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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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4 W Dual-Contact Material MEMS Relay with a Contact Force Maximizing Structure 具有接触力最大化结构的4w双触点材料MEMS继电器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056178
Su-Bon Kim, Yong-Hoon Yoon, Yong-Bok Lee, Kwang-Wook Choi, Min-Seung Jo, Hyun-Woo Min, Jun‐Bo Yoon
{"title":"4 W Dual-Contact Material MEMS Relay with a Contact Force Maximizing Structure","authors":"Su-Bon Kim, Yong-Hoon Yoon, Yong-Bok Lee, Kwang-Wook Choi, Min-Seung Jo, Hyun-Woo Min, Jun‐Bo Yoon","doi":"10.1109/MEMS46641.2020.9056178","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056178","url":null,"abstract":"This paper reports an unprecedented 4 W MEMS relay that utilizes a dual contact-material system and a contact force maximizing structure. The contact force-maximizing structure is designed to achieve extremely low contact resistance. So far, commercialized MEMS relays have achieved a power level of 0.03 W in hot-switching conditions. In this work, we achieved a MEMS relay with operation reliability up to $5.7times 10^{4}$ cycles and $1.3times 10^{3}$ cycles at 10 V/300 mA (3 W) and 10 V/400 mA (4 W) signals, respectively, in hot-switching conditions. This achievement was due to an extremely-low contact resistance of $1.65 mathrm{m}Omega$ achieved by utilizing the proposed contact force maximizing structure coupled with dual contact materials.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"346 1","pages":"114-117"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73923541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection 基于特征几何的声学放大微机械共振检测集成平台
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056209
I. Latif, M. Toda, T. Ono
{"title":"Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection","authors":"I. Latif, M. Toda, T. Ono","doi":"10.1109/MEMS46641.2020.9056209","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056209","url":null,"abstract":"This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"834-837"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73997727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sensitivity Improvement of P+Si/Au Thermopile-Based Gas Flow Sensor by Optimizing Heat-Sink and Thermal-Insulation Configuration 通过优化散热器和隔热结构提高P+Si/Au热电堆气体流量传感器的灵敏度
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056236
Shanshan Wang, Jiachou Wang, Xinxin Li
{"title":"Sensitivity Improvement of P+Si/Au Thermopile-Based Gas Flow Sensor by Optimizing Heat-Sink and Thermal-Insulation Configuration","authors":"Shanshan Wang, Jiachou Wang, Xinxin Li","doi":"10.1109/MEMS46641.2020.9056236","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056236","url":null,"abstract":"This paper reports a front-sided microfabricated high-sensitive p+Si/Au thermopile-based gas flow sensor for high-yield and low-cost volume production. Herein, the suspended p+Si beams, under the dielectric membrane and used to construct the p+Si/Au thermopile-based flow sensor, are only fabricated from one side of single crystal silicon wafer, without double-sided alignment exposure, cavity-SOI process, and wafer-bonding needed. The fabricated gas flow sensor with tiny-size of $0.5text{mm}times 0.7text{mm}$ is achieved. Compared to the most of previously reported p+Si/metal thermopile-based flow sensor, by embedding the cold junction of p+Si beam into the silicon substrate and optimizing the thermal insulation of the suspended membrane from the silicon substrate, the fabricated flow sensor achieves higher sensitivity of 0.337mV/(SLM)/mW (Output without any amplification) for nitrogen gas flow and quick response time of 1.5ms.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 2 Suppl 1","pages":"657-660"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75608773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation 高温操作用碳纳米管阵列微机电开关
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056285
E. Jo, Yunsung Kang, Sangjun Sim, Jungwook Choi, Jongbaeg Kim
{"title":"Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation","authors":"E. Jo, Yunsung Kang, Sangjun Sim, Jungwook Choi, Jongbaeg Kim","doi":"10.1109/MEMS46641.2020.9056285","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056285","url":null,"abstract":"This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1,000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"574-577"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72957424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In-Situ Monitoring of Gas Molecules in Chromatography by Utilizing a Pressure Sensor 利用压力传感器对色谱中气体分子进行原位监测
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056336
A. Bulbul, Hanseup Kim
{"title":"In-Situ Monitoring of Gas Molecules in Chromatography by Utilizing a Pressure Sensor","authors":"A. Bulbul, Hanseup Kim","doi":"10.1109/MEMS46641.2020.9056336","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056336","url":null,"abstract":"We report a novel concept and testing results of utilizing a pressure sensor as an in-situ gas sensor for a micro gas chromatography system. The pressure sensor utilized a phenomenon that instant viscosity variation by an injection of gas molecules into a background gas stream caused instant pressure transient thus making it feasible to the in-situ monitor gas molecules using a pressure sensor during gas chromatography operation. Such a concept of viscosity-to-pressure conversion was experimentally proven and implemented. The implemented pressure sensors at multiple locations successfully monitored the progress of gas molecules in separation in four serially connected micro columns. This pressure sensor based chromatogram generated 125.5 Pa of pressure for $0.5 mumathrm{L}$ of hexane sample and showed a separation of hexane and heptane mixture with plate numbers of 93.68 and 244.69 respectively and with a separation distance and resolution of 30.5 and 2.4 respectively. The separation distance and resolution were 0.86 and 1.45 times to that of in FID separation, indicating no significant pressure sensor influences on separation.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"46 1","pages":"709-712"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75319940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing 用于粒子传感的弱耦合低q压电MEMS谐振器阵列的质量调谐
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056426
Malar Chellasivalingam, Brian M. Graves, A. Boies, A. Seshia
{"title":"Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing","authors":"Malar Chellasivalingam, Brian M. Graves, A. Boies, A. Seshia","doi":"10.1109/MEMS46641.2020.9056426","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056426","url":null,"abstract":"This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS resonator array for ultrafine aerosol particulate sensing. The mass balancing technique enables the lifetime extension of such real-time particulate sensors without employing any wet or dry-cleaning techniques to remove particles from the resonators. This mass balancing is demonstrated for both the flexural and bulk modes of the same coupled resonator array occurring at ∼54kHz and ∼2.53MHz, respectively. This system also demonstrates for a degree of passive environment immunity to temperature effects by using an amplitude ratio output metric. The Q factor of the coupled MEMS resonator system do not degrade substantially with increased particulate loading.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"761-764"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74417887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Plasma-Treated PDMS as Intrinsically Non-Wetting Surface for Gallium-Alloy Liquid Metal Microfluidics 等离子体处理PDMS作为镓合金液态金属微流控的本质不润湿表面
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056134
S. Babu, Jeong‐Bong Lee
{"title":"Plasma-Treated PDMS as Intrinsically Non-Wetting Surface for Gallium-Alloy Liquid Metal Microfluidics","authors":"S. Babu, Jeong‐Bong Lee","doi":"10.1109/MEMS46641.2020.9056134","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056134","url":null,"abstract":"We report the CF4/O2 plasma treatment of polydimethylsiloxane (PMDS) surface as a new method to create an intrinsically non-wetting surface for gallium-based liquid metal microfluidics. It was found that CF4/O2 plasma on PDMS for > 120s creates nanoscale roughness which exhibits a non-wetting property against liquid metals. Static contact angles and contact angle hysteresis (CAH) of the plasma-treated PDMS surfaces using gallium-based liquid metal droplets were found to be > 144° and < 16.8°, respectively. Rolling test with 15° inclined surfaces were used to confirm non-wetting property of the surface.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"104 1","pages":"1122-1125"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75943669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Self-Healing, Highly-Stretchable, Transparent, and Ion-Conducting Hydrogel Electrolyte-Based Microsupercapacitor for Flexible Electronics 自修复，高度可拉伸，透明，离子传导水凝胶电解质为基础的微超级电容器柔性电子
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056309
Peisheng He, Yu Long, Renxiao Xu, Guangchen Lan, Liwei Lin
{"title":"Self-Healing, Highly-Stretchable, Transparent, and Ion-Conducting Hydrogel Electrolyte-Based Microsupercapacitor for Flexible Electronics","authors":"Peisheng He, Yu Long, Renxiao Xu, Guangchen Lan, Liwei Lin","doi":"10.1109/MEMS46641.2020.9056309","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056309","url":null,"abstract":"We report a flexible, hydrogel-based electrolyte material for microsupercapacitors with: 1) self-healing property in ambient environment, 2) high stretchability (elongation> 1000%), 3) 280 times increase in ion-conductivity as compared to that of conventional polyvinyl alcohol (PVA) based acidic electrolytes, and 4) high transparency. A transfer-printing-based patterning process was developed to allow high-resolution pattering on hydrogel. Prototype self-healable micro-supercapacitors (SHMS) have been fabricated with three key demonstrations: 1) working as a power supply for commercial LEDs, 2) retention of same performances before/after a 180-degree folding process, and 3) restoration of performances even after being cut through by a razor blade and after the self-healing process.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"239-242"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81886608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
One-Step Fabrication of Multi-Functional Core-Shell Janus Microparticles for Theranostics Application 一步法制备多功能核壳Janus微粒子的临床应用
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056399
Mio Tsuchiya, Yuta Kurashina, Y. Heo, H. Onoe
{"title":"One-Step Fabrication of Multi-Functional Core-Shell Janus Microparticles for Theranostics Application","authors":"Mio Tsuchiya, Yuta Kurashina, Y. Heo, H. Onoe","doi":"10.1109/MEMS46641.2020.9056399","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056399","url":null,"abstract":"We present a one-step method to fabricate microparticles to detect substances and release drugs in our bodies. Our microparticles have two compartments and an outer shell. The two compartments (Janus cores) enable the encapsulation of different materials separately for diagnosis and therapy while the outer shell reduces the adhesion and protects the encapsulated materials. These multi-functional core-shell Janus microparticles are fabricated by simply ejecting pre-gel solutions into a calcium chloride solution under centrifugal gravity application and UV irradiation. Moreover, we implanted these microparticles in biological tissue and demonstrated the transdermal sensing and drug model release. We believe that our fabrication method and particle design could be an effective approach for multi-functional smart theranostic medicine.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"65 12 1","pages":"32-35"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84273596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Programmable Degradation of Transient Soluble Silk Based Optical Devices via Thermal Nanoimprinting 基于热纳米印迹的瞬态可溶性丝基光学器件的可编程降解
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056308
Jianjuan Jiang, Zhitao Zhou, Yanghong Zhang, T. Tao
{"title":"Programmable Degradation of Transient Soluble Silk Based Optical Devices via Thermal Nanoimprinting","authors":"Jianjuan Jiang, Zhitao Zhou, Yanghong Zhang, T. Tao","doi":"10.1109/MEMS46641.2020.9056308","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056308","url":null,"abstract":"We report a facile patterning technique for precise controlling the degradation of silk protein based optical micro devices by rapid thermal nanoimprinting for transient applications. The solubility of silk films strongly depends on the crystalline conformation of the silk proteins, which can be well tuned by the spatial and temporal modification during thermal treatment. Compared with the previous methods, this approach mainly focuses on the customizing the degradation order and rate of multiple-drug-loaded soluble silk optics for programmable drug release and real-time monitoring via optical read-out. It opens up opportunities for manufacturing high-performance transient devices with programmable degradation rates.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"48 1","pages":"331-333"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84560067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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