{"title":"黑磷NEMS共振红外(IR)探测器","authors":"Arnob Islam, Jaesung Lee, P. Feng","doi":"10.1109/MEMS46641.2020.9056366","DOIUrl":null,"url":null,"abstract":"We report on the first experimental demonstration of two-dimensional (2D) black phosphorus (P) resonant nano-electromechanical systems (NEMS) for infrared (IR) detection, enabled by black P vibrating channel transistors (VCTs). Resonant motions of the black P NEMS are excited and read out all-electrically, thanks to black P crystal's high field-effect mobility and highly efficient channel conductance modulation via resonant motion. Given the narrow direct bandgap ($E_{\\mathrm{g}}\\approx 0.3\\text{eV}$) intrinsically suited for infrared (IR) detection, the black P crystalline NEMS resonators are highly responsive, and readily detect IR radiation by utilizing resonance frequency shift upon absorption of incident IR. The measurements achieve excellent IR responsivity, $\\Re=-0.31\\ \\text{kHz}/\\mu\\mathrm{W}$, from a 2D black P drumhead NEMS resonator, at 785nm near infrared (NIR) wavelength. Toward enabling real-time IR sensing, we further demonstrate sensitive all-electrical transduction of resonances of 2D black P NEMS, in direct two-port transmission measurement of VCTs, by employing a local gate, thus evading the need of any conventional frequency down-mixing or conversion techniques.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"142 1 1","pages":"826-829"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Black Phosphorus NEMS Resonant Infrared (IR) Detector\",\"authors\":\"Arnob Islam, Jaesung Lee, P. Feng\",\"doi\":\"10.1109/MEMS46641.2020.9056366\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report on the first experimental demonstration of two-dimensional (2D) black phosphorus (P) resonant nano-electromechanical systems (NEMS) for infrared (IR) detection, enabled by black P vibrating channel transistors (VCTs). Resonant motions of the black P NEMS are excited and read out all-electrically, thanks to black P crystal's high field-effect mobility and highly efficient channel conductance modulation via resonant motion. Given the narrow direct bandgap ($E_{\\\\mathrm{g}}\\\\approx 0.3\\\\text{eV}$) intrinsically suited for infrared (IR) detection, the black P crystalline NEMS resonators are highly responsive, and readily detect IR radiation by utilizing resonance frequency shift upon absorption of incident IR. The measurements achieve excellent IR responsivity, $\\\\Re=-0.31\\\\ \\\\text{kHz}/\\\\mu\\\\mathrm{W}$, from a 2D black P drumhead NEMS resonator, at 785nm near infrared (NIR) wavelength. Toward enabling real-time IR sensing, we further demonstrate sensitive all-electrical transduction of resonances of 2D black P NEMS, in direct two-port transmission measurement of VCTs, by employing a local gate, thus evading the need of any conventional frequency down-mixing or conversion techniques.\",\"PeriodicalId\":6776,\"journal\":{\"name\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"142 1 1\",\"pages\":\"826-829\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS46641.2020.9056366\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056366","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Black Phosphorus NEMS Resonant Infrared (IR) Detector
We report on the first experimental demonstration of two-dimensional (2D) black phosphorus (P) resonant nano-electromechanical systems (NEMS) for infrared (IR) detection, enabled by black P vibrating channel transistors (VCTs). Resonant motions of the black P NEMS are excited and read out all-electrically, thanks to black P crystal's high field-effect mobility and highly efficient channel conductance modulation via resonant motion. Given the narrow direct bandgap ($E_{\mathrm{g}}\approx 0.3\text{eV}$) intrinsically suited for infrared (IR) detection, the black P crystalline NEMS resonators are highly responsive, and readily detect IR radiation by utilizing resonance frequency shift upon absorption of incident IR. The measurements achieve excellent IR responsivity, $\Re=-0.31\ \text{kHz}/\mu\mathrm{W}$, from a 2D black P drumhead NEMS resonator, at 785nm near infrared (NIR) wavelength. Toward enabling real-time IR sensing, we further demonstrate sensitive all-electrical transduction of resonances of 2D black P NEMS, in direct two-port transmission measurement of VCTs, by employing a local gate, thus evading the need of any conventional frequency down-mixing or conversion techniques.