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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Enhancing Sensitivity of Mode-Localized Accelerometers Using Asymmetrical Coupled Resonators 利用非对称耦合谐振器提高模式定位加速度计的灵敏度
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439575
Zheng Wang, Xingyin Xiong, Kunfeng Wang, Wuhao Yang, Xiaorui Bie, Zhitian Li, Xudong Zou
{"title":"Enhancing Sensitivity of Mode-Localized Accelerometers Using Asymmetrical Coupled Resonators","authors":"Zheng Wang, Xingyin Xiong, Kunfeng Wang, Wuhao Yang, Xiaorui Bie, Zhitian Li, Xudong Zou","doi":"10.1109/MEMS58180.2024.10439575","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439575","url":null,"abstract":"This paper presents a DETF (larger effective mass) and a clamped-clamped (C-C) beam (smaller effective mass) as the asymmetric coupled resonators rather than identical ones to improve sensitivity without weakening the coupling stiffness. Taking the ratio of the vibration amplitude (AR) of the resonator with a smaller effective mass to the resonator with a larger effective mass as the output, the sensitivity of the mode-localized accelerometer can be approximately improved to the ratio of the effective masses of the two resonators compared to symmetrically coupled resonators. The sensitivity of the mode-localized accelerometer enhanced about two times as the FEM simulation and experiments demonstrated, which also agrees with the analytic model we proposed. This method can also be used in other types of mode-localized sensors.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"133 2","pages":"907-910"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Highly Integrated and Low-Power SNO2 Gas Sensor Cell for the Detection of Gas Mixture 用于检测混合气体的高度集成、低功耗 SNO2 气体传感器单元
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439504
Chong Xing, Dongcheng Xie, Yan Zhang, Di He, Yujie Yang, Liang Geng, Qiuju Wu, Dongting Yao, Dongliang Chen, Lei Xu
{"title":"A Highly Integrated and Low-Power SNO2 Gas Sensor Cell for the Detection of Gas Mixture","authors":"Chong Xing, Dongcheng Xie, Yan Zhang, Di He, Yujie Yang, Liang Geng, Qiuju Wu, Dongting Yao, Dongliang Chen, Lei Xu","doi":"10.1109/MEMS58180.2024.10439504","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439504","url":null,"abstract":"This study reports a highly integrated and low-power temperature-modulated gas sensor cell aimed at detecting mixed gases. This design of six channels with a shared common grounded terminal ensures independent detection capability for each channel while reducing the usage of electrode pads, thereby enhancing device integration. Additionally, the six channels share a single heater but operate at different heating temperatures, enabling certain gas recognition capabilities. By investigating the response of the sensor cell to three food-related gases introduced in different sequences, this preliminary research has laid the foundation for modeling the response of the sensor cell to mixed gases. The developed model achieved a matching accuracy of 94.8% between its predicted results and the actual response, suggesting its potential for reliable gas mixture detection.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"84 3","pages":"883-886"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531445","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Implantable Electrode Based on Pre-Stretched Silk Film for in Vivo Application 基于预拉伸蚕丝膜的植入式电极在体内的应用
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439580
Ziyi Zhu, Zhiwen Yan, Huiran Yang, Xueying Wang, Siyuan Ni, Dujuan Zou, Wanqi Jiang, Chen Tao, Jianbo Jiang, Zhitao Zhou, Liuyang Sun, Keyin Liu, T. Tao, Xiaoling Wei
{"title":"Implantable Electrode Based on Pre-Stretched Silk Film for in Vivo Application","authors":"Ziyi Zhu, Zhiwen Yan, Huiran Yang, Xueying Wang, Siyuan Ni, Dujuan Zou, Wanqi Jiang, Chen Tao, Jianbo Jiang, Zhitao Zhou, Liuyang Sun, Keyin Liu, T. Tao, Xiaoling Wei","doi":"10.1109/MEMS58180.2024.10439580","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439580","url":null,"abstract":"We present a chronically implantable and bio-compatible electrode, engineered from an oriented crystallization silk film. The silk film, derived from a pre-stretching process, is characterized by its resistance to swelling upon water exposure. Leveraging MEMS technology, we crafted a metallic conductive structure on the surface of the silk protein film, thus creating a versatile bioelectrode. This oriented crystalliztion versatile electrode has been successfully applied for neuro recording in rat's sciatic nerve under various electrical stimulations. Notably, our bioelectrode exhibits a range of advantageous properties, including durability for long-term usage, implantability, flexibility, exceptional bio-compatibility, and degradability.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"57 3","pages":"396-399"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531460","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Flexible Neural Electrode Array with Vertically Aligned Carbon Nanotubes Microstructure for High Sensitivity Measurement of Neurochemicals 具有垂直排列碳纳米管微结构的柔性神经电极阵列用于高灵敏度神经化学物质测量
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439368
Hyunjun Han, Sorim Han, Sangjun Sim, Il-Joo Cho, Jongbaeg Kim
{"title":"Flexible Neural Electrode Array with Vertically Aligned Carbon Nanotubes Microstructure for High Sensitivity Measurement of Neurochemicals","authors":"Hyunjun Han, Sorim Han, Sangjun Sim, Il-Joo Cho, Jongbaeg Kim","doi":"10.1109/MEMS58180.2024.10439368","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439368","url":null,"abstract":"This paper reports a flexible microelectrode array based on microstructures with vertically aligned carbon nanotubes (VACNTs) and presents the monitoring of neurochemical signals. VACNTs have high electrical conductivity and chemical stability along with their high-density structure. The unique pyramid-shaped microstructure with VACNTs is implemented into the electrode. The 32-channel microelectrode is fabricated through microfabrication, enabling batch process. VACNT dramatically lowered the impedance of the electrode to 17.6 kΩ, which is 93% lower than the impedance of a Pt electrode. The VACNT electrode also achieved a high charge storage capacity (CSC) of over 1000 mC∙cm-2, which allows for high-sensitivity measurement of neurochemicals. The electrode shows high sensitivity of sensing hydrogen peroxide (H2O2) and glucose with sensitivity over 200 times higher than the Pt electrode, validating the capability of neurochemical monitoring. In conclusion, we have demonstrated the superior performance of our VACNT-based flexible microelectrode array, showcasing its potential for diverse applications in studying brain functionalities and etiologies of neurochemical-associated brain disorders.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"50 3","pages":"406-409"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability Assessment of an Ultrathin Dielectric Transduced Micromechanical Resonator 超薄介质传导微机械谐振器的可靠性评估
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439342
Satish K Verma, Pawan Kumar, Bhaskar Mitra
{"title":"Reliability Assessment of an Ultrathin Dielectric Transduced Micromechanical Resonator","authors":"Satish K Verma, Pawan Kumar, Bhaskar Mitra","doi":"10.1109/MEMS58180.2024.10439342","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439342","url":null,"abstract":"This paper presents breakdown and reliability study in an ultrathin dielectric transduced micromechanical device. A metal-insulator-metal (100nm:12.7nm:400nm) ring shaped structure is fabricated. The device geometry can be used as a flexural resonator as well as a switch or an actuator. The fabricated device has a mode frequency of 15.85MHz and quality factor of 4054 in air, and a deflection of 171nm at 3.3V dc bias without experiencing pull-in. The device has a stability for 10594sec at a continuous 5V dc bias, followed by degradation and eventual breakdown at 16646sec. Experimental results show that the device endured over 26,600sec before breaking down for continuous bipolar bias of +/-5V pulse voltage with a frequency of 2Hz, serving as a performance benchmark.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"49 3","pages":"1106-1109"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimising Quantum Sensor Components 优化量子传感器组件
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439317
Magnus Benke, Jixing Zhang, Michael Kübler, Jens Anders, Joerg Wrachtrup
{"title":"Optimising Quantum Sensor Components","authors":"Magnus Benke, Jixing Zhang, Michael Kübler, Jens Anders, Joerg Wrachtrup","doi":"10.1109/MEMS58180.2024.10439317","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439317","url":null,"abstract":"Quantum technology is a new technological paradigm. Specifically, quantum sensing promises to revolutionize important technologic parameters, like sensitivity or specificity. It’s every day applicability is significantly hampered by technical obstacles such as the need for exotic operation conditions or the use of hard to integrate materials for sensing function. Hence, there is a pressing need for the invention of practical sensor systems as well as their integration into a useable periphery. This goal can be achieved by using dopants in wide band gap semiconductors which allow for room temperature operation and do have the potential to interface with common control environments. The present paper exemplifies the development process for a magnetic field quantum sensor based on dopants in diamond.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"220 1","pages":"273-275"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Nanoforest-Based Humidity Sensor for Silent Speech Detection and Recognition 用于无声语音检测和识别的基于纳米森林的湿度传感器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439493
Fengyu Liu, Guidong Chen, Yizhi Shi, Meng Shi, Na Zhou, Chengjun Huang, Haiyang Mao
{"title":"A Nanoforest-Based Humidity Sensor for Silent Speech Detection and Recognition","authors":"Fengyu Liu, Guidong Chen, Yizhi Shi, Meng Shi, Na Zhou, Chengjun Huang, Haiyang Mao","doi":"10.1109/MEMS58180.2024.10439493","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439493","url":null,"abstract":"In this work, a humidity sensor capable of speech detection and recognition is proposed. In such a sensor, nanoforests with superhydrophilicity are integrated as the humidity sensitive material using a simple process compatible with conventional micromachining. Due to the chemisorption-physisorption of water molecules, and the capillary condensation of water molecules within the nanopores, sensitivity of the nanoforest-based humidity sensor can reach as large as 0.15%/%RH, while the response/recovery time for speech detection can be speeded up to 1.1/0.9 s. Such a humidity sensor is expected to help people with vocal cord injuries regain their ability to speak, besides, it is expected to be used for communication in special situations, and to assist in voiceprint anti-counterfeiting and recognition.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"22 6-8","pages":"117-120"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531336","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing 通过交流电低温退火提升 CMOS-MEMS 复合谐振器的 Q 值
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439520
A. Zope, K. Bhosale, Sheng-Shian Li
{"title":"Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing","authors":"A. Zope, K. Bhosale, Sheng-Shian Li","doi":"10.1109/MEMS58180.2024.10439520","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439520","url":null,"abstract":"In this work a CMOS-MEMS balanced drive and sense thermal-piezoresistive resonator’s (CMOS-MEMS TPR) quality factor (Q) is doubled by ac drive annealing at low temperature (< 250°C), which overcomes reliability failure associated with high-current density DC annealing in CMOS. The design exploits the routing flexibility in CMOS to optimize the placement of high-loss metals for efficient transduction and reduced annealing current. The system can be easily implemented as a part of existing oscillator circuits without an additional cost in standard CMOS. Commercial components were used to realize an oscillator and characterize its phase noise (-107 dBc/Hz at 1 kHz offset) and Allan Deviation (75 ppm).","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"111 4","pages":"561-564"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors 集成了基于热对流的镜面位置传感器的电热微镜阵列
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439487
Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang, Huikai Xie
{"title":"An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors","authors":"Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang, Huikai Xie","doi":"10.1109/MEMS58180.2024.10439487","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439487","url":null,"abstract":"A novel electrothermal micromirror array integrated with thermal convection-based mirror position sensors is proposed, in which a heater is integrated on the mirror plate to generate a temperature distribution that will be changed by the movement of the mirror plate. The temperature change is then picked up by the thermistors integrated on the substrate. Both the displacement and the tip-tilt angle can be detected. A 3×3 micromirror array has been successfully fabricated. Experiments show an average sensitivity value of 8.6 mV/μm in the displacement range of 50 μm to 150 μm, and an average sensitivity of 95.5 mV/° in the angular scan range of 2° to 10°.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"98 3","pages":"170-173"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531076","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfabricated Bubble-in-Bubble Alkali Vapor Cell for 3-D Atomic Sensors 用于三维原子传感器的微加工泡中泡碱蒸气电池
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439461
Wenqi Li, Jintang Shang
{"title":"Microfabricated Bubble-in-Bubble Alkali Vapor Cell for 3-D Atomic Sensors","authors":"Wenqi Li, Jintang Shang","doi":"10.1109/MEMS58180.2024.10439461","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439461","url":null,"abstract":"This paper reports, for the first time, a novel microfabricated bubble-in-bubble alkali vapor cell. The wafer-level bubble-in-bubble structure is capable of simultaneous thermoforming within a foaming process, followed by approximate gas pressure filling between the two bubbles, which could eliminate the direct contact between the internal bubble and the external environment. The bubble-in-bubble structure will effectively reduce the leakage of the 3-D alkali vapor cell and improve thermal stability by maintaining different gas pressure in the outer bubble. A finite element model (FEM) is presented to simulate the fabrication process and various sizes (inner bubble height of 2.7 mm and outer bubble heights of 3.2 mm, 4.3 mm, and 5.2 mm) of bubble-in-bubble structures are demonstrated by experimental at a wafer level. The bubble-in-bubble vapor cells are potentially useful for highly reliable 3-D atomic sensors.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"86 1","pages":"573-576"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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