2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

{"title":"Broadband Antireflective Quartz Glasses with Double-Side Nanocone Forests","authors":"Yudong Yang, H. Mao, Jin Li, Meng Shi, Kewen Long, Dapeng Chen","doi":"10.1109/MEMS46641.2020.9056162","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056162","url":null,"abstract":"In this work, nanoforests composed of one dimensional quasi-ordered nanocones are prepared on both sides of a quartz glass using a wafer-level fabrication technique, and the nanocones are randomly distributed with different dimensions, diameters, heights and periods. Such a quartz glass with these double-side nanocone forests(NCFs) shows high antireflection in a broad wavelength range from 250nm to 800nm, and an average transmittance of 97.5% is achieved. The broadband antireflection feature of the NCFs is regarded as a cumulative antireflection of various with different sizes in different bands. Based on this, it is expected such quartz glasses have applications in various micro-optoelectronic devices and micro-optical imaging systems.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"283-286"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75549523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication of WO3 Nanocone Arrays for Highly Sensitive C2H6 Gas Sensor Integrated with Low Powered in Plane Microheater","authors":"Md Ridwan Adib, Keekeun Lee","doi":"10.1109/MEMS46641.2020.9056151","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056151","url":null,"abstract":"The approaches of inexpensive and nanostructured metal oxide semiconductors are widely used for gas sensing. Among them, Tungsten Oxide (WO3) has attracted a lot of attentions due to its high sensitivity, structural simplicity, low cost production and high compatibility with nano-fabrication. However, thin film based planar WO3 has a limitation to enhance the sensitivity due to lower surface to volume ratio. To find improvements in sensor sensitivity and response time in terms of cone geometries and to determine optimal driving temperature for ethane (C2H6) gas sensor, hereby this paper reports, for the first time, the nanocone configured WO3 array combined with integration of low powered in-plane microheater.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"416 1","pages":"705-708"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75766342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Phase-Controlled Oscillation in a Capacitive Nonlinear Ring Resonator with On-Chip Feedthrough De-Embedding","authors":"Dongyang Chen, Hemin Zhang, Jiangkun Sun, Milind S. Pandit, G. Sobreviela, Yong Wang, Qian Zhang, A. Seshia, Jin Xie","doi":"10.1109/MEMS46641.2020.9056278","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056278","url":null,"abstract":"Mechanical oscillators employing varying capacitance scheme for the transduction of the motion are significantly limited by the effects of capacitive feedthrough. This work focuses on revealing the nature of feedthrough parasitic dominated resonance and demonstrating a phase-controlled oscillation technique for operating microresonators beyond the nonlinear regime with on-chip feedthrough effect (FE) de-embedding. Our method imposes hybrid control on the phase offset of the resonant motion and electromechanical coupling of the transducers to enable the isolation of the FE in the nonlinear bifurcation points. The strategies of the on-chip FE control in our capacitive platform can be suitably transformed for the use in feedthrough parasitic dominated systems using alternative transduction principles as well.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"36 1","pages":"773-776"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74674635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Freeze-Dried Cell-Free Protein Expression System in Microchambers Toward Point-of-Care Diagnostics","authors":"T. Tonooka","doi":"10.1109/MEMS46641.2020.9056452","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056452","url":null,"abstract":"This paper reports cell-free protein expression performed by freeze-dried cell-free protein synthesis (CFPS) system in micro-chambers on a Polydimethylsiloxane (PDMS)-Glass microfluidic device. Previously, the CFPS system was freeze-dried on a piece of paper for Point-Of-Care (POC) diagnostics. However, protein expression on paper-based materials is generally non-homogeneous due to its non-homogeneous structure made from cellulose, limiting the quality of diagnostics. Here, we freeze-dried the CFPS system in the micro-chambers on the microfluidic device for the first time. We then validated the functionality of protein expression after rehydration of the CFPS system in the micro-chambers. Using the developed device equipped with the freeze-dried CFPS system, diagnostics of a test sample containing a small molecule, N-acyl-homoserine-lactone (AHL), was demonstrated.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"66 1","pages":"1036-1039"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74718041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Ultrafast and Inexpensive Microfabrication of Flexible Electrodes for Neural Recording/Stimulation Based on DC Electrophoresis Deposition and Nano-Titanium Dioxide","authors":"Zhaoling Huang, Qi Zeng, Jinjiang Huang, Shuijie Qin, Tianzhun Wu","doi":"10.1109/MEMS46641.2020.9056238","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056238","url":null,"abstract":"A flexible microelectrode array (fMEA) for neural recording/stimulation based on platinum (Pt) nanospheres was microfabricated by an ultrafast and inexpensive method enabled by direct current (DC) electrophoresis deposition and nano-titanium dioxide (nano-TiO2). To avoid the great mismatch between the rigid metal layer and the soft polymer substrate, we introduced a polydopamine (PDA) buffer layer to graft Pt nanospheres to polyimide (PI) substrates, and TiO2 was added to accelerate the photosynthesis of PDA from ∼24h to ∼2h. We further used DC electrophoresis to selectively deposit PDA/TiO2/Pt to pattern fMEA and minimize the PDA synthesis to only 10-20 mins, which is 72 times faster than the best record reported. Compared with conventional fMEA with Ti/Pt deposited by sputtering, the as-fabricated fMEA with patternable PDA/TiO2/Pt electrodes have significantly lower impedance (reduced by 99.3%) and better cathodic charge storage capacity (CSCc, increased by 94 times). This method will also greatly benefit the development of inexpensive, high-performance flexible electronics.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"972-975"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74776620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High Volume Applications","authors":"T. Akin","doi":"10.1109/MEMS46641.2020.9056383","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056383","url":null,"abstract":"This paper provides an overview of the studies and the current status for the development of a novel, low-cost, and CMOS foundry compatible approach for implementing microbolometers with standard CMOS and simple post-CMOS subtractive MEMS processes. This CMOS infrared detector technology is shortly called as the CMOS IR (CIR) technology, and it can be used to implement Focal Plane Arrays (FPAs) for infrared imaging in the LWIR-band ($8-12 mu mathrm{m}$ wavelength). Post-CMOS processes require only one mask lithography process and simple subtractive etching steps to obtain suspended bulk micromachined microbolometer pixels, where the detector element can be formed with standard CMOS layers and devices such as n-well layers, diodes, polysilicon, and some other CMOS layers and devices. Sensors of various pitch sizes (such as $70mu mathrm{m}, 60mu mathrm{m}, 50mu mathrm{m}$, and $35mu mathrm{m}$) and various FPA formats (such as 160×120, 80×80, and 40×40) have been demonstrated; some of these studies resulted in real commercial products in a VC funded spin-off company. The recent commercial products have a $35mu mathrm{m}$ pixel pitch implemented using a $0.18mu mathrm{m}$ CMOS process. One of these is a 80×80 microbolometer FPA has a die size of 5.4mmx6.5 mm and dissipates 20mW; the fabricated sensor is measured to provide NETD values of 163 mK at 17 fps and 71 mK at 4 fps with f/1.0 optics in a dewar, while using only the standard CMOS layers. When this FPA is wafer level vacuum packaged with a silicon cap wafer with one side AR coating, it provides a 112 mK NETD at 4 fps with f/1.1 optics. Another commercial product is the 160×120 FPA, which has a die size of 9.3 mm x 9.1 mm and dissipates less than 50 mW at 30 fps while operating with a 3.3V suppy. The sensor is measured to provide peak NETD values of 161 mK, 117 mK, and 90 mK at 17 fps, 11 fps, and 4 fps, respectively, in a dewar with f/1.0 optics. These performances are more than enough for a number high volume low-cost consumer market applications like advanced presence detection, human counting, smart offices/homes/cities, and other IoT applications. The performances can be improved further by using finer pitch standard CMOS processes as the CIR approach is scalable, allowing to reduce the pixel pitch even further while increasing the array size and/or improving the sensor performance if necessary for automotive, smart phone, and various other low-cost, high volume markets.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"147-152"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74190567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Leaky Opto-Electrical Neural Probe for Optical Stimulation and Electrochemical Detection of Dopamine Exocytosis","authors":"Shashank Vasudevan, Janko Kajtez, A. Heiskanen, J. Emnéus, S. Keller","doi":"10.1109/MEMS46641.2020.9056270","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056270","url":null,"abstract":"This paper reports on the fabrication and characterization of leaky opto-electrical neural probes for optical stimulation and real time electrochemical detection of dopamine exocytosis from optogenetically modified neural stem cells. Indentations were introduced in a SU-8 waveguide structure, patterned directly on the probe shank, to allow light to leak over a large area. Pyrolytic carbon electrodes fabricated on both sides of the leaky waveguide allow for real time detection of dopamine. The electrochemical characterization of the pyrolytic carbon demonstrates excellent conductivity and suitability for dopamine detection.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"21 1","pages":"388-391"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84923480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Micro Tissue Assembly for Co-Culturing 3D Skeletal Muscle and Adipose Tissues","authors":"Byeong-Chae Jo, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056277","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056277","url":null,"abstract":"This paper proposes micro tissue assembly for co-culturing 3D skeletal muscle and adipose tissues. The adipocytes encapsulated in a microfiber were cultured in advance for maturation which accumulated significantly larger size of lipid droplets compared with conventional 2D dish culture. Then, we assembled a micro tissue by placing the microfiber-based adipose tissue on a PDMS substrate with myoblast-laden collagen solution covering on the top. The assembled micro tissue was then co-cultured for 5 days. We found that the skeletal muscle tissue fabricated in the micro tissue bundled up adipose tissue forming in-vivo like composition. Our skeletal muscle and adipose tissue assembly not only gives a promising outlook for the micro physiological system but also tools for development studies or the cultured meat industry.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"459-460"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85090724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Skin-Mountable Bacteria-Powered Battery System for Self-Powered Medical Devices","authors":"M. Mohammadifar, Mehdi Tahernia, Jihyun Yang, Ahyeon Koh, Seokheun Choi","doi":"10.1109/MEMS46641.2020.9056174","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056174","url":null,"abstract":"Biochemical energy harvesting from human sweat is arguably the most underdeveloped because of immature technologies. Nonetheless, excitement is building for scavenging power from sweat, as it is the most suitable energy source for skin-contacting wearable devices. Despite the vast potential and promise of sweat-driven power generation, the technique is limited to unstable and inefficient enzymatic catalysis, which requires fundamental breakthroughs to enable self-sustaining, long-lived power generation. Here, we for the first time demonstrate the ability to generate an innovative, practical, and longstanding power from human sweat by using the metabolisms of human skin-inhabiting bacteria, Staphylococcus epidermidis. Our sweat-powered battery was based on microbial fuel cells (MFCs), exploiting the sweat-eating bacteria as a biocatalyst to transform the chemical energy of sweat into electrical power through bacterial metabolism. A DC/DC booster circuit was connected to the stacked devices to increase the operational voltage (∼500 mV) to a maximum output of >3 V for powering a thermometer.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"72-75"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84190127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Wearable Braille Recognition System Based on High Density Tactile Sensors","authors":"Chunpeng Jiang, Kunpeng Gao, Nan Zhao, Gencai Shen, Zhongke Mei, Zhenyu Song, Bin Yang, Jingquan Liu","doi":"10.1109/MEMS46641.2020.9056318","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056318","url":null,"abstract":"This paper reports a wearable and wireless system for Braille recognition, called TouchReader, which utilizes a fast and accessible strategy to facilitate visually impaired people in learning and communication. This finger-worn device is composed of flexible and piezoresistive sensor array with high density (96 sensors in 78.5 mm2), high sensitivity (8.44 kPa−1 in low pressure range) and a template-matching recognition system. It is the first time to achieve area-scanning of Braille character on the strength of tactile sensors and convert text to voice message, exhibiting better practicability, portability and reliability in daily routine with less manual intervention.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"44 1","pages":"28-31"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85371127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}