高速和步进MEMS旋转致动器多模态，360°侧视内窥镜探头

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI:10.1109/MEMS46641.2020.9056226

S. Jayhooni, B. Assadsangabi, G. Hohert, P. Lane, H. Zeng, K. Takahata

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引用次数: 2

摘要

本文首次报道了一种MEMS旋转致动器，该致动器可以实现不同模式的侧视显微内窥镜探针，用于腔内组织分析。开发的管状微旋转驱动器提供高速和步进运动，分别与光学相干层析成像(OCT)和拉曼光谱兼容。该驱动器在之前设计的基础上进行了改进，每功率的转速提高了125倍，同时在约50%的薄体中实现任意角度分辨步进旋转，显著降低了生物安全体内操作的加热效应。OCT内窥镜探头与开发的旋转驱动器/扫描仪集成的初步测试成功地展示了活体人体皮肤组织的实时360°成像。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High-Speed and Stepping MEMS Rotary Actuator for Multimodal, 360° Side-Viewing Endoscopic Probes

This paper reports, for the first time, a MEMS rotary actuator that enables side-viewing microendoscopic probes with different modalities for luminal tissue analysis. The developed tubular-form micro rotary actuator offers both high-speed and stepping motions that are compatible with the use for optical coherence tomography (OCT) and Raman spectroscopy, respectively. The actuator, improved from its preceding designs, shows up to 125× higher revolution speeds per power while enabling arbitrary angle-resolved stepping rotations in a ∼50% thinner body, with significantly reduced heating effect for biologically safe operation in vivo. Preliminary testing of the OCT endoscopic probe integrated with the developed rotary actuator/scanner successfully demonstrates real-time 360° imaging of live human skin tissue.

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来源期刊

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

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