具有正交共振阶次单片运动部件的双轴传感 Mems 磁力计

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI:10.1109/MEMS58180.2024.10439558

Yohan Jung, E. Jo, Jongbaeg Kim

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引用次数: 0

摘要

本文报告了一种双轴传感微机电系统（MEMS）磁力计，其特点是在静电驱动的偏心谐振器上安装了一个电磁感应器。我们的传感器利用静电力进行驱动，利用电磁感应进行感应。这种传感器具有消除自热和直接输出感应电压等优点。此外，我们还设计了一种整体偏心结构，它由一个不对称的内质量和一个外质量组成，从而产生了两个方向正交的扭转共振模式。通过在每个模式的共振频率上静电驱动偏心运动部件，我们实现了 X 轴或 Y 轴磁场传感能力，而无需复杂的多传感集成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Two-Axis Sensing Mems Magnetometer with Monolithic Moving Parts in Orthogonal Resonance Order

This paper reports a two-axis sensing micro-electromechanical system (MEMS) magnetometer, which features an electromagnetic inductor on an electrostatically driven eccentric resonator. Our sensor utilizes electrostatic force for driving and electromagnetic induction for sensing. This sensor offers advantages, such as eliminating self-heating and acquiring direct output of induced voltage. Also, we designed a monolithic eccentric structure that consists of an asymmetric inner mass with an outer mass, leading to two torsional resonance modes with orthogonal directions. By electrostatically driving the eccentric moving part at the resonant frequency of each mode, we achieved X-axis or Y-axis magnetic field sensing capability without complex integration in multi-sensing.

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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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