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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Nanopin - A MEMS Based Sensor for the Analysis of Single Cell Mechanical Properties 用于单细胞力学性能分析的MEMS传感器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056113
M. Kumemura, L. Kudo, Zhongcai Ma, S. Karsten
{"title":"Nanopin - A MEMS Based Sensor for the Analysis of Single Cell Mechanical Properties","authors":"M. Kumemura, L. Kudo, Zhongcai Ma, S. Karsten","doi":"10.1109/MEMS46641.2020.9056113","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056113","url":null,"abstract":"We developed a MEMS based sensor, Nanopin, for mechanical characterization of individual adherent cells. Nanopin consists of sensing tip that forms a contact with a cell, a displacement sensor, and an actuator. The feasibility of sensing was evaluated using various concentrations of agarose gel, and then the stiffness measurements of human carcinoma cells were conducted on different surfaces. After the measurements of cells, we confirmed that cells grow normally in an incubator.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"311-314"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75455890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Compact Microcontroller-Based MEMS Rate Integrating Gyroscope Module with Automatic Asymmetry Calibration 一种基于微控制器的MEMS速率积分陀螺仪自动非对称校正模块
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056317
R. Gando, D. Ono, S. Kaji, H. Ota, T. Itakura, Y. Tomizawa
{"title":"A Compact Microcontroller-Based MEMS Rate Integrating Gyroscope Module with Automatic Asymmetry Calibration","authors":"R. Gando, D. Ono, S. Kaji, H. Ota, T. Itakura, Y. Tomizawa","doi":"10.1109/MEMS46641.2020.9056317","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056317","url":null,"abstract":"This paper presents the first microcontroller-based module-level MEMS rate integrating gyroscope (RIG) for direct angle measurement after automatic asymmetry calibration. The 5-cm prototype module integrates a vacuum-sealed donut-mass gyroscope device on analog and digital PCBs. In automatic calibration mode, the initial frequency and decay-time asymmetries are electrically tuned and reduced by >40 and >18 times, respectively. The sensing mode is enabled by built-in digital controls of vibration energy and frequency. Continuous angle measurement is confirmed with an angular random walk (ARW) of 0.6 deg/rt-h and a bias instability (BI) of 4.3 deg/h, proving comparable performances with previous FPGA-based large RIG systems. This module paves the way for RIG commercialization studies.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"1296-1299"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72602014","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
An Origami-Structured Flexible Electronic Substrate with Faces Parallel to Target-of-Attachment Surfaces 一种面与附着目标面平行的折纸结构柔性电子基板
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056110
H. Yasuga, Atsushi Eda, K. Suto, T. Tachi, E. Iwase
{"title":"An Origami-Structured Flexible Electronic Substrate with Faces Parallel to Target-of-Attachment Surfaces","authors":"H. Yasuga, Atsushi Eda, K. Suto, T. Tachi, E. Iwase","doi":"10.1109/MEMS46641.2020.9056110","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056110","url":null,"abstract":"We propose a flexible electronic substrate structured by Origami folding of non-stretchable film with faces parallel to target-of-attachment surfaces. A folding (“Origami”) or cutting (“Kirigami”) of a thin film have opened up the application of non-stretchable materials to flexible electronic devices attached to a curved surface. In this paper, we propose origami-structured flexible electronic substrates which have faces parallel to the target-of-attachment surface. The parallel faces have engineering importance and usefulness for taking direct contact with target-of-attachment surfaces and mounting electronic elements, e.g. sensors or light emitters. These characteristics are expected to allow for the realization of flexible devices capable of sensing shear force or flow velocity parallel to object's surfaces.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"38 44","pages":"909-912"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91514377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
$0.0062 {}^{circ}/sqrt{hr}$ Angle Random Walk and $0.027 {}^{circ}/hr$ Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes $0.0062 {}^{circ}/sqrt{hr}$角度随机游走和$0.027 {}^{circ}/hr$偏置不稳定性
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056391
Sajal Singh, J. Woo, G. He, J. Cho, K. Najafi
{"title":"$0.0062 {}^{circ}/sqrt{hr}$ Angle Random Walk and $0.027 {}^{circ}/hr$ Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes","authors":"Sajal Singh, J. Woo, G. He, J. Cho, K. Najafi","doi":"10.1109/MEMS46641.2020.9056391","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056391","url":null,"abstract":"This paper reports measured results for a fused-silica precision shell integrating (PSI) micro gyroscope employing out-of-plane drive/sense transduction mechanism. The PSI gyroscope is made with a 5 mm radius shell resonator operating in $n=2$ wine-glass mode at a frequency ($f_{n=2}$) of 5.803 kHz with as-fabricated frequency split ($Delta f$) of 2.1 Hz. Large and reasonably uniform capacitance (∼0.25 pF) is achieved with flat surface electrodes. The gyroscope is operated in the force-rebalance mode by interfacing with an ultra-low-noise transimpedance amplifier (TIA). Near-navigation grade angle random walk (ARW) of $0.0062 deg/sqrt{mathrm{h}}mathrm{r}$, in-run bias instability (BI) of 0.027 deg/hr and scale factor of 158 mV/deg/s without any temperature compensation are achieved.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"737-740"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82086317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A MEMS Piezoelectric Vibration Energy Harvester Based on Trapezoidal Cantilever Beam Array 基于梯形悬臂梁阵列的MEMS压电振动能量采集器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056434
Xianming He, Quan Wen, Z. Wen, X. Mu
{"title":"A MEMS Piezoelectric Vibration Energy Harvester Based on Trapezoidal Cantilever Beam Array","authors":"Xianming He, Quan Wen, Z. Wen, X. Mu","doi":"10.1109/MEMS46641.2020.9056434","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056434","url":null,"abstract":"This paper reports a novel MEMS piezoelectric vibration energy harvester based on trapezoidal cantilever beam array (TCBA-PVEH), which mainly composed of a piezoelectric array beam and a mass block. The open-circuit voltage ($V_{oc}$), the optimized load voltage ($V_{opt}$) and the optimized load output power ($P_{opt}$) of the TCBA-PVEH at 0.5g acceleration can reach 10.36 V, 6.68 V and $12.51 mu mathrm{W}$, respectively. The experimental results show that the TCBA-PVEH has smaller bending stiffness and larger piezoelectric strain energy per unit area than the rectangular cantilever beam array based PVEH (RCBA-PVEH), thus having lower resonance frequency and better electrical output. We also establish and analytically solve the electromechanical coupling dynamic model of PVEHs with variable cross-section cantilever beam. The proposed model lays an important theoretical foundation for structural optimization design, performance improvement and output prediction.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"55 1","pages":"532-535"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78383377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Implementation of Piezoelectric MEMS Microphone for Sensitivity and Sensing Range Enhancement 提高灵敏度和传感范围的压电式MEMS麦克风的实现
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056150
Shih-Hsiung Tseng, Sung-Cheng Lo, Yu-Chen Chen, Ya-Chu Lee, Mingching Wu, W. Fang
{"title":"Implementation of Piezoelectric MEMS Microphone for Sensitivity and Sensing Range Enhancement","authors":"Shih-Hsiung Tseng, Sung-Cheng Lo, Yu-Chen Chen, Ya-Chu Lee, Mingching Wu, W. Fang","doi":"10.1109/MEMS46641.2020.9056150","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056150","url":null,"abstract":"This study designs and realizes an improved piezoelectric MEMS microphone with four triangular-cantilevers (Fig. 1) on a commercial 8-inch wafer. As compared with the reference design [1], this study exhibits two merits: (1) special boundary and structure design of the triangular-cantilever for sensitivity enhancement (Fig. 1a); (2) two-stage etching to successively define PZT/electrode and device-Si layers to enable the fabrication of small gaps between triangular-cantilevers for low frequency acoustic sensing enhancement (Fig. 1b). Moreover, the bottom of MEMS microphone chip is bonded (surface mount) on LGA (land-grid-array) for better acoustic performance (Fig. 1c). Preliminary FEM evaluations show the enhancement of proposed type as compare with a reference type (Fig. 2). Measurements indicate the packaged microphone of $1080 mumathrm{m}$ cavity size: acoustic sensitivity is - 37.54dBV/Pa at 1kHz; ±3dB bandwidth ranges 150Hz to 9.5kHz; noise floor of 20Hz∼20kHz bandwidth and A-weighting is −86.4dBV(A); SNR is 48.9dB(A); measured capacitance of sensing electrode is 410pF at 1kHz; dielectric constant is 250; and loss tangent of PZT is 0.015.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"845-848"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78466060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Acoustofluidics Based on ZnO/Al Plate Surface Acoustic Wave Devices with Enhanced Performances 基于性能增强的ZnO/Al板表面声波器件的声流学研究
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056380
Yong Wang, R. Tao, Qian Zhang, Dongyang Chen, Lei Yang, Wei Huang, Jin Xie, Yongqing Fu
{"title":"Acoustofluidics Based on ZnO/Al Plate Surface Acoustic Wave Devices with Enhanced Performances","authors":"Yong Wang, R. Tao, Qian Zhang, Dongyang Chen, Lei Yang, Wei Huang, Jin Xie, Yongqing Fu","doi":"10.1109/MEMS46641.2020.9056380","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056380","url":null,"abstract":"In this paper, we report acoustofluidics based on zinc oxide (ZnO)/Al plate surface acoustic waves (SAWs) and compare their performances with those of ZnO/Si SAWs with the same electrode configurations. Results show that ZnO/Al (1.5 mm thick) SAWs achieve a lower threshold pumping power and have better pumping performances than those of ZnO/Si SAWs due to their larger Rayleigh angle and higher electromechanical coupling coefficients. Wavelength effects on pumping performances of ZnO/Al plate SAWs are also investigated and a larger wavelength leads to a lower threshold pumping power. Moreover, we also study effects of Al plate thickness on pumping performances and results show that ZnO/Al plate SAWs present better pumping performances than those of ZnO/Al foil SAWs.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"38-41"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76641231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane 基于聚二甲基硅氧烷(PDMS)膜的气腔透镜MEMS聚焦超声换能器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056313
Yongkui Tang, Song Liu, E. S. Kim
{"title":"MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane","authors":"Yongkui Tang, Song Liu, E. S. Kim","doi":"10.1109/MEMS46641.2020.9056313","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056313","url":null,"abstract":"We present a novel and easy fabrication method to manufacture Polydimethylsiloxane (PDMS) Fresnel air-cavity acoustic lens for focused ultrasonic transducers with long focal length. The process involves casting PDMS membrane with a silicon mold and bonding the PDMS membrane on a lead zirconate titanate (PZT) sheet with ultraviolet (UV)-curable adhesive. A 2.32-MHz focused ultrasonic transducer fabricated with the new method is capable of ejecting water droplets up to 1 mm in diameter (controlled by driving pulse width), from water surface 25 mm above the transducer.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"42 1","pages":"58-61"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76803606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Highly Deformable Optoelectronics Using Liquid Metal 使用液态金属的高度可变形光电子学
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056451
Takashi Kozaki, Saito Satoshi, Yota Otsuki, R. Matsuda, Yutaka Isoda, Takuma Endo, Fumika Nakamura, T. Araki, Taichi Furukawa, S. Maruo, M. Watanabe, K. Ueno, H. Ota
{"title":"Highly Deformable Optoelectronics Using Liquid Metal","authors":"Takashi Kozaki, Saito Satoshi, Yota Otsuki, R. Matsuda, Yutaka Isoda, Takuma Endo, Fumika Nakamura, T. Araki, Taichi Furukawa, S. Maruo, M. Watanabe, K. Ueno, H. Ota","doi":"10.1109/MEMS46641.2020.9056451","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056451","url":null,"abstract":"The study proposes optoelectronics based on liquid metal and photo-switchable ionic liquid with liquid-liquid heterojunction technology. As a proof of concept, a liquid-state light sensor and an optical memory which is switched on and off by UV and blue light exposures were demonstrated. The ionic liquid named 1-butyl-3-(4-phenylazobenzyl)imidazolium bis(trifluoromethanesulfonyl)amide ([Azo][NTf2]) is used to realize functions as a light sensor or an optical memory. This ionic liquid is photoresponsive and can undergo a reversible isomerization controlled by light irradiation of UV or Blue; this property was used to realize the liquid-state optoelectronics in this study. In addition, a liquid-state heterojunction was taken advantage of in interconnects between sensing ionic liquid and liquid metal. The liquid-state heterojunction in the microchannels was critical to preventing intermixing of the two liquid components, especially, when the completed devices underwent mechanical deformation. These two important technologies, the photo-switchable ionic liquid and the heterojunction, achieved liquid-state optoelectronics based on liquid materials.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"28 1","pages":"1230-1233"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76887663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Caterpillar-Inspired Soft Robot Based on Thermal Expansion 基于热膨胀的受毛毛虫启发的软体机器人
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056421
Zihao Song, R. Matsuda, Ken Matsubara, Fumika Nakamura, H. Ota
{"title":"A Caterpillar-Inspired Soft Robot Based on Thermal Expansion","authors":"Zihao Song, R. Matsuda, Ken Matsubara, Fumika Nakamura, H. Ota","doi":"10.1109/MEMS46641.2020.9056421","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056421","url":null,"abstract":"This paper reports caterpillar-inspired soft robot based on thermal expansion with stretchable bending and flexible temperature sensor. The movement of soft robot was based on thermal expansion with highly volatile liquid. On account of thermodynamic method, this soft robot must have a bending sensor for the movement and a temperature sensor to monitor the soft robot's state at that moment. The primary objective of this research is to resolve the integration between soft sensor and actuator. The actuator bends due to thermal expansion. The system could control the thermal expansion change from the resistance of the calculated bending sensor.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"43 1","pages":"489-492"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85459875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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