基于非晶硅上 Y-128° 切割铌酸锂的 1 GHz 以上带宽滤波器

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI:10.1109/MEMS58180.2024.10439472

Junyan Zheng, Jiashuai Xu, Fangsheng Qian, Yansong Yang

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引用次数: 0

摘要

本文报告了 6.2 GHz 声学滤波器的演示，该滤波器具有超过 1 GHz 的带宽、30 dB 的带外抑制和尖锐的滚降。演示的滤波器在 Y-128° 切割的铌酸锂薄膜中采用了一阶不对称 (A1) λ 波，以最大限度地提高机电耦合 $\left( {k_{\text{t}}^2 = 48\% } \right)$。非晶矽被用来减少寄生导体效应和馈通，以提高滤波器的带外抑制能力。超宽通带证明了铌酸锂薄膜在 WIFI 7 和 6G 应用中的巨大潜力。

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Over-1 GHz Bandwidth Filter Based on Y-128° Cut Lithium Niobate on Amorphous Silicon

This paper reports on the demonstration of a 6.2 GHz acoustic filter with an over-1 GHz bandwidth, a 30 dB out-of-band rejection, and a sharp roll-off. The demonstrated filter employs the first-order antisymmetric (A1) lamb wave in Y-128° cut lithium niobate thin film to maximize the electromechanical coupling $\left( {k_{\text{t}}^2 = 48\% } \right)$. Amorphous Si is utilized to decrease the parasitic conductor effect and feedthrough for better out-of-band rejection of the filter. The ultrawide passband proves the promising potential of lithium niobate thin films in WIFI 7 and 6G applications.

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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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