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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Equidimensional Suspended Piezoelectric Micromachined Ultrasound Transducer Array with Various Mass Loads for High Ultrasound Sensitivity and Wide Bandwidth 具有各种质量载荷的等维悬浮压电微机械超声换能器阵列，可实现高超声灵敏度和宽带宽
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439583
Xingli Xu, Yongquan Ma, Chenyang Yu, Liang Zhang, Wei Wei, Mingchao Sun, Boyun Zhang, Menglun Zhang, Pengfei Niu, Wei Pang
{"title":"Equidimensional Suspended Piezoelectric Micromachined Ultrasound Transducer Array with Various Mass Loads for High Ultrasound Sensitivity and Wide Bandwidth","authors":"Xingli Xu, Yongquan Ma, Chenyang Yu, Liang Zhang, Wei Wei, Mingchao Sun, Boyun Zhang, Menglun Zhang, Pengfei Niu, Wei Pang","doi":"10.1109/MEMS58180.2024.10439583","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439583","url":null,"abstract":"For the first time, we develop piezoelectric micromachined ultrasound transducer (PMUT) array with the cells having suspended vibrational membranes and the array having the same-dimension cells in plane but with various mass loads for tuning their frequency range. The suspended membrane of PMUT, facilitated by four through-holes at the edge, offers distinct advantages of low constraint and high sensitivity. The resonant frequency of equidimensional suspended PMUT with the same diameter becomes adjustable through various mass loads. The suspended PMUT array containing same-dimension cells with different mass loads exhibits superior acoustic performance and broader bandwidth compared to traditional PMUT array. According to this strategy, this paper presents our PMUT array, with central frequency be in around 10MHz, has a 1.5X higher displacement and 1.8X higher bandwidth than traditional PMUT array. It promises significant advancements in PMUT-based ultrasound imaging.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"21 3","pages":"959-962"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Visualization of Vibration In MEMS Resonators Using Stroboscopic Differential Interference Contrast Microscopy with Enhanced Temporal Resolution 利用具有增强时间分辨率的频闪微分干涉对比显微镜实现微机电系统谐振器振动可视化
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439547
Qian Liu, Mirai Iimori, Chao Li, Ya Zhang
{"title":"Visualization of Vibration In MEMS Resonators Using Stroboscopic Differential Interference Contrast Microscopy with Enhanced Temporal Resolution","authors":"Qian Liu, Mirai Iimori, Chao Li, Ya Zhang","doi":"10.1109/MEMS58180.2024.10439547","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439547","url":null,"abstract":"We report a novel stroboscopic differential interference contrast (DIC) microscopy for the visualization of vibrations in MEMS devices, with a high vertical resolution at the nanometer (nm) scale, and a large vertical measurement range of ~1 um compared to state of the art. It enables the analysis of not only the linear vibrations but also the nonlinear fluctuations in the vibration conditions. The DIC microscopy measures the interference of two sheared illumination light beams reflected from the sample surface to determine the differential surface deflection, and a stroboscopic method is used to capture the fast vibration motions of the MEMS device. Furthermore, we introduce a doubly-modulated illumination method to enhance the temporal resolution of the stroboscopic method, which is promising for investigating of fast transition dynamics in MEMS resonators.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"234 3","pages":"584-587"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thin, Flexible, and Inkjet-Printed Biophotovoltaic Cell Based on Thylakoid Membrane 基于类囊体膜的薄型、柔性和喷墨打印生物光伏电池
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439307
Jeonghyeop Son, Jaehyoung Yun, Yunsung Kang, WonHyoung Ryu, Jongbaeg Kim
{"title":"Thin, Flexible, and Inkjet-Printed Biophotovoltaic Cell Based on Thylakoid Membrane","authors":"Jeonghyeop Son, Jaehyoung Yun, Yunsung Kang, WonHyoung Ryu, Jongbaeg Kim","doi":"10.1109/MEMS58180.2024.10439307","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439307","url":null,"abstract":"This paper reports a thin and flexible biophotovoltaic (BPV) cell using thylakoid membranes. This BPV cell is fabricated by inkjet printing carbon nanotubes (CNTs) and thylakoid membranes (TMs) on paper. The electrode produced by CNT inkjet printing had a low resistivity of 117.3 Ω/sq, and a large active electrochemical surface area was obtained due to the porous structure of paper substrates. Under light of 100 mW/cm2 intensity, the photocurrent and power of the manufactured BPV cell were 4.8 mA/m2 and 250 μW/m2, respectively. This power is 22 times higher than that of the existing algae-based inkjet-printed BPV cells.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"216 3","pages":"288-291"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Microfabricated Column Comprised of High-Aspect-Ratio Silicon Pillar Arrays for Micro-Gas Chromatography 用于微气相色谱法的由高宽比硅柱阵列组成的微加工色谱柱
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439537
Dong Wook Seong, Sung Kuk Bae, Jung Hwan Seo
{"title":"A Microfabricated Column Comprised of High-Aspect-Ratio Silicon Pillar Arrays for Micro-Gas Chromatography","authors":"Dong Wook Seong, Sung Kuk Bae, Jung Hwan Seo","doi":"10.1109/MEMS58180.2024.10439537","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439537","url":null,"abstract":"This study introduces the fabrication and application of a micro-pillar array using MEMS processes to improve the performance of a crucial component, the separation column, within µ-GC systems. These micro-pillars, measuring approximately 2μm in diameter and 130μm in height, were densely packed at a density of around 9000 rods/mm2 onto the separation column. The substitution of the conventional rectangular-shaped column with pillar arrays resulted in an approximate 40% increase in resolution under identical pressure and oven temperature conditions (0.969psi, 40℃). These findings mark a significant advancement in µ-GC technology, potentially enabling chip size reduction, reduced power consumption, and minimized packaging volume.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"867-870"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sweat Sensing Using a Photonic Synaptic Transistor Integrated with Electrochemical Gate 使用与电化学门集成的光子突触晶体管进行汗液感应
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439506
JaeHo Han, Jungwon Woo, Kwang-Seok Yun
{"title":"Sweat Sensing Using a Photonic Synaptic Transistor Integrated with Electrochemical Gate","authors":"JaeHo Han, Jungwon Woo, Kwang-Seok Yun","doi":"10.1109/MEMS58180.2024.10439506","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439506","url":null,"abstract":"Electrochemical sensors have been widely used for non-invasive detection of biomarkers in sweat. Recent advancements have led to the development of photoelectrochemical (PEC) sensors, offering high sensitivity and promising performance. By integrating an electrochemical gate structure with a photonic synaptic layer, we have successfully demonstrated a sweat sensor that mimics synaptic function. The interaction between the analyte and the electrochemical gate modulates the photocurrent, enabling concentration sensing. Moreover, the excitatory postsynaptic current peak value (EPSCp), measurable even with brief light irradiation, facilitates faster concentration determination compared to conventional organic electrochemical transistors (OECTs).","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 2","pages":"316-317"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Engineering 3D Hierarchical Structures with Bio-Mimetic Solid Fraction Gradient 利用仿生固体组分梯度设计三维分层结构
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439471
Qingyang Sun, Tingyi Leo Liu
{"title":"Engineering 3D Hierarchical Structures with Bio-Mimetic Solid Fraction Gradient","authors":"Qingyang Sun, Tingyi Leo Liu","doi":"10.1109/MEMS58180.2024.10439471","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439471","url":null,"abstract":"We present a versatile method to create 3-D surfaces with complex hierarchical microstructures that mimic the patterns found on springtail skin. Our method innovatively merges two fixed-spacing patterns at different scales to create patterns with varying spacing but does not require precise alignment. The key is to utilize localized stretching strain when gradually laminating a thin microstructured elastomer layer onto a wavy substrate. To demonstrate this new fabrication process, we laminated a micro-pillar thin polydimethylsiloxane (PDMS) film on a wavy PDMS substrate with millimeter-scale inverted pyramidal holes. This resulted in hierarchical surface micropillars that display varying spacings along the peaks and the valleys of the wavy substrate. To our best knowledge, this is the first report to generate controllable micro-patterns with a gradient spacing from fixed-spacing patterns. Our new process overcomes one of the major challenges in producing bio-inspired patterns with diverse variations for studies of biomimicry and biomutualism.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"658-660"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531322","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing 用于片上光机械传感的具有多模共振的 AlN 自卷绕微管谐振器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439344
Yuncong Liu, Apratim Khandelwal, Zhongjie Ren, Allen T. Wang, Xiuling Li, Philip X.-L. Feng
{"title":"AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing","authors":"Yuncong Liu, Apratim Khandelwal, Zhongjie Ren, Allen T. Wang, Xiuling Li, Philip X.-L. Feng","doi":"10.1109/MEMS58180.2024.10439344","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439344","url":null,"abstract":"This digest paper reports on the first experimental demonstration of optomechanical characteristics of three-dimensional (3D) aluminum nitride (AlN) self-rolled-up membrane (S-RuM) resonators with multimode resonances transduced via optical interferometry. For a full single-turn AlN S-RuM microtube, we have identified multimode resonances in the ~1–20MHz range with quality factors Qs ~800. For an unclosed AlN microtube with a longitudinal opening, we have observed up to 20 modes in ~0.5–110 MHz with Qs up to ~1200. Modeling of cross-sectional micro-ring cavity optomechanical coupling reveals a ~3.2kHz vacuum coupling rate and ~34fN radiation pressure force, in a 7μm-diameter, 10-turn AlN microtube. Numerical calculations suggest that the AlN microtube optomechanical resonator will yield a mass responsivity of ~3.3kHz/pg at the desired loading location. Understanding of the optomechanical properties facilitates the engineering of AlN S-RuM resonators for sensitive physical detection on chip, opening new avenues in optomechanical systems for precision sensing applications.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 3","pages":"190-193"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sequential Assembly of Lipid Molecules Broadens Designability of Lipid-Based Nanoparticles 脂质分子的顺序组装拓宽了脂质纳米颗粒的可设计性
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439443
Niko Kimura, Shinya Sakuma
{"title":"Sequential Assembly of Lipid Molecules Broadens Designability of Lipid-Based Nanoparticles","authors":"Niko Kimura, Shinya Sakuma","doi":"10.1109/MEMS58180.2024.10439443","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439443","url":null,"abstract":"We present an unprecedent concept of \"sequential assembly of lipid-based nanoparticles (LNPs)\" by designing order of liquid-liquid interfaces based on microfluidic flow control. Unlike existing methods, our method enables to broaden the controllability of the LNP size without any changes of initial abundance ratio of lipids. We utilized a microfluidic chip having multi-inlets, and the configuration allows to change the order of the self-assembly relating to the size controllability. We demonstrated visualization of cellular uptake of LNPs with different size. From the results, we confirmed that the size was a critical factor for controlled transportation of LNPs into spheroids. The presented sequential assembly opens new paradigms of detailed analyses of live-cells.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"114 2","pages":"473-476"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser-Based Fabrication Process for Piezoresistive Cantilever Using Flash Laser Annealing 基于激光的压阻悬臂制造工艺（使用闪烁激光退火技术
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439414
Rihachiro Nakashima, Tetsuo Kan, Hidetoshi Takahashi
{"title":"Laser-Based Fabrication Process for Piezoresistive Cantilever Using Flash Laser Annealing","authors":"Rihachiro Nakashima, Tetsuo Kan, Hidetoshi Takahashi","doi":"10.1109/MEMS58180.2024.10439414","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439414","url":null,"abstract":"This paper reports a simple laser-based fabrication process for a piezoresistive cantilever involving flash laser annealing. The proposed process simultaneously realized a micro cantilever structure and an n-type piezoresistive sensing element by irradiating a dopant-coated Si wafer with a pulsed fiber laser. The fabricated sensors responded linearly to strain with a gauge factor over 10, a sufficiently useful value. The proposed process could serve as a rapid prototyping in MEMS processes involving semiconductor doping.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"69 3","pages":"614-617"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Synthetic Jets Cooling Device Based on Piezoelectric ALN Mems Actuators 基于压电式 ALN Mems 执行器的合成射流冷却装置
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439584
Boyun Zhang, Mingchao Sun, Wei Pang, Chen Sun, Yi Gong, Menglun Zhang
{"title":"A Synthetic Jets Cooling Device Based on Piezoelectric ALN Mems Actuators","authors":"Boyun Zhang, Mingchao Sun, Wei Pang, Chen Sun, Yi Gong, Menglun Zhang","doi":"10.1109/MEMS58180.2024.10439584","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439584","url":null,"abstract":"This study presents a synthetic jets cooling device with silicon-based piezoelectric MEMS actuators. The device, with an area of 100mm2 and driven by 5V, can generate synthetic jets with an air velocity of 2.7 m/s and cool down a heater with a steady state temperature of 85 °C by 20 °C in 1 minute. The silicon-based MEMS solution facilitates higher accuracy, reproducibility and uniformity for better manufacturability, and paves way for reduction in size and cost. It should be noted that the piezoelectric actuators are based on aluminum nitride thin film compared with commonly used lead zirconate titanate, endowing low power consumption of 280 mW.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"259-262"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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