超薄介质传导微机械谐振器的可靠性评估

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI:10.1109/MEMS58180.2024.10439342

Satish K Verma, Pawan Kumar, Bhaskar Mitra

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引用次数: 0

摘要

本文介绍了超薄介质传导微机械装置的击穿和可靠性研究。本文制作了一个金属-绝缘体-金属（100nm:12.7nm:400nm）环形结构。该器件的几何形状既可用作挠性谐振器，也可用作开关或致动器。所制作的器件在空气中的模式频率为 15.85MHz，品质因数为 4054，在 3.3V 直流偏压下偏转 171nm，不会出现拉入现象。在连续 5V 直流偏压下，该器件在 10594 秒内保持稳定，16646 秒后出现衰减并最终击穿。实验结果表明，在+/-5V 脉冲电压、频率为 2Hz 的连续双极偏压条件下，作为性能基准，该器件承受了超过 26,600 秒的时间才发生击穿。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Reliability Assessment of an Ultrathin Dielectric Transduced Micromechanical Resonator

This paper presents breakdown and reliability study in an ultrathin dielectric transduced micromechanical device. A metal-insulator-metal (100nm:12.7nm:400nm) ring shaped structure is fabricated. The device geometry can be used as a flexural resonator as well as a switch or an actuator. The fabricated device has a mode frequency of 15.85MHz and quality factor of 4054 in air, and a deflection of 171nm at 3.3V dc bias without experiencing pull-in. The device has a stability for 10594sec at a continuous 5V dc bias, followed by degradation and eventual breakdown at 16646sec. Experimental results show that the device endured over 26,600sec before breaking down for continuous bipolar bias of +/-5V pulse voltage with a frequency of 2Hz, serving as a performance benchmark.

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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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