2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第4页

3D-Printable Self-Powered Piezoelectric Smart Stent for Wireless Endoleaks Sensing 用于无线内漏传感的 3D 可打印自供电压电智能支架

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439508

Sayemul Islam, Jun Ying Tan, Trisha Das Mou, Subhrodeep Ray, Haijun Liu, J. Kim, Albert Kim

引用次数: 0

Novel Fabrication of 4D Printed Optical Probe Array with Nanometer Aperture and Optical Spot Size Tunning 具有纳米孔径和光斑尺寸调整功能的 4D 印刷光探针阵列的新型制造方法

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439441

D. Decanini, Abdelmounaim Harouri, Ayako Mizushima, Jongho Park, Beomjoon Kim, Yoshio Mita, Gilgueng Hwang

{"title":"Novel Fabrication of 4D Printed Optical Probe Array with Nanometer Aperture and Optical Spot Size Tunning","authors":"D. Decanini, Abdelmounaim Harouri, Ayako Mizushima, Jongho Park, Beomjoon Kim, Yoshio Mita, Gilgueng Hwang","doi":"10.1109/MEMS58180.2024.10439441","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439441","url":null,"abstract":"Manufacturing an optical probe with nanometric aperture size and a tunable lens is one of the biggest challenges faced for near sub-wavelength imaging technologies. We report an arbitrary optical probe array by 4D printing with the drastically reduced nanometric aperture size. The array was fabricated by electroplating and the spot size tunning by a trapped liquid droplet. The initial structures were fabricated by two-photon 3D nanoprinting of Polydimethylsiloxane (PDMS) and metallization of nickel layer by sputtering to serve as a masking layer for guiding the transmitted light through the aperture and also to serve as a seed layer for electroplating to further reduce the aperture size down to 77 nm. Moreover, the optical probes filled with liquid droplet showed the optical spot size with light transmission could be doubled due to the lens effect from droplet. Finally untethered single optical probe was also able to be propelled by external rotating magnetic field thanks to the ferromagnetic layer which opens new applications such as biological manipulation.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"493-496"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Microwell-Patterned Microfluidic Device for Rapid Identification of High-Affinity Anti-Tumor T Cells 用于快速鉴定高亲和力抗肿瘤 T 细胞的微粒图案微流控装置

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439403

Kavya L. Singampalli, Desh Deepak Dixit, Peixin Jiang, Alexandre Reuben, Peter B. Lillehoj

引用次数: 0

An Instinctually Adaptive Lamb-Wave Filter Using Nonlinear Hafnia-Zirconia Ferroelectric Transducer 使用非线性 Hafnia-Zirconia 铁电传感器的本能自适应 Lamb 波滤波器

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439467

T. Tharpe, R. Tabrizian

{"title":"An Instinctually Adaptive Lamb-Wave Filter Using Nonlinear Hafnia-Zirconia Ferroelectric Transducer","authors":"T. Tharpe, R. Tabrizian","doi":"10.1109/MEMS58180.2024.10439467","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439467","url":null,"abstract":"Reported is the first integrated instinctually adaptive acoustic filter with frequency-selective power-limiting characteristic. The passive filter is created from electrical coupling of hafnia-zirconia (Hf0.5Zr0.5O2) Lamb-wave resonators with configurable transduction between linear and quadratic piezoelectricity. Linear resonators are cascaded to create a bandpass response over fcenter ± 0.5∆f−3dB. Nonlinear resonators with frequencies spanning over the second order super-harmonic of the filter passband (i.e., 2fcenter ± 0.5∆f−3dB) are placed in shunt to serve as frequency-selective power-limiters (FSL) for instinctual, in-band interference cancellation through electromechanical scattering. Quadratic and linear piezoelectricity are achieved through voltage-dependent poling of Hf0.5Zr0.5O2 between ferroelastic and ferroelectric regimes. Nonlinear FSL and instinctually adaptive filter prototypes are demonstrated in 50nm-thick, atomic-layered Hf0.5Zr0.5O2. The FSL concept is demonstrated at 126 MHz based on a Lamb-wave resonance mode at 256 MHz, providing frequency selective limiting of over 20dB for input powers exceeding ─10dBm. Further, an adaptive filter operating at 617 MHz provides more than 10dB of in-band isolation at three equally spaced frequencies, for 14dBm input power. The presented instinctually adaptive filter concept is poised to replace computationally demanding cognitive interference management approaches and substantially reduce the latency, size, and power consumption of jamming immune RF front ends.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"71 2","pages":"136-139"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bacterial Endospore Based Wearable Biosensors for Selective and Sensitive Glucose Monitoring 基于细菌内孢子的可穿戴生物传感器用于选择性灵敏葡萄糖监测

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439331

Yang Gao, Anwar Elhadad, Seokheun Choi

引用次数: 0

A Dispersion-Engineered YX-LN/SIO2/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression 用于增强机电耦合和瑞利模式抑制的弥散工程化 YX-LN/SIO2/Sapphire SH-SAW 谐振器

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439591

Tzu-Hsuan Hsu, Zhi-Qiang Lee, Chia-Hsien Tsai, Vakhtang Chulukhadze, Cheng-Chien Lin, Ya-Ching Yu, Ruochen Lu, Ming-Huang Li

{"title":"A Dispersion-Engineered YX-LN/SIO2/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression","authors":"Tzu-Hsuan Hsu, Zhi-Qiang Lee, Chia-Hsien Tsai, Vakhtang Chulukhadze, Cheng-Chien Lin, Ya-Ching Yu, Ruochen Lu, Ming-Huang Li","doi":"10.1109/MEMS58180.2024.10439591","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439591","url":null,"abstract":"In this work, an optimized shear-horizontal surface acoustic wave (SH-SAW) resonator based on YX-LN/SiO2/Sapphire (LNOS) functional substrate is demonstrated with a large electromechanical coupling coefficient $left( {k_{{text{eff}}}^2} right)$ and high quality factor (Q), while effectively mitigating the Rayleigh SAW (R-SAW). Although the LN/SiO2 hetero acoustic stacking offers excellent acoustic energy confinement for SH-SAW operation, it generates significant R-SAW as an unintended byproduct alongside the targeted mode. Through detailed numerical simulations, we revealed that when these two modes are in close proximity, their electromechanical coupling undergoes drastic variations. Therefore, specific design ranges can be found to enhance the SH-SAW while simultaneously eliminating the $k_{{text{eff}}}^2$ of R-SAW. As a proof-of-concept, one $k_{{text{eff}}}^2$-enhanced design is experimentally verified, exhibiting a large $k_{{text{eff}}}^2$ of 47%, a high Bode-Q (Qmax) of 1,000, yielding an excellent figure-of-merit $left( {{text{FoM}} = k_{{text{eff}}}^2cdot{Q_{max }}} right)$ of 470 at 1 GHz, with successful suppression of the R-SAW.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"230 1","pages":"27-30"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Enhanced Photodetection Capabilities of Smaller Size 2D Au/PtSi/P-Si Nanohole Array-Based MIR Schottky Detector 基于小尺寸二维金/铂硅/硅纳米孔阵列的中红外肖特基探测器的增强型光电探测能力

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439424

A. Elyas, Tetsuo Kan

引用次数: 0

Lightweight Inertial Switch with Spiral Separation Mechanism for Extending Contact Time 采用螺旋分离机制的轻型惯性开关可延长接触时间

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439378

Mingyu Zhang, Tan Yin, Zhiyuan Hu, Mengcheng Wang, Haokai Huang, Yanxin Zhang, Yongcun Hao, Honglong Chang, Yan Wang, Yunna Sun, Zhuoqing Yang, Guifu Ding

引用次数: 0

A Bipolar-Biased Differential CMOS-MEMS CMUT 双极偏压差分 CMOS-MEMS CMUT

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439306

Po-Chun Chen, Yu-Cheng Lin, Hung-Yu Chen, Sheng-Shian Li, Ming-Huang Li

{"title":"A Bipolar-Biased Differential CMOS-MEMS CMUT","authors":"Po-Chun Chen, Yu-Cheng Lin, Hung-Yu Chen, Sheng-Shian Li, Ming-Huang Li","doi":"10.1109/MEMS58180.2024.10439306","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439306","url":null,"abstract":"This paper presents, for the first time, a monolithic differential capacitive micromachined ultrasound transducer (CMUT) receiver (RX) front-end based on CMOS-MEMS technology that exploits bipolar DC-biasing technique. By applying positive and negative (a.k.a. “bipolar”) dc bias voltages to distinct CMUTs in an array, the pressure-induced out-of-phase motional currents can be desirably formed and sourced out from individual membranes according to the corresponding bias polarity, hence providing a device-level differential operation. To enhance the electrostatic transduction efficiency, a Capacitor-Top-Metal (CTM) etching technique is developed for CMUT fabrication, yielding an effective capacitive transduction gap of only 470 nm. A fully-differential transimpedance amplifier (TIA) and a time-gain compensation (TGC) variable gain stage are also integrated on-chip to form an analog RX prototype and consume merely 0.54 mW. The proposed differential CMUT RX occupies a transducer area of 0.0625 mm2 and can be operated at a low bipolar-bias of ± 5V, showing a center frequency of 1.69 MHz, a 66% fractional bandwidth (FBW), and a sensitivity of 1.14 mV/kPa immersed in water. The proposed differential CMUT RX is implemented in TSMC 0.18 μm standard CMOS.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"226 2","pages":"951-954"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Miniaturized Flow Sensor Based On Thermal Feedback And Digitized Power Distribution 基于热反馈和数字化功率分配的微型流量传感器

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439422

Minghao Huang, Izhar, Xiangyu Song, Linze Hong, Ruining Xu, Wei Xu

引用次数: 0