A. Takei, S. Tsukamoto, Yusuke Komazaki, Yuichi Watanabe, Y. Kusaka, M. Yoshida
{"title":"Functional Elastomer for Flexible Electronics: Light Emitting Device and Gas Sensor","authors":"A. Takei, S. Tsukamoto, Yusuke Komazaki, Yuichi Watanabe, Y. Kusaka, M. Yoshida","doi":"10.1109/MEMS46641.2020.9056433","DOIUrl":null,"url":null,"abstract":"In general, flexible devices are manufactured by laminating and patterning several layers on a plastic film or an elastomeric substrate. In particular, elastomeric substrates have been used for flexible devices due to their high deformability. However, the fabrication of devices on elastomeric substrates requires complicated processes, such as the transfer process, because the low adhesion and difference in the thermal expansion values between the elastomer and the device layers limit the fabrication methods. In this study, we prepare composites of elastomer and functional particles (functional elastomer) and deposit electrodes on the functional elastomer. Our proposed flexible devices comprise only elastomer, electrode layers, and adhesive layers between them. By simplifying device structures, we facilitate the production of flexible devices. Inorganic electroluminescent powder, or CaCl2 solution, was mixed with polydimethylsiloxane, and flexible light emitting devices and a flexible gas (exhalation) sensor were achieved.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"940-942"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056433","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In general, flexible devices are manufactured by laminating and patterning several layers on a plastic film or an elastomeric substrate. In particular, elastomeric substrates have been used for flexible devices due to their high deformability. However, the fabrication of devices on elastomeric substrates requires complicated processes, such as the transfer process, because the low adhesion and difference in the thermal expansion values between the elastomer and the device layers limit the fabrication methods. In this study, we prepare composites of elastomer and functional particles (functional elastomer) and deposit electrodes on the functional elastomer. Our proposed flexible devices comprise only elastomer, electrode layers, and adhesive layers between them. By simplifying device structures, we facilitate the production of flexible devices. Inorganic electroluminescent powder, or CaCl2 solution, was mixed with polydimethylsiloxane, and flexible light emitting devices and a flexible gas (exhalation) sensor were achieved.