Wide Angle and High Frequency (>120 Degrees@ 10 KHZ/90 Degrees@ 30 KHZ) Resonant Si-MEMS Mirror Using a Novel Tuning-Fork Driving

Abstract

We present a novel MEMS mirror with a unique scheme of the Double-Tuning-Fork (DTF) in which the central mirror is sandwiched between a pair of “fork” like structure that can realize a highly efficient vibro-rotational coupling in the anti-phase and, as a result, can generate a high torque as the source of high rotation power with a high driving efficiency. The developed DTF Si-MEMS mirror can scan a wide-optical angle of over 120 degrees which is close to the human viewing angle at driving frequency higher than 10 kHz demonstrating excellent characteristics surpassing the reported data of scanning angles at their high-frequency driving conditions.