集成了基于热对流的镜面位置传感器的电热微镜阵列

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI:10.1109/MEMS58180.2024.10439487

Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang, Huikai Xie

{"title":"集成了基于热对流的镜面位置传感器的电热微镜阵列","authors":"Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang, Huikai Xie","doi":"10.1109/MEMS58180.2024.10439487","DOIUrl":null,"url":null,"abstract":"A novel electrothermal micromirror array integrated with thermal convection-based mirror position sensors is proposed, in which a heater is integrated on the mirror plate to generate a temperature distribution that will be changed by the movement of the mirror plate. The temperature change is then picked up by the thermistors integrated on the substrate. Both the displacement and the tip-tilt angle can be detected. A 3×3 micromirror array has been successfully fabricated. Experiments show an average sensitivity value of 8.6 mV/μm in the displacement range of 50 μm to 150 μm, and an average sensitivity of 95.5 mV/° in the angular scan range of 2° to 10°.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"98 3","pages":"170-173"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors\",\"authors\":\"Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang, Huikai Xie\",\"doi\":\"10.1109/MEMS58180.2024.10439487\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel electrothermal micromirror array integrated with thermal convection-based mirror position sensors is proposed, in which a heater is integrated on the mirror plate to generate a temperature distribution that will be changed by the movement of the mirror plate. The temperature change is then picked up by the thermistors integrated on the substrate. Both the displacement and the tip-tilt angle can be detected. A 3×3 micromirror array has been successfully fabricated. Experiments show an average sensitivity value of 8.6 mV/μm in the displacement range of 50 μm to 150 μm, and an average sensitivity of 95.5 mV/° in the angular scan range of 2° to 10°.\",\"PeriodicalId\":518439,\"journal\":{\"name\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"98 3\",\"pages\":\"170-173\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS58180.2024.10439487\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439487","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

我们提出了一种集成了基于热对流的镜面位置传感器的新型电热微镜阵列，其中在镜板上集成了一个加热器，以产生随镜板移动而变化的温度分布。然后，集成在基板上的热敏电阻接收温度变化。位移和镜尖倾斜角度都能被检测到。一个 3×3 的微镜阵列已经制作成功。实验表明，在 50 μm 至 150 μm 的位移范围内，平均灵敏度为 8.6 mV/μm；在 2° 至 10° 的角度扫描范围内，平均灵敏度为 95.5 mV/°。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors

A novel electrothermal micromirror array integrated with thermal convection-based mirror position sensors is proposed, in which a heater is integrated on the mirror plate to generate a temperature distribution that will be changed by the movement of the mirror plate. The temperature change is then picked up by the thermistors integrated on the substrate. Both the displacement and the tip-tilt angle can be detected. A 3×3 micromirror array has been successfully fabricated. Experiments show an average sensitivity value of 8.6 mV/μm in the displacement range of 50 μm to 150 μm, and an average sensitivity of 95.5 mV/° in the angular scan range of 2° to 10°.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量