Broadband Antireflective Quartz Glasses with Double-Side Nanocone Forests

Abstract

In this work, nanoforests composed of one dimensional quasi-ordered nanocones are prepared on both sides of a quartz glass using a wafer-level fabrication technique, and the nanocones are randomly distributed with different dimensions, diameters, heights and periods. Such a quartz glass with these double-side nanocone forests(NCFs) shows high antireflection in a broad wavelength range from 250nm to 800nm, and an average transmittance of 97.5% is achieved. The broadband antireflection feature of the NCFs is regarded as a cumulative antireflection of various with different sizes in different bands. Based on this, it is expected such quartz glasses have applications in various micro-optoelectronic devices and micro-optical imaging systems.