三维微针制造的衍射光刻技术

Jun Ying Tan, M. Ahn, Hassan Al-Thuwaini, Seong-O Choi, J. Kim
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引用次数: 2

摘要

本文介绍了一种用于制造各种微锥型微针结构的衍射紫外光刻方法。通过光掩膜将紫外线直接暴露在液态光敏树脂上,产生独特的光衍射图案,其中光敏树脂的暴露区域成为针状结构。通过交联将树脂的液态转变为固态,也可以作为光波导,在锥的顶部形成一个新颖的尖锐尖端。二次和三次谐波锥形状形成与进一步的紫外线能量暴露。所提出的方法具有独特的通用性,因为它可以形成具有直或弯曲侧壁的各种锥形微结构,例如具有不同高度和基部形状的尖端集成锥和多个谐波锥。讨论了不同曝光能量下形成的微针高度与相应几何形状的关系。通过插入试验和力-位移试验验证了所制备微针的功能,结果表明,每根微针的尖端在断裂前可承受0.15 N的压力。所制备的尖端尖锐的锥形微针在经皮给药微针方面具有很大的应用潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diffraction Lithography for 3-D Microneedle Fabrication
This paper presents a diffraction ultra-violet (UV) lithography method for fabricating various micro-cone shape microneedle structures. A direct UV exposure to a liquid state photosensitive resin through a photomask generates a unique diffraction pattern of the light, in which the exposed area of the photosensitive resin becomes the needle structures. The change of liquid to solid-state of the resin by crosslinking also works as a light waveguide to create a novel sharp tip on top of the cone. Secondary and tertiary harmonic cone shapes are formed with further UV energy exposure. The proposed method is unique and versatile as it enables the formation of various cone-shaped microstructures with a straight or curved sidewall, such as tip-integrated cone and multiple harmonic cones having different heights and base shapes. The relationship between the microneedle height formed at different exposure energy and the corresponding geometry was also discussed. Insertion test and force-displacement test were conducted to demonstrate the functionality of the fabricated microneedle, and the results showed that the tip of each tested microneedle can withstand up to 0.15 N before breakage occurs. The fabricated cone-shaped microneedle with a sharp tip has a great potential for transdermal drug delivery microneedle application.
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