发布求助
文献互助 智能选刊 最新文献

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

筛选
英文 中文
Self-Folding Acute-Angle Origami Driven by Surface Bending Force 表面弯曲力驱动的自折叠锐角折纸
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056453
T. Uchida, H. Yasuga, T. Tachi, E. Iwase, H. Onoe
{"title":"Self-Folding Acute-Angle Origami Driven by Surface Bending Force","authors":"T. Uchida, H. Yasuga, T. Tachi, E. Iwase, H. Onoe","doi":"10.1109/MEMS46641.2020.9056453","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056453","url":null,"abstract":"This study describes a self-folding origami technique that enables acute angle folding by surface bending force for the first time. We patterned plus-shaped “+” carbon black patterns on a shrinking sheet and achieved self-folding of the 2D sheet quite sharply (more than 160°) trigger with infrared (IR) light irradiation. We investigated the folding angle of our sheet with “+” pattern comparing to the sheet with slit pattern on a crease, and confirmed that our sheet could be folded at larger folding angle than the sheet with slit pattern. Next, we examined the folding angle of the sheet that had “+” pattern with different width and found that the folding angle increased when the surface bending force increased. Finally, we demonstrated this “+” pattern to fabricate 3D word objects “MEMS”. Our surface bending approach to Origami folding could open a new avenue to widen the variety and controllability of self-folding objects.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"992-993"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83147821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Airway-on-a-Chip: Development and in Vitro Validation of a Microfluidic Cell Culture Model for Chronic Obstructive Pulmonary Disease 气道芯片:慢性阻塞性肺疾病微流控细胞培养模型的开发和体外验证
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056449
Tanya Bennet, Brenda Shen, Jeremy Siwik, Stephanie Pan, Cheng Wei Tony Yang, D. Sin, T. Hackett, K. Cheung
{"title":"Airway-on-a-Chip: Development and in Vitro Validation of a Microfluidic Cell Culture Model for Chronic Obstructive Pulmonary Disease","authors":"Tanya Bennet, Brenda Shen, Jeremy Siwik, Stephanie Pan, Cheng Wei Tony Yang, D. Sin, T. Hackett, K. Cheung","doi":"10.1109/MEMS46641.2020.9056449","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056449","url":null,"abstract":"We report a microfluidic cell culture model that incorporates a novel 3-dimensional extracellular matrix composed of a biodegradable membrane and lumen-patterned, cell-embedded hydrogel. Additionally, we developed a novel approach to produce a hydrogel mixture containing gelatin methacrylate (GelMA) and ultrasonicated Matrigel microparticles. The novel fabrication approach creates a hybrid hydrogel where the Matrigel is well distributed within the GelMA, it promotes fibroblast cell elongation, and it does not affect the photopolymerization of GelMA.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"65 1","pages":"440-443"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83242693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wearable and Flexible Heart Pulse Sensor Integrated with a Soft Pump and Actuator 可穿戴和灵活的心脏脉搏传感器集成了一个软泵和执行器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056376
Takafumi Yamaguchi, T. Arie, S. Akita, K. Takei
{"title":"Wearable and Flexible Heart Pulse Sensor Integrated with a Soft Pump and Actuator","authors":"Takafumi Yamaguchi, T. Arie, S. Akita, K. Takei","doi":"10.1109/MEMS46641.2020.9056376","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056376","url":null,"abstract":"This study proposes a wearable and flexible heart pulse sensor detected from a wrist using the tactile pressure sensor film. In general, it is difficult to monitor heart pulse stably under movement of wrist due to the change of position and pressure of the sensors on a wrist. To address this issue, soft pneumatic pump and actuator are integrated to fix the sensor on a wrist even under movement of body. Fundamental properties of pneumatic pump and tactile pressure sensor are studied in addition to the heart pulse monitoring.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"881-884"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83324103","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Impact of X-Ray Radiation on GaN/AlN MEMS Structure and GaN HEMT Gauge Factor Response x射线辐射对GaN/AlN MEMS结构和GaN HEMT测量因子响应的影响
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056389
Ji-Tzuoh Lin, Peng Wang, P. Shuvra, S. Mcnamara, Mike McCurdy, J. Davidson, K. Walsh, M. Alles, B. Alphenaar
{"title":"Impact of X-Ray Radiation on GaN/AlN MEMS Structure and GaN HEMT Gauge Factor Response","authors":"Ji-Tzuoh Lin, Peng Wang, P. Shuvra, S. Mcnamara, Mike McCurdy, J. Davidson, K. Walsh, M. Alles, B. Alphenaar","doi":"10.1109/MEMS46641.2020.9056389","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056389","url":null,"abstract":"We present electrical measurements of gallium nitride/Aluminum nitride (GaN/AlN) microelectromechanical system (MEMS) beams under the combined influence of strain and X-ray radiation. These results are used to understand the mechanism for the observed piezoresistive gauge factor in GaN devices. Exposure with X-ray radiation decreases the electrical resistance while strongly suppressing the gauge factor. Upon removal of the X-ray, the gauge factor quickly returns to its pre-radiated value, while the electrical resistance remains low for a long period of time. These results suggest that the piezoresistance is mainly due to the generation of piezoelectric fields, which are screened by the mobile charge excited by the X-ray radiation. Preliminary results are also presented for HEMT devices; here, piezoelectric fields shifts the threshold voltage of the transistor resulting in an increase in drain current.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"968-971"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88773055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Temperature Robust Silicon Resonant Accelerometer with Stress Isolation Frame Mounted on Axis-Symmetrical Anchors 温度稳健硅谐振加速度计与应力隔离框架安装在轴对称锚
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056157
J. Cui, Mengxia Liu, Haibing Yang, Dong Li, Qiancheng Zhao
{"title":"Temperature Robust Silicon Resonant Accelerometer with Stress Isolation Frame Mounted on Axis-Symmetrical Anchors","authors":"J. Cui, Mengxia Liu, Haibing Yang, Dong Li, Qiancheng Zhao","doi":"10.1109/MEMS46641.2020.9056157","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056157","url":null,"abstract":"This paper presents a novel silicon resonant accelerometer (SRA) with a stress isolation frame mounted on axis-symmetrical anchors to improve the temperature performance. The stress-insensitive design prevents the thermal stress produced by the mismatch of the thermal expansion coefficients (CTE) of the heterogeneous materials in the device from transmitting to double-ended tuning forks (DETF), resulting in reducing the thermal sensitivity of SRA. The results show the scale factor is 516 Hz/g and the average nominal frequency of the two DETFs is ∼138.4 kHz with the closely matched temperature coefficients of frequency (TCF) 5.72 Hz/°C and 5.92 Hz/ °C, respectively. The bias thermal sensitivity and compensated stability are 0.42 mg/°C and 0.6 mg over the temperature range from −40 °C to 40 °C, which is competitive compared with previously reported results in literatures.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"791-794"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86579080","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A Flow-Type Nanoparticle Generation System Using a Microchannel Device for Generating and Quenching Droplets 基于微通道装置的流型纳米颗粒生成和淬灭系统
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056205
N. Fujimoto, T. Kanda, K. Omori, Naohiro Tahara, Y. Sakata, Norihisa Seno, S. Wakimoto, Y. Nakazaki, T. Otoyama
{"title":"A Flow-Type Nanoparticle Generation System Using a Microchannel Device for Generating and Quenching Droplets","authors":"N. Fujimoto, T. Kanda, K. Omori, Naohiro Tahara, Y. Sakata, Norihisa Seno, S. Wakimoto, Y. Nakazaki, T. Otoyama","doi":"10.1109/MEMS46641.2020.9056205","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056205","url":null,"abstract":"High quality nanoparticles have been required in many industrial fields. By a principle of re-crystallization process, nanoparticles can be formed by quenching a solution. Thus, the quenching of micro droplets is effective for nanoparticle generation. In this study, we have developed a flow-type system for nanoparticles generation. In the system, generated micro droplets are quenched in continuous phase with small thermal conductivity using a microchannel device. We have successfully maintained the temperature of droplets before the quenching process and obtained fine nanoparticles.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"1075-1078"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89468557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Functional Elastomer for Flexible Electronics: Light Emitting Device and Gas Sensor 柔性电子用功能性弹性体:发光装置和气体传感器
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056433
A. Takei, S. Tsukamoto, Yusuke Komazaki, Yuichi Watanabe, Y. Kusaka, M. Yoshida
{"title":"Functional Elastomer for Flexible Electronics: Light Emitting Device and Gas Sensor","authors":"A. Takei, S. Tsukamoto, Yusuke Komazaki, Yuichi Watanabe, Y. Kusaka, M. Yoshida","doi":"10.1109/MEMS46641.2020.9056433","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056433","url":null,"abstract":"In general, flexible devices are manufactured by laminating and patterning several layers on a plastic film or an elastomeric substrate. In particular, elastomeric substrates have been used for flexible devices due to their high deformability. However, the fabrication of devices on elastomeric substrates requires complicated processes, such as the transfer process, because the low adhesion and difference in the thermal expansion values between the elastomer and the device layers limit the fabrication methods. In this study, we prepare composites of elastomer and functional particles (functional elastomer) and deposit electrodes on the functional elastomer. Our proposed flexible devices comprise only elastomer, electrode layers, and adhesive layers between them. By simplifying device structures, we facilitate the production of flexible devices. Inorganic electroluminescent powder, or CaCl2 solution, was mixed with polydimethylsiloxane, and flexible light emitting devices and a flexible gas (exhalation) sensor were achieved.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"940-942"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89658781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wide Angle and High Frequency (>120 Degrees@ 10 KHZ/90 Degrees@ 30 KHZ) Resonant Si-MEMS Mirror Using a Novel Tuning-Fork Driving 广角和高频(>120度@ 10 KHZ/90度@ 30 KHZ)谐振Si-MEMS反射镜使用新颖的音叉驱动
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056234
Takami Ishida, Kazuki Komaki, T. Harigai, R. Takayama, Takuma Katayama
{"title":"Wide Angle and High Frequency (>120 Degrees@ 10 KHZ/90 Degrees@ 30 KHZ) Resonant Si-MEMS Mirror Using a Novel Tuning-Fork Driving","authors":"Takami Ishida, Kazuki Komaki, T. Harigai, R. Takayama, Takuma Katayama","doi":"10.1109/MEMS46641.2020.9056234","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056234","url":null,"abstract":"We present a novel MEMS mirror with a unique scheme of the Double-Tuning-Fork (DTF) in which the central mirror is sandwiched between a pair of “fork” like structure that can realize a highly efficient vibro-rotational coupling in the anti-phase and, as a result, can generate a high torque as the source of high rotation power with a high driving efficiency. The developed DTF Si-MEMS mirror can scan a wide-optical angle of over 120 degrees which is close to the human viewing angle at driving frequency higher than 10 kHz demonstrating excellent characteristics surpassing the reported data of scanning angles at their high-frequency driving conditions.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"527-531"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76565148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Auto-Resonance - A New Paradigm for Driving Linear and Nonlinear Electrostatic Resonators 自共振——驱动线性和非线性静电谐振器的新范式
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056222
Danny A. Kassie, D. Elata
{"title":"Auto-Resonance - A New Paradigm for Driving Linear and Nonlinear Electrostatic Resonators","authors":"Danny A. Kassie, D. Elata","doi":"10.1109/MEMS46641.2020.9056222","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056222","url":null,"abstract":"For the first time ever, we experimentally demonstrate auto-resonance driving of an electrostatic resonator. This simple driving scheme, instantaneously locks on to the resonance frequency from the very first cycle, and the amplitude of the harmonic oscillation rapidly converges to the stable, fully-developed response. We demonstrate that even if the resonator is nonlinear and its resonance frequency is affected by motion amplitude, the auto-resonance driving scheme naturally tracks the nonlinear backbone of the dynamic response. We demonstrate that auto-resonance driving eliminates the bifurcation instability, which appears when a nonlinear resonator is driven in frequency sweeps. This means that nonlinear resonators can be operated at large amplitudes without any concern of instability. Auto-resonance is therefore a simple and practical alternative to phase-lock-loop driving of resonators.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"205 1","pages":"1183-1186"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78586154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Robust Compact Lens Scanner with Large Tunable Range 一个强大的紧凑镜头扫描仪与大可调范围
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI: 10.1109/MEMS46641.2020.9056364
Liang Zhou, Xiaomin Yu, Huikai Xie
{"title":"A Robust Compact Lens Scanner with Large Tunable Range","authors":"Liang Zhou, Xiaomin Yu, Huikai Xie","doi":"10.1109/MEMS46641.2020.9056364","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056364","url":null,"abstract":"This paper reports a compact lens scanner with large tunable range and high stiffness. A tunable range of over $100 mu mathrm{m}$ has been achieved by using a unique serpentine inverted-series-connected (ISC) electrothermal bimorph actuator design, and a high stiffness of 10 N/m is obtained by integrating 36 ISC actuators equally distributed along the perimeter of the central ring-shaped platform. This stiffness is approximately 43 times of that previously reported in [1]. The clear aperture is 1.8 mm in diameter and the diameter of the entire scanner is only 4.4 mm. This MEMS lens scanner can be used as miniature depth scanning engines for confocal or multiphoton endomicroscopic imaging.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"47 1","pages":"1149-1152"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75163248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
首页 上一页 下一页 尾页
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：481959085
Book学术官方微信