2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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On-Demand Photothermal Bar-Chart Microfluidic Platform Using On-Chip Nanomaterial-Mediated Photothermal Effect as the Microfluidic Driving Force 基于片上纳米材料介导的光热效应作为微流控驱动力的按需光热条形图微流控平台
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056141
Wan Zhou, Guanglei Fu, Xiujun Li
{"title":"On-Demand Photothermal Bar-Chart Microfluidic Platform Using On-Chip Nanomaterial-Mediated Photothermal Effect as the Microfluidic Driving Force","authors":"Wan Zhou, Guanglei Fu, Xiujun Li","doi":"10.1109/MEMS46641.2020.9056141","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056141","url":null,"abstract":"A new type of microfluidic platforms, photothermal bar-chart chip (PT-Chip), has been developed using the on-chip nanomaterial-mediated photothermal effect as the novel tunable microfluidic driving force to drive ink bar charts in a visual quantitative readout fashion. This is the first time to exploit the nanomaterial-mediated photothermal effect for microfluidic pumping and also serves as the first report of the photothermal bar-chart microfluidic platform with wide microfluidic applications, especially for visual quantitative point-of-care detection.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83682472","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Micromachined Mass-Sensitive and Capacitive Chemical Multisensor Using Single Polymeric Sensing Film 基于单聚合物传感膜的微机械质量敏感和电容化学多传感器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056216
S. Schwartz, O. Brand, L. Beardslee
{"title":"Micromachined Mass-Sensitive and Capacitive Chemical Multisensor Using Single Polymeric Sensing Film","authors":"S. Schwartz, O. Brand, L. Beardslee","doi":"10.1109/MEMS46641.2020.9056216","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056216","url":null,"abstract":"We present a novel micromachined chemical multisensor that simultaneously detects mass and dielectric property changes in the same polymeric sensing film. The multisensor is comprised of a cantilever-type, mass-sensitive resonant sensor with a semicircular annulus and an embedded on-resonator interdigitated electrode structure for capacitive sensing. The resonant chemical sensor utilizes a high-Q in-plane resonance mode enabling sub-parts per million limits of detection for volatile organic compounds. The embedded capacitive sensor enables the discrimination between toluene and methanol by evaluating the ratio between the mass-sensitive and capacitive sensor signal.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84497667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Micro-Acoustic Quad Circulator with Self-Interference Cancellation 具有自干扰消除的微声四元环行器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056324
Yao Yu, M. Rinaldi
{"title":"Micro-Acoustic Quad Circulator with Self-Interference Cancellation","authors":"Yao Yu, M. Rinaldi","doi":"10.1109/MEMS46641.2020.9056324","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056324","url":null,"abstract":"In this paper, a micro-acoustic RF circulator with novel “quad” configuration is reported. Four micro-acoustic filters are periodically modulated by RF switches to break the reciprocity. The use of high-Q micro-acoustic filters significantly reduces the modulation frequency (14 MHz) compared to previous demonstrations based on transmission lines (e.g., 333 MHz in [1]). The low modulation frequency translates to an ultra-low power consumption (202 uW, 3600 times smaller than [1]) and one of the highest linearity ($mathrm{P}1mathrm{dB}=31 mathrm{dBm}$) reported for magnet-free circulators. Furthermore, compared to the more conventional differential configuration, this quad configuration shows advantages in terms of intermodulation products (IMPs) suppression for all the in-band IMPs, guaranteeing a pseudo-linear-time-invariant (pseudo-LTI) operation. Furthermore, the isolation of the circulator is further improved by an additional cancellation circuit, achieving more than 50 dB of isolation in a 10MHz bandwidth (BW). This high level of isolation enables the use of this magnet-free circulator in full-duplex radio, which requires large level of self-interference suppression between the transmitter and the receiver nodes.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83193307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A Fiber-Si3N4 Composite Nanoforest with High 7.6 to $11.6 mumathrm{m}$ Absorption for MEMS Infrared Sensors 用于MEMS红外传感器的高7.6 ~ 11.6 mu数学{m}$吸收的光纤- si3n4复合纳米森林
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056198
Chenchen Zhang, H. Mao, Meng Shi, J. Xiong, Kewen Long, Dapeng Chen
{"title":"A Fiber-Si3N4 Composite Nanoforest with High 7.6 to $11.6 mumathrm{m}$ Absorption for MEMS Infrared Sensors","authors":"Chenchen Zhang, H. Mao, Meng Shi, J. Xiong, Kewen Long, Dapeng Chen","doi":"10.1109/MEMS46641.2020.9056198","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056198","url":null,"abstract":"In this work, a fiber-Si3N4 composite nanoforest with high absorption in 7.6 to $11.6 mu mathrm{m}$ wavelength range is presented. Especially, when thickness of a Si3N4 coating reaches 300 nm, the nanoforest can achieve an average absorption as high as 88.12%. Such a composite nanoforest is fabricated based on an extremely simple process, including spin-coating and plasma treating of a polyimide layer, followed by deposition of a Si3N4 film. The process is fully compatible with conventional micromachining, thus the nanoforest can be integrated onto MEMS infrared (IR) sensors as an additional absorber. Furthermore, with such a composite nanoforest-based absorber, the IR sensors are expected to achieve higher performance, especially for human IR sensing.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74473396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A MEMS Piezoelectric Vibration Energy Harvester Based on Trapezoidal Cantilever Beam Array 基于梯形悬臂梁阵列的MEMS压电振动能量采集器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056434
Xianming He, Quan Wen, Z. Wen, X. Mu
{"title":"A MEMS Piezoelectric Vibration Energy Harvester Based on Trapezoidal Cantilever Beam Array","authors":"Xianming He, Quan Wen, Z. Wen, X. Mu","doi":"10.1109/MEMS46641.2020.9056434","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056434","url":null,"abstract":"This paper reports a novel MEMS piezoelectric vibration energy harvester based on trapezoidal cantilever beam array (TCBA-PVEH), which mainly composed of a piezoelectric array beam and a mass block. The open-circuit voltage ($V_{oc}$), the optimized load voltage ($V_{opt}$) and the optimized load output power ($P_{opt}$) of the TCBA-PVEH at 0.5g acceleration can reach 10.36 V, 6.68 V and $12.51 mu mathrm{W}$, respectively. The experimental results show that the TCBA-PVEH has smaller bending stiffness and larger piezoelectric strain energy per unit area than the rectangular cantilever beam array based PVEH (RCBA-PVEH), thus having lower resonance frequency and better electrical output. We also establish and analytically solve the electromechanical coupling dynamic model of PVEHs with variable cross-section cantilever beam. The proposed model lays an important theoretical foundation for structural optimization design, performance improvement and output prediction.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78383377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Implementation of Piezoelectric MEMS Microphone for Sensitivity and Sensing Range Enhancement 提高灵敏度和传感范围的压电式MEMS麦克风的实现
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056150
Shih-Hsiung Tseng, Sung-Cheng Lo, Yu-Chen Chen, Ya-Chu Lee, Mingching Wu, W. Fang
{"title":"Implementation of Piezoelectric MEMS Microphone for Sensitivity and Sensing Range Enhancement","authors":"Shih-Hsiung Tseng, Sung-Cheng Lo, Yu-Chen Chen, Ya-Chu Lee, Mingching Wu, W. Fang","doi":"10.1109/MEMS46641.2020.9056150","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056150","url":null,"abstract":"This study designs and realizes an improved piezoelectric MEMS microphone with four triangular-cantilevers (Fig. 1) on a commercial 8-inch wafer. As compared with the reference design [1], this study exhibits two merits: (1) special boundary and structure design of the triangular-cantilever for sensitivity enhancement (Fig. 1a); (2) two-stage etching to successively define PZT/electrode and device-Si layers to enable the fabrication of small gaps between triangular-cantilevers for low frequency acoustic sensing enhancement (Fig. 1b). Moreover, the bottom of MEMS microphone chip is bonded (surface mount) on LGA (land-grid-array) for better acoustic performance (Fig. 1c). Preliminary FEM evaluations show the enhancement of proposed type as compare with a reference type (Fig. 2). Measurements indicate the packaged microphone of $1080 mumathrm{m}$ cavity size: acoustic sensitivity is - 37.54dBV/Pa at 1kHz; ±3dB bandwidth ranges 150Hz to 9.5kHz; noise floor of 20Hz∼20kHz bandwidth and A-weighting is −86.4dBV(A); SNR is 48.9dB(A); measured capacitance of sensing electrode is 410pF at 1kHz; dielectric constant is 250; and loss tangent of PZT is 0.015.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78466060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Acoustofluidics Based on ZnO/Al Plate Surface Acoustic Wave Devices with Enhanced Performances 基于性能增强的ZnO/Al板表面声波器件的声流学研究
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056380
Yong Wang, R. Tao, Qian Zhang, Dongyang Chen, Lei Yang, Wei Huang, Jin Xie, Yongqing Fu
{"title":"Acoustofluidics Based on ZnO/Al Plate Surface Acoustic Wave Devices with Enhanced Performances","authors":"Yong Wang, R. Tao, Qian Zhang, Dongyang Chen, Lei Yang, Wei Huang, Jin Xie, Yongqing Fu","doi":"10.1109/MEMS46641.2020.9056380","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056380","url":null,"abstract":"In this paper, we report acoustofluidics based on zinc oxide (ZnO)/Al plate surface acoustic waves (SAWs) and compare their performances with those of ZnO/Si SAWs with the same electrode configurations. Results show that ZnO/Al (1.5 mm thick) SAWs achieve a lower threshold pumping power and have better pumping performances than those of ZnO/Si SAWs due to their larger Rayleigh angle and higher electromechanical coupling coefficients. Wavelength effects on pumping performances of ZnO/Al plate SAWs are also investigated and a larger wavelength leads to a lower threshold pumping power. Moreover, we also study effects of Al plate thickness on pumping performances and results show that ZnO/Al plate SAWs present better pumping performances than those of ZnO/Al foil SAWs.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76641231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane 基于聚二甲基硅氧烷(PDMS)膜的气腔透镜MEMS聚焦超声换能器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056313
Yongkui Tang, Song Liu, E. S. Kim
{"title":"MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane","authors":"Yongkui Tang, Song Liu, E. S. Kim","doi":"10.1109/MEMS46641.2020.9056313","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056313","url":null,"abstract":"We present a novel and easy fabrication method to manufacture Polydimethylsiloxane (PDMS) Fresnel air-cavity acoustic lens for focused ultrasonic transducers with long focal length. The process involves casting PDMS membrane with a silicon mold and bonding the PDMS membrane on a lead zirconate titanate (PZT) sheet with ultraviolet (UV)-curable adhesive. A 2.32-MHz focused ultrasonic transducer fabricated with the new method is capable of ejecting water droplets up to 1 mm in diameter (controlled by driving pulse width), from water surface 25 mm above the transducer.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76803606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Highly Deformable Optoelectronics Using Liquid Metal 使用液态金属的高度可变形光电子学
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056451
Takashi Kozaki, Saito Satoshi, Yota Otsuki, R. Matsuda, Yutaka Isoda, Takuma Endo, Fumika Nakamura, T. Araki, Taichi Furukawa, S. Maruo, M. Watanabe, K. Ueno, H. Ota
{"title":"Highly Deformable Optoelectronics Using Liquid Metal","authors":"Takashi Kozaki, Saito Satoshi, Yota Otsuki, R. Matsuda, Yutaka Isoda, Takuma Endo, Fumika Nakamura, T. Araki, Taichi Furukawa, S. Maruo, M. Watanabe, K. Ueno, H. Ota","doi":"10.1109/MEMS46641.2020.9056451","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056451","url":null,"abstract":"The study proposes optoelectronics based on liquid metal and photo-switchable ionic liquid with liquid-liquid heterojunction technology. As a proof of concept, a liquid-state light sensor and an optical memory which is switched on and off by UV and blue light exposures were demonstrated. The ionic liquid named 1-butyl-3-(4-phenylazobenzyl)imidazolium bis(trifluoromethanesulfonyl)amide ([Azo][NTf2]) is used to realize functions as a light sensor or an optical memory. This ionic liquid is photoresponsive and can undergo a reversible isomerization controlled by light irradiation of UV or Blue; this property was used to realize the liquid-state optoelectronics in this study. In addition, a liquid-state heterojunction was taken advantage of in interconnects between sensing ionic liquid and liquid metal. The liquid-state heterojunction in the microchannels was critical to preventing intermixing of the two liquid components, especially, when the completed devices underwent mechanical deformation. These two important technologies, the photo-switchable ionic liquid and the heterojunction, achieved liquid-state optoelectronics based on liquid materials.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76887663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Caterpillar-Inspired Soft Robot Based on Thermal Expansion 基于热膨胀的受毛毛虫启发的软体机器人
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056421
Zihao Song, R. Matsuda, Ken Matsubara, Fumika Nakamura, H. Ota
{"title":"A Caterpillar-Inspired Soft Robot Based on Thermal Expansion","authors":"Zihao Song, R. Matsuda, Ken Matsubara, Fumika Nakamura, H. Ota","doi":"10.1109/MEMS46641.2020.9056421","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056421","url":null,"abstract":"This paper reports caterpillar-inspired soft robot based on thermal expansion with stretchable bending and flexible temperature sensor. The movement of soft robot was based on thermal expansion with highly volatile liquid. On account of thermodynamic method, this soft robot must have a bending sensor for the movement and a temperature sensor to monitor the soft robot's state at that moment. The primary objective of this research is to resolve the integration between soft sensor and actuator. The actuator bends due to thermal expansion. The system could control the thermal expansion change from the resistance of the calculated bending sensor.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85459875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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