Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven

Abstract

This paper is the first to investigate the long-term stability of Surface Acoustic Wave Gyroscopes (SAWG) using an ovenized control system. Monolithic integration of a MEMS heater adjacent to SAW devices on Lithium Niobate over insulator substrate (LNOI) tightly couples frequency-based temperature detection with heating for temperature and frequency stabilization. This first prototype demonstrates the ability to minimize the temperature variations of the SAWG to below $\pm 10\ \mu\mathrm{K}$ and stabilize the SAWG resonance frequency to ±0.2 ppm. This approach thus eliminates the thermal drift in a SAWG and enables the development of a new generation of MEMS-based gyroscopes with long-term stability.