A Planar Single-Actuator Bi-Stable Mechanical Latch as an Electrical Switch

Abstract

A micro-fabricated planar bi-stable mechanical latch is demonstrated and presently reported. The compact size of the bi-stable mechanism is achieved by enclosing an anchored latch groove in the center of other movable structures. Driven using a single actuator, the device can be switched mechanically between two stable states by applying respective setting and resetting voltage of 10.3 V and 9.5 V. Exhibiting good durability and promising potential for applications demanding micro-switches, the device was demonstrated as an electrical switch to control a light-emitting diode.