Over-1 GHz Bandwidth Filter Based on Y-128° Cut Lithium Niobate on Amorphous Silicon

Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang
{"title":"Over-1 GHz Bandwidth Filter Based on Y-128° Cut Lithium Niobate on Amorphous Silicon","authors":"Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang","doi":"10.1109/MEMS58180.2024.10439472","DOIUrl":null,"url":null,"abstract":"This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128° cut lithium niobate thin film to maximize the electromechanical coupling $\\left( {k_{\\text{t}}^2 = 48\\% } \\right)$. Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"124 1","pages":"36-39"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439472","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128° cut lithium niobate thin film to maximize the electromechanical coupling $\left( {k_{\text{t}}^2 = 48\% } \right)$. Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.
基于非晶硅上 Y-128° 切割铌酸锂的 1 GHz 以上带宽滤波器
本文报告了 6.2 GHz 声学滤波器的演示,该滤波器具有超过 1 GHz 的带宽、30 dB 的带外抑制和尖锐的滚降。演示的滤波器在 Y-128° 切割的铌酸锂薄膜中采用了一阶不对称 (A1) λ 波,以最大限度地提高机电耦合 $\left( {k_{\text{t}}^2 = 48\% } \right)$。非晶矽被用来减少寄生导体效应和馈通,以提高滤波器的带外抑制能力。超宽通带证明了铌酸锂薄膜在 WIFI 7 和 6G 应用中的巨大潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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