Laser-Based Fabrication Process for Piezoresistive Cantilever Using Flash Laser Annealing

Abstract

This paper reports a simple laser-based fabrication process for a piezoresistive cantilever involving flash laser annealing. The proposed process simultaneously realized a micro cantilever structure and an n-type piezoresistive sensing element by irradiating a dopant-coated Si wafer with a pulsed fiber laser. The fabricated sensors responded linearly to strain with a gauge factor over 10, a sufficiently useful value. The proposed process could serve as a rapid prototyping in MEMS processes involving semiconductor doping.