2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第2页

The Performance of Micro-Fabricated Gas Chromatographic Columns with Different Number of Serpentine Turns 不同蛇形匝数的微制气相色谱柱的性能

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056201

Qiyong Liuo, Fei Feng, Xuelei Yang, Bin Zhao, Yangyang Zhao, Haimei Zhou, Guiyang Zhang, Xinxin Li

引用次数: 1

Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom 三维六自由度复杂微系统的粒子跟踪

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056241

Craig R. Copeland, C. McGray, B. Ilic, J. Geist, S. M. Stavis

引用次数: 2

Stretchable Array of Resistive Pressure Sensors Ignoring the Effect of Strain-Induced Deformation 忽略应变变形影响的可拉伸电阻压力传感器阵列

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056276

R. Matsuda, S. Mizuguchi, Fumika Nakamura, Takuma Endo, Go Inamori, Yutaka Isoda, H. Ota

{"title":"Stretchable Array of Resistive Pressure Sensors Ignoring the Effect of Strain-Induced Deformation","authors":"R. Matsuda, S. Mizuguchi, Fumika Nakamura, Takuma Endo, Go Inamori, Yutaka Isoda, H. Ota","doi":"10.1109/MEMS46641.2020.9056276","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056276","url":null,"abstract":"In this study, a stretchable array of resistive pressure sensors which could ignore the effect of stretch deformation was demonstrated. In terms of stretchable pressure sensors composed of elastic materials, pressure sensors itself are deformed during strain of the devices, which becomes large error of the pressure measurement. Our resistive sensors in a array are based on patterned porous conductive silicone (Ecoflex). The substrate consists of hetero-silicone rubbers of two different elastic silicones. In addition, resistances of column and row electrodes in the matrix of mapping are much lower than the pressure sensors. This substrate and control of electrode resistances can prevent stretch deformation of the device from affecting the sensing of pressure. The error of the pressure sensor in our device during 150% strain was one sixth less than the one by conventional elastic pressure sensor composed of organic materials. This result suggests possibility to apply stretchable pressure sensor on largely deformed area of body, and soft robots.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"803-805"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80839133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Black Phosphorus NEMS Resonant Infrared (IR) Detector 黑磷NEMS共振红外(IR)探测器

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056366

Arnob Islam, Jaesung Lee, P. Feng

{"title":"Black Phosphorus NEMS Resonant Infrared (IR) Detector","authors":"Arnob Islam, Jaesung Lee, P. Feng","doi":"10.1109/MEMS46641.2020.9056366","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056366","url":null,"abstract":"We report on the first experimental demonstration of two-dimensional (2D) black phosphorus (P) resonant nano-electromechanical systems (NEMS) for infrared (IR) detection, enabled by black P vibrating channel transistors (VCTs). Resonant motions of the black P NEMS are excited and read out all-electrically, thanks to black P crystal's high field-effect mobility and highly efficient channel conductance modulation via resonant motion. Given the narrow direct bandgap ($E_{mathrm{g}}approx 0.3text{eV}$) intrinsically suited for infrared (IR) detection, the black P crystalline NEMS resonators are highly responsive, and readily detect IR radiation by utilizing resonance frequency shift upon absorption of incident IR. The measurements achieve excellent IR responsivity, $Re=-0.31 text{kHz}/mumathrm{W}$, from a 2D black P drumhead NEMS resonator, at 785nm near infrared (NIR) wavelength. Toward enabling real-time IR sensing, we further demonstrate sensitive all-electrical transduction of resonances of 2D black P NEMS, in direct two-port transmission measurement of VCTs, by employing a local gate, thus evading the need of any conventional frequency down-mixing or conversion techniques.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"142 1 1","pages":"826-829"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80980283","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Diffraction Lithography for 3-D Microneedle Fabrication 三维微针制造的衍射光刻技术

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056456

Jun Ying Tan, M. Ahn, Hassan Al-Thuwaini, Seong-O Choi, J. Kim

{"title":"Diffraction Lithography for 3-D Microneedle Fabrication","authors":"Jun Ying Tan, M. Ahn, Hassan Al-Thuwaini, Seong-O Choi, J. Kim","doi":"10.1109/MEMS46641.2020.9056456","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056456","url":null,"abstract":"This paper presents a diffraction ultra-violet (UV) lithography method for fabricating various micro-cone shape microneedle structures. A direct UV exposure to a liquid state photosensitive resin through a photomask generates a unique diffraction pattern of the light, in which the exposed area of the photosensitive resin becomes the needle structures. The change of liquid to solid-state of the resin by crosslinking also works as a light waveguide to create a novel sharp tip on top of the cone. Secondary and tertiary harmonic cone shapes are formed with further UV energy exposure. The proposed method is unique and versatile as it enables the formation of various cone-shaped microstructures with a straight or curved sidewall, such as tip-integrated cone and multiple harmonic cones having different heights and base shapes. The relationship between the microneedle height formed at different exposure energy and the corresponding geometry was also discussed. Insertion test and force-displacement test were conducted to demonstrate the functionality of the fabricated microneedle, and the results showed that the tip of each tested microneedle can withstand up to 0.15 N before breakage occurs. The fabricated cone-shaped microneedle with a sharp tip has a great potential for transdermal drug delivery microneedle application.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"921-924"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81215090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Odorant Sensor Using Olfactory Receptor Reconstituted in a Lipid Bilayer Membrane with Gas Flow System 基于脂质双层膜与气体流动系统中嗅觉受体的气味传感器

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056361

Tetsuya Yamada, Hirotaka Sugiura, Hisatoshi Mimura, K. Kamiya, T. Osaki, S. Takeuchi

引用次数: 0

High Velocity Dielectrophoretic Cell Separation Using Continuously Extended Sidewall Electrode Featuring Undercut Profile 采用连续延伸侧壁电极的高速介电泳细胞分离

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056194

Chaomin Zhang, Duli Yu, Xiaoxing Xing

{"title":"High Velocity Dielectrophoretic Cell Separation Using Continuously Extended Sidewall Electrode Featuring Undercut Profile","authors":"Chaomin Zhang, Duli Yu, Xiaoxing Xing","doi":"10.1109/MEMS46641.2020.9056194","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056194","url":null,"abstract":"Dielectrophoresis (DEP) as a label free technique has been widely accepted as one of the most effective tool for cell separation once integrated with microfluidic platform. Advanced DEP activated cell separators target for low-cost and fast cell separation with high separation efficiency. Recently microfluidic platforms incorporating microelectrodes made of conducting polymers leverage dielectrophoretic cell separation through replica molded volumetric electrodes that inherit the merit of 3D electrodes to generated highly effective DEP force field throughout the channel depth, and meanwhile allow cost-effective fabrication. Yet, such electrodes have limited way of configuration, being discretely embedded within fluidic sidewalls, which leads to compromised cell velocity for sufficient time of cell deflection under DEP force. This work for the first time presents long-range sidewall electrode made of conducting PDMS extending the full channel length and achieves continuous-flow dielectrophoretic separation of mammalian cells traveling at high velocity of 23.5 mm/s. We demonstrate the unique design and fabrication process of the long-range electrode featuring sidewall undercut and the DEP response of mammalian cells with distinctive dielectric property. We also carried out parametric study regarding the device capability of high velocity cell separation at varying voltage and cell loading density.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"1044-1047"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73177430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Dermal ISF Collection Using a Si Microneedle Array 利用硅微针阵列采集皮肤ISF

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056394

Caleb A. Berry, Zachary R. Smith, S. Collins, Rosemary L. Smith

引用次数: 3

Superhydrophobic Triboelectric Textile for Sensing and Energy Harvesting Applications 用于传感和能量收集的超疏水摩擦电织物

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056221

Feng Wen, Tianyiyi He, Qiongfeng Shi, Ting Zhang, Chengkuo Lee

引用次数: 2

Piezoelectric Microspeaker Using Novel Driving Approach and Electrode Design for Frequency Range Improvement 压电微扬声器采用新型驱动方法和电极设计提高频率范围

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056196

Hsu-Hsiang Cheng, Sung-Cheng Lo, Yi-Jia Wang, Yu-Chen Chen, W. Lai, Meng-Lin Hsieh, Mingching Wu, W. Fang

引用次数: 8