发布求助
文献互助 智能选刊 最新文献

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

筛选
英文 中文
Mechanical Tuning of Magnetic Anisotropy 磁各向异性的机械调谐
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056417
M. M. Torunbalci, S. Bhave
{"title":"Mechanical Tuning of Magnetic Anisotropy","authors":"M. M. Torunbalci, S. Bhave","doi":"10.1109/MEMS46641.2020.9056417","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056417","url":null,"abstract":"This paper demonstrates piezo-mechanical manipulation of magnetic anisotropy in a thin-film CoFeB ferromagnet (FM) via magnetostriction effect. A 20 nm thick CoFeB resistor is fabricated at the base of an AlN cantilever and its magnetization change is detected by measuring anisotropic magnetoresistance (AMR). The uniaxial strain induced in the CoFeB strip by cantilever bending exhibits a 22% change in AMR and rotates the magnetic anisotropy by 20°.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"120 1","pages":"1145-1148"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87721431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
3D Microfluidic Device for Perfusion Culture of Spheroids 球体灌注培养的三维微流控装置
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056442
K. Nishimura, Minghao Nie, S. Takeuchi
{"title":"3D Microfluidic Device for Perfusion Culture of Spheroids","authors":"K. Nishimura, Minghao Nie, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056442","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056442","url":null,"abstract":"We propose a 3D spheroid trapping device featured with a gel formed in the proximity with the spheroids to facilitate spheroid adhesion and perfusion. The device is composed of an upper channel to introduce pre-gel solutions, a bridge region to form a gel and a lower channel to trap a spheroid and perfuse culture media. Due to surface-tension-assisted microfluidic functions, a gel is formed only in the bridge region. The gel performs as an anchoring scaffold for spheroids and enables media perfusion. As a result of spheroid culture, angiogenic vascular sprouts were formed and the sprouts had branched lumen structure. We believe this device will contribute widely to biomedical studies.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"998-1001"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85723707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Comprehensive Analysis and Control of Diffusioosmosis-Driven Ionic Transport Through Interconnected Nanoporous Membranes 纳米孔膜扩散渗透驱动离子传输的综合分析与控制
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056409
Jongwan Lee, Kyunghun Lee, Cong Wang, Dogyeong Ha, Jungyul Park, Taesung Kim
{"title":"Comprehensive Analysis and Control of Diffusioosmosis-Driven Ionic Transport Through Interconnected Nanoporous Membranes","authors":"Jongwan Lee, Kyunghun Lee, Cong Wang, Dogyeong Ha, Jungyul Park, Taesung Kim","doi":"10.1109/MEMS46641.2020.9056409","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056409","url":null,"abstract":"We introduce a micro-/nanofluidic platform enabling the comprehensive analysis and control of diffusioosmosis (DO)-driven ionic transport through a nanochannel network. The nanochannel network is fabricated in the microfluidic channel by forming a membrane via the self-assembly of nanoparticles (i.e., self-assembled particle membrane, SAPM). This fabrication method allows to use various and different nanoparticles so that it is possible to modulate the material properties of the nanochannel network. Using the platform, we analyze the thermal effect on DO-driven ionic transport with various concentrations of electrolyte solutions with the aid of a temperature switching device (TSD).","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"1134-1136"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86007312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
One-Step RT-PCR for Detection of Micrornas in Exosomes Using Droplet Microfluidics 利用微滴微流体一步法RT-PCR检测外泌体中的微rna
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056207
Binbin Cui, Chunchen Liu, S. Yao
{"title":"One-Step RT-PCR for Detection of Micrornas in Exosomes Using Droplet Microfluidics","authors":"Binbin Cui, Chunchen Liu, S. Yao","doi":"10.1109/MEMS46641.2020.9056207","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056207","url":null,"abstract":"The dysregulation of the microRNAs, small noncoding RNA around 22 bases, accounts for a wide range of diseases including cancer. However, current methods technologies for of the microRNA the detection and analysis of microRNA are limited to the analysis of bulk exosomes, which fails to depict the heterogeneity of the exosome population as individual vesicles. In this work, we developed a reverse transcription polymerase chain reaction (RT-PCR) protocol on a droplet microfluidic platform. We employed the synthetic hsa-miR-21-5p and exosomes extracted from lung cancer patients in the proof-of-concept experiments. The results indicated that our method can detect as low as a single molecule of microRNA per droplet, which is promising for single exosome microRNA assays.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"142-146"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88760047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Locally-Patterned Parylene Membrane Enables Electrical Resistance Measurement for a Cellular Barrier Consisting of < 100 Cells 局部图案聚对二甲苯膜使电阻测量组成的细胞屏障小于100个细胞
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056109
Takumi Yamada, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi
{"title":"Locally-Patterned Parylene Membrane Enables Electrical Resistance Measurement for a Cellular Barrier Consisting of < 100 Cells","authors":"Takumi Yamada, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056109","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056109","url":null,"abstract":"We present a system for measuring electrical resistance of a cellular barrier consisting of < 100 cells. We fabricated a parylene membrane with pores etched by photolithography technique and bonded it to Polydimethylsiloxane (PDMS) wells by H2O vapor plasma treatment. This membrane separated the well into two compartments. In our system, since the placement and number of pores were easy to control, the pore-etched part of the membrane was fully covered with cells. Thus, electrical resistance was easily measured using only a small number of cells. As a demonstration of the measurement with the system, Caco-2 cells were seeded on an upper side of the membrane, and the resistance was measured using a volt-ohm meter.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"325-327"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88891792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Strong Magnetoelectric Effects of 2–2 Composites Made of AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition on Magnetostrictive Foils for Energy Harvesting Applications 磁致伸缩薄膜上等离子体增强原子层沉积AlN薄膜制备的2-2复合材料的强磁电效应
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056193
Tai Nguyen, Noureddine Adjeroud, S. Glinšek, Y. Fleming, J. Guillot, J. Polesel-Maris
{"title":"Strong Magnetoelectric Effects of 2–2 Composites Made of AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition on Magnetostrictive Foils for Energy Harvesting Applications","authors":"Tai Nguyen, Noureddine Adjeroud, S. Glinšek, Y. Fleming, J. Guillot, J. Polesel-Maris","doi":"10.1109/MEMS46641.2020.9056193","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056193","url":null,"abstract":"This work presents a novel process of magnetoelectric (ME) stacks composed of a highly (002)-oriented aluminum nitride (AlN) film grown by plasma-enhanced atomic layer deposition (PEALD) on magnetostrictive nickel, iron, and cobalt foils. We report an efficient methodology to process high quality piezoelectric AlN films by PEALD at low temperatures. The effective transverse piezoelectric coefficient $e_{31,f}$ was evaluated to be 0.37 C/m2 for the highly (002)-oriented AlN film. Moreover, by the conformal coating obtained by PEALD, a strong ME coupling of 2.8 V.cm−1. Oe−1 is obtained out of resonance on 2–2 composites of a (002)-oriented AlN film on nickel. This ME device could open a novel way for energy harvesting of microsystems.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"578-581"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81249599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Rapid Prototyping of Microactuators by Integrating 3D Printed Polymeric Structures with NiTi Thin Film 集成3D打印聚合物结构与NiTi薄膜的微致动器快速成型
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056231
C. Vélez, Sukjun Kim, M. Babaei, D. Patel, C. Knick, Gabriel L. Smith, S. Bergbreiter
{"title":"Rapid Prototyping of Microactuators by Integrating 3D Printed Polymeric Structures with NiTi Thin Film","authors":"C. Vélez, Sukjun Kim, M. Babaei, D. Patel, C. Knick, Gabriel L. Smith, S. Bergbreiter","doi":"10.1109/MEMS46641.2020.9056231","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056231","url":null,"abstract":"This work demonstrates the first sputtered thin-film nickel-titanium (NiTi) shape-memory alloy (SMA) actuators combined with direct 3D printing of polymeric structures. Resulting actuators are fast to prototype, reliable and stable (up to 5000 cycles), and can utilize complex geometries challenging to achieve with conventional MEMS microfabrication. The actuator design uses 3D printed polymer as the passive layer in unimorph actuators, adding significant versatility to the actuator design. An actuator designed for high force-displacement was fabricated with a $15 mu mathrm{m}$ thick polymer layer and characterized by applying currents up to 18 ma (7.3 mW, producing ∼156°C) resulting in a maximum displacement of $3.3 mu mathrm{m}$ and ∼0.9 mN blocking force. Dynamic operation with falling/rising times of 20.1 ms/9.8 ms and 33.5 Hz maximum operation frequency was also demonstrated.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"893-896"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88354179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Monolithic Integration of Plasmonic Meta-Material Absorber with CMOS-MEMs Infrared Sensor for Responsivity Enhancement and Human Detection Application 等离子体超材料吸收器与CMOS-MEMs红外传感器的集成，用于提高响应性和人体检测应用
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056382
Pen-Sheng Lin, Ting-Wei Shen, Kai-Chieh Chang, W. Fang
{"title":"Monolithic Integration of Plasmonic Meta-Material Absorber with CMOS-MEMs Infrared Sensor for Responsivity Enhancement and Human Detection Application","authors":"Pen-Sheng Lin, Ting-Wei Shen, Kai-Chieh Chang, W. Fang","doi":"10.1109/MEMS46641.2020.9056382","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056382","url":null,"abstract":"This study monolithically integrates a metal-insulator-metal-based (MIM) plasmonic metamaterial absorber (PMA) with a thermoelectric (TE) infrared (IR) sensor using standard TSMC CMOS platform. The proposed design extends the strip-via releasing hole structure in [1] to further integrate MIM absorber with TE IR sensor. Such design exhibits three merits: (1) the line width requirement of MIM absorber is achieved by CMOS process, (2) the absorption peaks of MIM absorbers can be modulated by pattern designs in the epsilon-near-pole region, and (3) the MIM absorbers can be designed to broaden the absorption spectrum of IR sensor. In application, the absorption spectrum of IR sensor is designed within $8-14mu mathrm{m}$ in this study for human detection application. Measurement result demonstrates the integration of MIM absorber and IR sensor can achieve 21% responsivity improvement and the measured absorption spectrum matches with simulation.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"58 1","pages":"157-160"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86798429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire 批量制备硅纳米线扭转梁的静电微镜阵列
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056252
Tomoya Nakamura, Y. Hirai, O. Tabata, T. Tsuchiya
{"title":"Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire","authors":"Tomoya Nakamura, Y. Hirai, O. Tabata, T. Tsuchiya","doi":"10.1109/MEMS46641.2020.9056252","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056252","url":null,"abstract":"A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has $100-mu mathrm{m}$ square plate of $5 mu mathrm{m}$ thick, which is suspended by thin silicon nanowire of about $1 mu mathrm{m}$ thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of $4times 4$ devices at relatively low actuation voltage (∼20 Vpp) and large mechanical deflection amplitude (∼9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"1157-1160"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86963191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven 用单片集成微烤箱研究宽带表面声波陀螺仪的长期稳定性
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056180
A. Mahmoud, T. Mukherjee, G. Piazza
{"title":"Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven","authors":"A. Mahmoud, T. Mukherjee, G. Piazza","doi":"10.1109/MEMS46641.2020.9056180","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056180","url":null,"abstract":"This paper is the first to investigate the long-term stability of Surface Acoustic Wave Gyroscopes (SAWG) using an ovenized control system. Monolithic integration of a MEMS heater adjacent to SAW devices on Lithium Niobate over insulator substrate (LNOI) tightly couples frequency-based temperature detection with heating for temperature and frequency stabilization. This first prototype demonstrates the ability to minimize the temperature variations of the SAWG to below $pm 10 mumathrm{K}$ and stabilize the SAWG resonance frequency to ±0.2 ppm. This approach thus eliminates the thermal drift in a SAWG and enables the development of a new generation of MEMS-based gyroscopes with long-term stability.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"252-254"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85635607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
首页 上一页 下一页 尾页
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：481959085
Book学术官方微信