广角和高频(>120度@ 10 KHZ/90度@ 30 KHZ)谐振Si-MEMS反射镜使用新颖的音叉驱动

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI:10.1109/MEMS46641.2020.9056234

Takami Ishida, Kazuki Komaki, T. Harigai, R. Takayama, Takuma Katayama

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引用次数: 2

摘要

本文提出了一种新颖的MEMS反射镜，该反射镜采用独特的双音叉(DTF)方案，将中央反射镜夹在一对“叉”状结构之间，可以在反相位中实现高效的振动-旋转耦合，从而产生高扭矩作为高旋转功率的来源，并具有高驱动效率。所开发的DTF Si-MEMS反射镜可以在高于10 kHz的驱动频率下扫描超过120度的广角，接近人类的视角，具有超越其高频驱动条件下扫描角度数据的优异特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Wide Angle and High Frequency (>120 Degrees@ 10 KHZ/90 Degrees@ 30 KHZ) Resonant Si-MEMS Mirror Using a Novel Tuning-Fork Driving

We present a novel MEMS mirror with a unique scheme of the Double-Tuning-Fork (DTF) in which the central mirror is sandwiched between a pair of “fork” like structure that can realize a highly efficient vibro-rotational coupling in the anti-phase and, as a result, can generate a high torque as the source of high rotation power with a high driving efficiency. The developed DTF Si-MEMS mirror can scan a wide-optical angle of over 120 degrees which is close to the human viewing angle at driving frequency higher than 10 kHz demonstrating excellent characteristics surpassing the reported data of scanning angles at their high-frequency driving conditions.

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来源期刊

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

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