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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot 基于微小光点共振量热计的微型光点位置检测器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439469
Aojie Quan, Chen Wang, Hemin Zhang, Yangyang Guan, Chengxin Li, Chenxi Wang, Michael Kraft
{"title":"A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot","authors":"Aojie Quan, Chen Wang, Hemin Zhang, Yangyang Guan, Chengxin Li, Chenxi Wang, Michael Kraft","doi":"10.1109/MEMS58180.2024.10439469","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439469","url":null,"abstract":"In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device’s sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 ${text{nm}}/sqrt {{text{Hz}}}$, within a 95 dB dynamic range.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"72 1","pages":"987-990"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integrated Papertronics for a Sustainable Future 实现可持续未来的集成纸电技术
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439570
Zahra Rafiee, Anwar Elhadad, Seokheun Choi
{"title":"Integrated Papertronics for a Sustainable Future","authors":"Zahra Rafiee, Anwar Elhadad, Seokheun Choi","doi":"10.1109/MEMS58180.2024.10439570","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439570","url":null,"abstract":"The escalating issue of electronic waste, exacerbated by frequent updates in consumer technology, presents a critical environmental challenge. Conventional electronics, particularly disposable devices, are often not sustainable. Paper-based alternatives, with their favorable mechanical and dielectric properties, offer a sustainable solution. Prior attempts at integrating paper with standard electronic components have fallen short in terms of recyclability and practical deployment. This study introduces an innovative approach for fabricating fundamental electronic components—resistors, capacitors, and transistors— directly onto paper substrates. Employing techniques such as hydrophobic wax patterning, precision ink deposition, and screen-printing, we have successfully created versatile, fully paper-based electronic components. This breakthrough facilitates the development of wholly paper-integrated circuits, representing a leap forward in environmentally sustainable electronics.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"67 1","pages":"600-603"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sonic Fourier Transform Imaging Using GHz Ultrasonic Transducer Array 利用 GHz 超声波换能器阵列进行声波傅立叶变换成像
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439581
Juneho Hwang, J. Kuo, Anuj Baskota, Amit Lal
{"title":"Sonic Fourier Transform Imaging Using GHz Ultrasonic Transducer Array","authors":"Juneho Hwang, J. Kuo, Anuj Baskota, Amit Lal","doi":"10.1109/MEMS58180.2024.10439581","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439581","url":null,"abstract":"The Fourier transform is one of the most widely used mathematical tools for numerical solutions and understanding signals and images. In the digital domain, the 2D fast Fourier transform (FFT), which has a computational complexity of O(N2logN2), is often used. The compute time can be a bottleneck for many real-time edge applications that require Fourier computation at high frame rates. A solution is to use an ultrasonic hardware accelerator that can compute Fourier transform and convolution at a drastically higher speed and lower power, achieving O(N) complexity [1] – [5]. Presented in this work is the first experimental demonstration of the Sonic Fourier Transform (SonicFT) measurement using a piezoelectric MEMS framework. AlN transducers were used as transmitters to simulate different images being input into an ultrasonic hardware accelerator. The transmitted ultrasonic wavefronts were imaged electronically, using a GHz ultrasonic imager operating at 1.85 GHz, consisting of a 130nm CMOS-integrated 128 by 128 array of 50x50μm AlN transducers. The images obtained are consistent with the expected Fourier transforms, demonstrating an ultracompact Fourier transform capability.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"192 2","pages":"128-131"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mixing, Trapping, and Ejection of Single Microparticle with Size and Material Selectivity Using Acoustic Tweezers 利用声镊对具有尺寸和材料选择性的单个微粒进行混合、捕获和弹射
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439339
Baptiste Neff, Akash Roy, Kianoush Sadeghian Esfahani, Eun S. Kim
{"title":"Mixing, Trapping, and Ejection of Single Microparticle with Size and Material Selectivity Using Acoustic Tweezers","authors":"Baptiste Neff, Akash Roy, Kianoush Sadeghian Esfahani, Eun S. Kim","doi":"10.1109/MEMS58180.2024.10439339","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439339","url":null,"abstract":"This paper presents the mixing, trapping, and ejection of a single microparticle based on an acoustic tweezers. Finite Element Model (FEM) simulation, along with analytical modeling, is used to study the selectivity of particles based on size and material properties. The acoustic tweezers is optimized to have a single trapping zone, where particles are trapped due to acoustic radiation force (which is calculated for particle sizes exceeding the Rayleigh approximation). The tweezers is experimentally shown to lift microparticles from the tweezers surface, selectively trap a single particle based on size and material acoustic properties, and then eject it upwards for collection. All these are obtained with negligible heat generation.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"164 1","pages":"340-343"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays 聚甲基丙烯酸甲酯 (PMMA) 热解辅助二维材料转移，用于大规模二硫化钼镎谐振器阵列
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439327
Zuheng Liu, Jianyong Wei, Pengcheng Zhang, Yueyang Jia, Ying Chen, Hao Jia, Zenghui Wang, Rui Yang
{"title":"Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays","authors":"Zuheng Liu, Jianyong Wei, Pengcheng Zhang, Yueyang Jia, Ying Chen, Hao Jia, Zenghui Wang, Rui Yang","doi":"10.1109/MEMS58180.2024.10439327","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439327","url":null,"abstract":"We develop a novel fabrication technique for large-scale two-dimensional (2D) molybdenum disulfide (MoS2) nanoelectromechanical resonator arrays, based on polymethyl methacrylate (PMMA) pyrolysis. During the transfer process, centimeter-scale monolayer MoS2 film grown by chemical vapor deposition (CVD) is covered with PMMA film by spin coating, delaminated from the growth substrate in water, and then transferred onto the pre-patterned substrate with surface microtrenches and contact electrodes. The PMMA is then removed by pyrolysis, or thermal decomposition in a furnace in vacuum, leaving behind the suspended array of resonant MoS2 nanoelectromechanical systems (NEMS). We then experimentally demonstrate a consistent upward frequency tuning up to 160% and downward quality (Q) factor shift as DC gate voltage (VGS) increases. The measured resonance frequencies and Q factors among different devices show smaller variations compared with previous reports. The new transfer technique enables consistent and high-quality 2D NEMS resonator arrays, and paves the way towards scalable and low-cost production of 2D NEMS resonators for on-chip sensing, radio-frequency (RF) signal processing, and computing.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"158 2","pages":"677-680"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531058","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Over-1 GHz Bandwidth Filter Based on Y-128° Cut Lithium Niobate on Amorphous Silicon 基于非晶硅上 Y-128° 切割铌酸锂的 1 GHz 以上带宽滤波器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439472
Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang
{"title":"Over-1 GHz Bandwidth Filter Based on Y-128° Cut Lithium Niobate on Amorphous Silicon","authors":"Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang","doi":"10.1109/MEMS58180.2024.10439472","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439472","url":null,"abstract":"This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128° cut lithium niobate thin film to maximize the electromechanical coupling $left( {k_{text{t}}^2 = 48% } right)$. Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"124 1","pages":"36-39"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultra-Wide Range Frequency Tuning of Piezoelectric Micromachined Ultrasonic Transducers via DC Bias Voltage 通过直流偏置电压实现压电微机械超声波传感器的超宽范围频率调谐
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439566
Yufeng Gao, Lei Zhao, Chong Yang, Yipeng Lu
{"title":"Ultra-Wide Range Frequency Tuning of Piezoelectric Micromachined Ultrasonic Transducers via DC Bias Voltage","authors":"Yufeng Gao, Lei Zhao, Chong Yang, Yipeng Lu","doi":"10.1109/MEMS58180.2024.10439566","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439566","url":null,"abstract":"Piezoelectric micromachined ultrasonic transducers (PMUTs) based applications such as frequency-paired ultrasonic flowmeters have demanding requirements for frequency-matching. In this paper, we present PMUTs with ultra-wide range frequency tuning via in-plane stress generated due to DC bias voltage. An air-coupled PMUT generates 124kHz frequency shift from 188kHz to 312kHz, corresponding to 54.4% variation (referring to the resonant frequency without bias) with ±10V DC bias, and 223kHz frequency shift from 182.5kHz to 405.5kHz, corresponding to 97.8% variation with ±35V DC bias. Given reasonably good electromechanical coupling coefficient ($k_t^2$) > 5%, 188.5kHz to 254kHz frequency tuning with 1~6V DC bias was demonstrated. Furthermore, characteristics of PMUTs with different top electrode thicknesses and working frequencies under various DC bias were studied and summarized, which demonstrates that thinner top electrodes and lower working frequencies enhance tuned frequency range.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"102 2","pages":"935-938"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wearable Stethoscope Based On Resonant Microphone Array With Wireless Data Transfer 基于共振麦克风阵列和无线数据传输的可穿戴听诊器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439347
Anik Sengupta, Akash Roy, Hongxiang Gao, M. Barekatain, Hai Liu, Eun S. Kim
{"title":"Wearable Stethoscope Based On Resonant Microphone Array With Wireless Data Transfer","authors":"Anik Sengupta, Akash Roy, Hongxiang Gao, M. Barekatain, Hai Liu, Eun S. Kim","doi":"10.1109/MEMS58180.2024.10439347","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439347","url":null,"abstract":"RMA is built on a silicon-on-insulator (SOI) wafer using a shared window for fitting two width-stepped cantilevers in one window to reduce pressure leakage through the air gaps around the cantilever edges. Four resonant microphones are used in the array to cover the entire frequency range. The highest unamplified sensitivity in the array is measured to be 94.4 mV/Pa at 330 Hz, which is more than 4 times that of any commercially available condenser microphone. Experimental results show more prominent wheezing signatures in the spectrogram of the signals obtained with RMA compared to those with a reference microphone. A folded printed circuit board (PCB) houses ultra-low-power op Amps, filters, a commercial wireless chipset (CYBLE-416045-02) with a built-in antenna for Bluetooth communication, and a battery. Data transfer is obtained through Bluetooth low-energy (BLE) communication from the wireless chipset to a mobile phone. The wearable and wireless stethoscope (including the RMA, electronics, and battery) weighs 33.2 g, and can continuously pick up sounds with the RMA and send the data through BLE for several hours.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"98 2","pages":"101-104"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531077","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Novel Miniaturized bi-Stable Self-Sensing Soft Actuator Based on CNT-Dispersed ionogel 基于碳纳米管分散离子凝胶的新型微型双稳态自感软致动器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439367
Li-Yu Lo, Pei-Ting Lin, Chia-Yu Cho, Hsiang-Yun Wang, Yao-Joe Yang
{"title":"A Novel Miniaturized bi-Stable Self-Sensing Soft Actuator Based on CNT-Dispersed ionogel","authors":"Li-Yu Lo, Pei-Ting Lin, Chia-Yu Cho, Hsiang-Yun Wang, Yao-Joe Yang","doi":"10.1109/MEMS58180.2024.10439367","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439367","url":null,"abstract":"This work reports a first-ever soft actuator with self-sensing and bi-stable capabilities by utilizing shape memory effect of ionogel. A bi-stable gripper implemented by assembling two of the proposed actuators is also demonstrated and characterized. The device consists of a carbon nanotube (CNT) dispersed ionogel finger, a thermo-responsive liquid-crystal elastomer (LCE) cantilever, and a micromachined heater layer. The LCE cantilever functions as an actuating material for deforming the ionogel finger. The heater layer is used to heat up the LCE for inducing its deformation. The ionogel finger, which functions as a self-sensing material in a sensor-less fashion, possesses structural bi-stability with large forces and deformations. Characterization of the actuators was presented. It was also demonstrated (by video) that a soft bi-stable self-sensing gripper, which consists of two proposed bi-stable actuators, is capable of grasping heavy metal objects, and stably holds the objects without consuming any power due to its bi-stability.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"68 1","pages":"622-625"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Extremely Low Frequency Flexible-Magnet Based Mechanical Antenna 基于柔性磁体的极低频机械天线
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439521
Qingang Li, Weijie Mo, Chen Wang, Zhi Cui, Yong Cui, Xining Zang
{"title":"Extremely Low Frequency Flexible-Magnet Based Mechanical Antenna","authors":"Qingang Li, Weijie Mo, Chen Wang, Zhi Cui, Yong Cui, Xining Zang","doi":"10.1109/MEMS58180.2024.10439521","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439521","url":null,"abstract":"In this work, a flexible extremely low frequency mechanical antenna (ELFME) is fabricated by printing domain-editable magnets on macro-fiber-composite (MFC). When compared to existing magneto-electric composite antennas of similar volumes, our antenna exhibits an 18-fold increase in electromagnetic field emission intensity. Through an array design, we can further amplify the electromagnetic wave intensity. Moreover, this MFC driven, 3D printable design is ideal for making reconfigurable antenna that can be applied in complex-shaped mechanisms for geometrical reconfiguration and beam steering.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"41 1","pages":"995-998"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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