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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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A Digital PCR Chip with 3D Structure and Composite Materials 具有三维结构和复合材料的数字 PCR 芯片
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439396
Shiyuan Gao, Tiegang Xu, Lei Wu, Xiaoyue Zhu, Zhan Ma, Xinxin Li
{"title":"A Digital PCR Chip with 3D Structure and Composite Materials","authors":"Shiyuan Gao, Tiegang Xu, Lei Wu, Xiaoyue Zhu, Zhan Ma, Xinxin Li","doi":"10.1109/MEMS58180.2024.10439396","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439396","url":null,"abstract":"We designed and fabricated a three-dimensional (3D) digital PCR (dPCR) chip for better sample compartmentalization and stronger fluorescent signals. The chip was made of glass, silicon and poly dimethylsiloxane (PDMS) layers, respectively. All the microstructures were fabricated on the silicon substrate, with high-density hexagonal-shape reaction units regularly arranged in the reaction zone. A common fed channel was located underneath the reaction units to maximize the use of the chip area. The reaction units and the flow channel were connected by cylindrical micro-holes, which made the oil-water two-phase system more stable and reduced the interference of fluorescence signals due to residual sample in the flow channel. In addition, fluorescent light reflection on the silicon surface enhanced the resolution of dPCR image.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"31 1","pages":"665-668"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Biochemical Sensor Based on a Surface Lattice Resonance Metasurface in the Near-Infrared Band 基于近红外波段表面晶格共振元表面的生化传感器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439383
Liye Li, Lijun Ma, Wengang Wu
{"title":"A Biochemical Sensor Based on a Surface Lattice Resonance Metasurface in the Near-Infrared Band","authors":"Liye Li, Lijun Ma, Wengang Wu","doi":"10.1109/MEMS58180.2024.10439383","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439383","url":null,"abstract":"This paper reports a biochemical sensor based on the reflection-type surface lattice resonance (SLR) mechanism in an all-metal metasurface in the near-infrared band. The sensor promotes SLR practicality and has better sensing performances than traditional plasmonic sensors, with a sensitivity of 796.6 nm/RIU and a figure of merit (FoM) of 39.13. The detection limits of NaCl and glucose solution are down to 0.5% and 1% respectively. With surface functionalization, the sensor detects the low concentration (0.5 µg/ml) of the carcinoembryonic antigen (CEA) specifically and efficiently.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 4","pages":"1055-1058"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Digital Light Processing Method to Fabricate Conductive Polymer on Various Substrates for Microelectrode and Physical Sensing Application 用数字光处理方法在各种基底上制造用于微电极和物理传感应用的导电聚合物
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439476
Muhammad Faizul Zaki, Chen-Fang Sun, Pin-Chuan Chen, A. Saravanan, Bohr‐Ran Huang
{"title":"Digital Light Processing Method to Fabricate Conductive Polymer on Various Substrates for Microelectrode and Physical Sensing Application","authors":"Muhammad Faizul Zaki, Chen-Fang Sun, Pin-Chuan Chen, A. Saravanan, Bohr‐Ran Huang","doi":"10.1109/MEMS58180.2024.10439476","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439476","url":null,"abstract":"This research introduces a novel method for manufacturing polymer microelectrodes via DLP 3D printing on various substrates, including PDMS, PMMA, and glass. Simple and rapid fabrication processes are described herein by allowing a single exposure of UV light to print the electrode within minutes. Digital masks define the UV light pattern, eliminating the need for physical masks. A polyacrylate resin-CNT nanocomposite was employed as the electrode material, exhibiting a sheet conductivity of 3.52×10-2 S/cm on various substrates. The microelectrode achieved a resolution of ~130µm in width and 150µm in thickness. As a proof of concept, a flexible tactile sensor with microstructural features was fabricated using the proposed method, incorporating multi-material printing and sequential digital masks. The sensors enabled a broad pressure detection range (80 to 800,000 Pa), high stability, and durable sensing performance under high-pressure dynamic loading for over 30 minutes. The manufacturing process did not involve physical optical masks, an annealing process, or harmful chemicals, making it more time-efficient and environmentally friendly.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 3","pages":"618-621"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Avalanche Photoionization Detector 雪崩光离子化探测器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439447
Xiaheng Huang, Weishu Wu, Xudong Fan
{"title":"Avalanche Photoionization Detector","authors":"Xiaheng Huang, Weishu Wu, Xudong Fan","doi":"10.1109/MEMS58180.2024.10439447","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439447","url":null,"abstract":"This paper reports a microfluidic gas sensor termed avalanche photoionization detector (APID). The APID employs miniaturized vacuum-UV (VUV) lamp as a photoionization source to ionize volatile organic compounds (VOCs) within a microfluidic ionization chamber made of a MgF2 substrate bonded to an etch-through silicon microfluidic channel. The resultant electrons are collected by a reversely-biased avalanche P/N junction and subsequently undergo an avalanche process within the junction's depletion region, resulting in a substantial internal gain.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 3","pages":"856-858"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531323","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations 利用同相和反相叠加振荡进行模式定位和频率调制传感
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439528
T. Tsukamoto, R. Forke, S. Weidlich, D. Bülz, Alexey Shaporin, Karla Hiller, Shuji Tanaka
{"title":"Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations","authors":"T. Tsukamoto, R. Forke, S. Weidlich, D. Bülz, Alexey Shaporin, Karla Hiller, Shuji Tanaka","doi":"10.1109/MEMS58180.2024.10439528","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439528","url":null,"abstract":"This paper reports on a mode-localized sensor that uses superposed in-phase (IP) and anti-phase (AP) oscillation modes. The IP/AP mode separator was developed to control these modes simultaneously, even when these modes overlap. The modal-shape (amplitude ratio) detection method using the interference signals between AP and IP control loops is proposed and demonstrated. The IP and AP modal shapes as well as resonant frequencies were simultaneously detected, which means the proposed system can also be used as a frequency modulation (FM) sensor.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"71 1","pages":"899-902"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Quantitative Measurements of Catalytic Activity of Single-Atom and Nanoparticle Palladium Catalysts for Sensitive Detection of Methane Using Cantilever-Based Temperature-Programmed Reduction Technique 利用基于悬臂的温度编程还原技术定量测量单原子和纳米粒子钯催化剂的催化活性，用于灵敏检测甲烷
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439549
Qiaoyuan Yang, Ming Li, Yanlong Zheng, Xinyu Li, Ying Chen, Xinxin Li, P. Xu
{"title":"Quantitative Measurements of Catalytic Activity of Single-Atom and Nanoparticle Palladium Catalysts for Sensitive Detection of Methane Using Cantilever-Based Temperature-Programmed Reduction Technique","authors":"Qiaoyuan Yang, Ming Li, Yanlong Zheng, Xinyu Li, Ying Chen, Xinxin Li, P. Xu","doi":"10.1109/MEMS58180.2024.10439549","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439549","url":null,"abstract":"In this work, the catalytic activity of isolated single atoms (SAs) was quantitatively measured using an integrated resonant microcantilever, which can measure sub-picogram-level mass-changes of Pd-SAs during the reduction process under an H2-containing atmosphere (i.e., cantilever-based H2-TPR technique). The ultra-sensitive cantilever-TPR measurements indicate that Pd-SAs exhibit higher catalytic activity than Pd nanoparticles with an average diameter of 3nm. The higher catalytic activity of Pd-SAs can be verified through gas sensing experiments because Pd-SAs show satisfactory responses to ppm-level methane. In contrast, the response of Pd-NPs to 100 ppm methane is negligible.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"66 3","pages":"217-220"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multifunctional Thermal Biosensor Based on Silicon Thermocouple Junction and Suspended Microfluidic Channel 基于硅热电偶结和悬浮微流控通道的多功能热敏生物传感器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439428
Tianxiang Liang, Zhen Peng, Chunyang Li, Cao Xia, Yuanlin Xia, Zhuqing Wang
{"title":"Multifunctional Thermal Biosensor Based on Silicon Thermocouple Junction and Suspended Microfluidic Channel","authors":"Tianxiang Liang, Zhen Peng, Chunyang Li, Cao Xia, Yuanlin Xia, Zhuqing Wang","doi":"10.1109/MEMS58180.2024.10439428","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439428","url":null,"abstract":"A multifunctional thermal biosensor based on a single thermocouple junction and suspended microfluidic multi-channels is presented in this paper. The thermal sensor was fabricated on silicon on insulator (SOI) wafers using a standard MEMS process. To minimize heat loss and increase sensitivity, suspended bridge structures were prepared on SOI substrates using a single SU8 polymer. The designed biosensor is capable of detecting multiple markers of multiple targets simultaneously, which solves the problem of low efficiency of single-channel detection and improves the detection efficiency and accuracy of biosensors. The biosensor designed for multifunctional detection exhibits an extremely high response level, with a response time of less than 100 ms and a highly linear relationship between the targets, characterized by a sensitivity of 0.5 V/W. This biosensor shows great potential for portable medical detection and Will further meet the needs of the people for modern home medical testing.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"190 3","pages":"1126-1129"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
DC Hot Switching Lifetime Study for Contact MEMS Switch by Weibull Distribution Analysis 通过威布尔分布分析研究接触式微机电系统开关的直流热开关寿命
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439563
Yulong Zhang, Jianwen Sun, Huiliang Liu, Jia Wei, Zewen Liu
{"title":"DC Hot Switching Lifetime Study for Contact MEMS Switch by Weibull Distribution Analysis","authors":"Yulong Zhang, Jianwen Sun, Huiliang Liu, Jia Wei, Zewen Liu","doi":"10.1109/MEMS58180.2024.10439563","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439563","url":null,"abstract":"DC hot switching lifetime for Au-Au-contact MEMS switch is studied in this work, in which the applied voltage varies from 5 to 8 V. Weibull distribution analysis is employed for lifetime data processing, and the scale parameters (λ), shape parameters (k) and 50% of population failure point (T50) are fitted and calculated. This work shows two distinctive advancements: (a) illustration of the device lifetime evolution from quasi-Exponential distribution (k≈1) to quasi-Rayleigh distribution (k≈2) to quasi-Normal distribution (k>4) according to different applied voltages; (b) mathematic relationship establishment between lifetime and DC hot switching voltage, which can be used for device lifetime prediction. These advancements above are studied and verified on basis of Au-Au-contact MEMS switch, and it is also suitable for other contact materials characteristic modeling.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"146 3","pages":"610-613"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Resoswitch Squegging Control by Compact Model-Assisted Impact Electrode Design 通过紧凑型模型辅助冲击电极设计控制 Resoswitch Squegging
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439518
Kevin H. Zheng, Qiutong Jin, Clark T.-C. Nguyen
{"title":"Resoswitch Squegging Control by Compact Model-Assisted Impact Electrode Design","authors":"Kevin H. Zheng, Qiutong Jin, Clark T.-C. Nguyen","doi":"10.1109/MEMS58180.2024.10439518","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439518","url":null,"abstract":"This paper demonstrates, via a novel compact model and experiments, that squegging in micromechanical resonant electrical switches (resoswitches) [1] is controllable via impact electrode design. The model captures the nonlinear dynamics of impact contact and predicts squegging. Unlike other numeric and finite-element (FEM)-based models, this physical parameter-based model has no convergence difficulties when simulating impact, accurately captures squegging, and runs within any circuit simulator with up to 100× simulation time improvement compared to commercial software. Matching of compact model simulations to measurements of a 1-kHz RF-powered micromechanical clock receiver [2] validate the model. Proper electrode design yields a 10× reduction in output jitter.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"87 2","pages":"1071-1074"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Two-Axis Sensing Mems Magnetometer with Monolithic Moving Parts in Orthogonal Resonance Order 具有正交共振阶次单片运动部件的双轴传感 Mems 磁力计
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439558
Yohan Jung, E. Jo, Jongbaeg Kim
{"title":"A Two-Axis Sensing Mems Magnetometer with Monolithic Moving Parts in Orthogonal Resonance Order","authors":"Yohan Jung, E. Jo, Jongbaeg Kim","doi":"10.1109/MEMS58180.2024.10439558","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439558","url":null,"abstract":"This paper reports a two-axis sensing micro-electromechanical system (MEMS) magnetometer, which features an electromagnetic inductor on an electrostatically driven eccentric resonator. Our sensor utilizes electrostatic force for driving and electromagnetic induction for sensing. This sensor offers advantages, such as eliminating self-heating and acquiring direct output of induced voltage. Also, we designed a monolithic eccentric structure that consists of an asymmetric inner mass with an outer mass, leading to two torsional resonance modes with orthogonal directions. By electrostatically driving the eccentric moving part at the resonant frequency of each mode, we achieved X-axis or Y-axis magnetic field sensing capability without complex integration in multi-sensing.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"38 1","pages":"44-47"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531493","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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