, Hae-in Kim, Kyoung-Tae Kim, S. Hwang, Yoonseok Lee, Y. Yoon","doi":"10.1109/MEMS46641.2020.9056230","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056230","url":null,"abstract":"Cobalt (Co) ion selective electrode (ISE) has been studied for selective phosphate detection. As the electromotive force (EMF) response of this electrode to phosphate is affected by surrounding pH conditions, it has not been readily utilized for in-situ monitoring. In this work, we present an integrated Co based phosphate and antimony (Sb) based pH sensing system, which enables us to monitor precise phosphorous concentration taking into account a local pH level in aqueous solution. Platinum is used as the reference electrode. An extremely broad sensing range of phosphate concentration with 9 orders of magnitude concentration ranging between $5times 10^{-3}$ to $5times 10^{-12}$ M is reported. The sensing sensitive of 5 pM is one of the best reported in this kind of sensors in literature. Also, simultaneous detection of pH and phosphate concentration is presented using integrated wireless Bluetooth module. The total area of the fabricated sensor is 4 cm2.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 4 1","pages":"713-716"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90061332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Subcellular Imaging During Single Cell Mechanical Characterization 单细胞力学表征过程中的亚细胞成像
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056362
Deniz Pekin, G. Perret, Quentin Rezard, J. Gerbedoen, S. Meignan, D. Collard, Chann Lagadec, M. Tarhan
{"title":"Subcellular Imaging During Single Cell Mechanical Characterization","authors":"Deniz Pekin, G. Perret, Quentin Rezard, J. Gerbedoen, S. Meignan, D. Collard, Chann Lagadec, M. Tarhan","doi":"10.1109/MEMS46641.2020.9056362","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056362","url":null,"abstract":"We report a method for combining confocal microscopy with single-cell mechanical characterization. This method allows investigating the effect of subcellular deformation (e.g. membranes, cytoplasm, cytoskeleton and organelles as endoplasmic reticulum, mitochondria, and nucleus) on cell mechanical properties (e.g. stiffness and viscosity). Such a method is essential to choose biologically relevant mechanical properties of malignant cells as diagnostic cancer biomarkers. Using MEMS tweezers, we captured live single cancer cells and performed subcellular imaging during compression assays for mechanical measurements to obtain the deformation-dependent cell properties.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"62-65"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80708337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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