2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - 最新文献

4 W Dual-Contact Material MEMS Relay with a Contact Force Maximizing Structure

Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056178 Su-Bon Kim, Yong-Hoon Yoon, Yong-Bok Lee, Kwang-Wook Choi, Min-Seung Jo, Hyun-Woo Min, Jun‐Bo Yoon

Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection

Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056209 I. Latif, M. Toda, T. Ono

Sensitivity Improvement of P+Si/Au Thermopile-Based Gas Flow Sensor by Optimizing Heat-Sink and Thermal-Insulation Configuration

Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056236 Shanshan Wang, Jiachou Wang, Xinxin Li

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