Ultra-Wide Range Frequency Tuning of Piezoelectric Micromachined Ultrasonic Transducers via DC Bias Voltage

Yufeng Gao, Lei Zhao, Chong Yang, Yipeng Lu
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Abstract

Piezoelectric micromachined ultrasonic transducers (PMUTs) based applications such as frequency-paired ultrasonic flowmeters have demanding requirements for frequency-matching. In this paper, we present PMUTs with ultra-wide range frequency tuning via in-plane stress generated due to DC bias voltage. An air-coupled PMUT generates 124kHz frequency shift from 188kHz to 312kHz, corresponding to 54.4% variation (referring to the resonant frequency without bias) with ±10V DC bias, and 223kHz frequency shift from 182.5kHz to 405.5kHz, corresponding to 97.8% variation with ±35V DC bias. Given reasonably good electromechanical coupling coefficient ($k_t^2$) > 5%, 188.5kHz to 254kHz frequency tuning with 1~6V DC bias was demonstrated. Furthermore, characteristics of PMUTs with different top electrode thicknesses and working frequencies under various DC bias were studied and summarized, which demonstrates that thinner top electrodes and lower working frequencies enhance tuned frequency range.
通过直流偏置电压实现压电微机械超声波传感器的超宽范围频率调谐
基于压电微机械超声换能器(PMUT)的应用(如频率配对式超声流量计)对频率匹配有着苛刻的要求。本文介绍了通过直流偏置电压产生的面内应力实现超宽范围频率调谐的 PMUT。在 ±10V 直流偏压下,空气耦合 PMUT 在 188kHz 至 312kHz 之间产生 124kHz 的频率偏移,相当于 54.4% 的变化(指无偏压时的谐振频率);在 ±35V 直流偏压下,PMUT 在 182.5kHz 至 405.5kHz 之间产生 223kHz 的频率偏移,相当于 97.8% 的变化。由于机电耦合系数($k_t^2$)大于 5%,在 1~6V 直流偏压下,188.5kHz 至 254kHz 的频率可调。此外,还研究并总结了不同顶电极厚度和工作频率的 PMUT 在不同直流偏压下的特性,结果表明,顶电极越薄、工作频率越低,调谐频率范围越大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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