Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang
{"title":"Over-1 GHz Bandwidth Filter Based on Y-128° Cut Lithium Niobate on Amorphous Silicon","authors":"Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang","doi":"10.1109/MEMS58180.2024.10439472","DOIUrl":null,"url":null,"abstract":"This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128° cut lithium niobate thin film to maximize the electromechanical coupling $\\left( {k_{\\text{t}}^2 = 48\\% } \\right)$. Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"124 1","pages":"36-39"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439472","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128° cut lithium niobate thin film to maximize the electromechanical coupling $\left( {k_{\text{t}}^2 = 48\% } \right)$. Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.