平面单致动器双稳定机械锁存器作为电气开关

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI:10.1109/MEMS46641.2020.9056413

Yang Bu, Yue Jiang, Saeko Kawano, B. S. T. Tam, Sheng Ni, Liying Lin, O. Tabata, T. Tsuchiya, X. Wang, M. Wong

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引用次数: 0

摘要

本文演示并报道了一种微加工平面双稳态机械锁存器。双稳定机构的紧凑尺寸是通过在其他可移动结构的中心封闭一个锚定闩锁槽来实现的。该装置使用单个执行器驱动，通过施加分别为10.3 V和9.5 V的设置和复位电压，可以在两种稳定状态之间机械切换。该器件在要求微开关的应用中表现出良好的耐用性和良好的潜力，被证明是控制发光二极管的电气开关。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Planar Single-Actuator Bi-Stable Mechanical Latch as an Electrical Switch

A micro-fabricated planar bi-stable mechanical latch is demonstrated and presently reported. The compact size of the bi-stable mechanism is achieved by enclosing an anchored latch groove in the center of other movable structures. Driven using a single actuator, the device can be switched mechanically between two stable states by applying respective setting and resetting voltage of 10.3 V and 9.5 V. Exhibiting good durability and promising potential for applications demanding micro-switches, the device was demonstrated as an electrical switch to control a light-emitting diode.

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来源期刊

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

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