Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection

I. Latif, M. Toda, T. Ono
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Abstract

This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.
基于特征几何的声学放大微机械共振检测集成平台
本文提出了一种利用共振声学装置,特别是基于光声学的共振声学装置,通过操纵两种波传播介质界面上的反射特性来提高固体中声波探测的信噪比性能的新方法。与简单的结构相反,检测平台的外围被设计成与参数曲率相匹配,该曲率将声波反射到几何焦点,在几何焦点上制造了谐振微机械元件。在椭圆外围平台上进行了时域仿真,验证了该方法的有效性。用压电声激励进行的初步实验表明,与一般情况相比,声波的信号幅度提高了一个数量级。该方法首次尝试采用参数化曲线几何作为声导来提高微机械声波探测的灵敏度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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