Stretchable Array of Resistive Pressure Sensors Ignoring the Effect of Strain-Induced Deformation

R. Matsuda, S. Mizuguchi, Fumika Nakamura, Takuma Endo, Go Inamori, Yutaka Isoda, H. Ota
{"title":"Stretchable Array of Resistive Pressure Sensors Ignoring the Effect of Strain-Induced Deformation","authors":"R. Matsuda, S. Mizuguchi, Fumika Nakamura, Takuma Endo, Go Inamori, Yutaka Isoda, H. Ota","doi":"10.1109/MEMS46641.2020.9056276","DOIUrl":null,"url":null,"abstract":"In this study, a stretchable array of resistive pressure sensors which could ignore the effect of stretch deformation was demonstrated. In terms of stretchable pressure sensors composed of elastic materials, pressure sensors itself are deformed during strain of the devices, which becomes large error of the pressure measurement. Our resistive sensors in a array are based on patterned porous conductive silicone (Ecoflex). The substrate consists of hetero-silicone rubbers of two different elastic silicones. In addition, resistances of column and row electrodes in the matrix of mapping are much lower than the pressure sensors. This substrate and control of electrode resistances can prevent stretch deformation of the device from affecting the sensing of pressure. The error of the pressure sensor in our device during 150% strain was one sixth less than the one by conventional elastic pressure sensor composed of organic materials. This result suggests possibility to apply stretchable pressure sensor on largely deformed area of body, and soft robots.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"803-805"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056276","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

In this study, a stretchable array of resistive pressure sensors which could ignore the effect of stretch deformation was demonstrated. In terms of stretchable pressure sensors composed of elastic materials, pressure sensors itself are deformed during strain of the devices, which becomes large error of the pressure measurement. Our resistive sensors in a array are based on patterned porous conductive silicone (Ecoflex). The substrate consists of hetero-silicone rubbers of two different elastic silicones. In addition, resistances of column and row electrodes in the matrix of mapping are much lower than the pressure sensors. This substrate and control of electrode resistances can prevent stretch deformation of the device from affecting the sensing of pressure. The error of the pressure sensor in our device during 150% strain was one sixth less than the one by conventional elastic pressure sensor composed of organic materials. This result suggests possibility to apply stretchable pressure sensor on largely deformed area of body, and soft robots.
忽略应变变形影响的可拉伸电阻压力传感器阵列
在本研究中,我们展示了一种可以忽略拉伸变形影响的可拉伸电阻压力传感器阵列。在弹性材料构成的可拉伸压力传感器中,压力传感器本身在器件应变过程中发生变形,成为压力测量误差较大的原因。我们的电阻传感器阵列是基于图案多孔导电硅胶(Ecoflex)。基材由两种不同弹性的硅橡胶组成。此外,映射矩阵中柱电极和行电极的电阻远低于压力传感器。这种衬底和电极电阻的控制可以防止装置的拉伸变形影响压力的传感。该装置在150%应变下的压力传感器误差比传统有机材料弹性压力传感器的误差小六分之一。这一结果提示了将可拉伸压力传感器应用于人体大变形区域和软体机器人的可能性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信