{"title":"基于小尺寸二维金/铂硅/硅纳米孔阵列的中红外肖特基探测器的增强型光电探测能力","authors":"A. Elyas, Tetsuo Kan","doi":"10.1109/MEMS58180.2024.10439424","DOIUrl":null,"url":null,"abstract":"In this study, we reported a surface plasmon-enhanced uncooled Schottky mid-infrared (MIR) detector using 2D Au/PtSi/p-Si nanohole arrays. These periodic nanohole arrays increase the detector’s absorption coefficient via surface plasmon resonance principle. We reduced the device’s active area from 9.0 mm2 to 0.25 mm2 to enhance carrier collection efficiency by shortening the carrier path to the electrodes before recombination. To minimize low-frequency noise, we employed high-frequency light chopping and detected the response signal using trans-impedance and lock-in amplifiers. These optimizations resulted in a 10-fold improvement in responsivity and enhanced stability. Additionally, we successfully demonstrated the practical applicability of the new device.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"184 1","pages":"1043-1046"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enhanced Photodetection Capabilities of Smaller Size 2D Au/PtSi/P-Si Nanohole Array-Based MIR Schottky Detector\",\"authors\":\"A. Elyas, Tetsuo Kan\",\"doi\":\"10.1109/MEMS58180.2024.10439424\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, we reported a surface plasmon-enhanced uncooled Schottky mid-infrared (MIR) detector using 2D Au/PtSi/p-Si nanohole arrays. These periodic nanohole arrays increase the detector’s absorption coefficient via surface plasmon resonance principle. We reduced the device’s active area from 9.0 mm2 to 0.25 mm2 to enhance carrier collection efficiency by shortening the carrier path to the electrodes before recombination. To minimize low-frequency noise, we employed high-frequency light chopping and detected the response signal using trans-impedance and lock-in amplifiers. These optimizations resulted in a 10-fold improvement in responsivity and enhanced stability. Additionally, we successfully demonstrated the practical applicability of the new device.\",\"PeriodicalId\":518439,\"journal\":{\"name\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"184 1\",\"pages\":\"1043-1046\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS58180.2024.10439424\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439424","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Enhanced Photodetection Capabilities of Smaller Size 2D Au/PtSi/P-Si Nanohole Array-Based MIR Schottky Detector
In this study, we reported a surface plasmon-enhanced uncooled Schottky mid-infrared (MIR) detector using 2D Au/PtSi/p-Si nanohole arrays. These periodic nanohole arrays increase the detector’s absorption coefficient via surface plasmon resonance principle. We reduced the device’s active area from 9.0 mm2 to 0.25 mm2 to enhance carrier collection efficiency by shortening the carrier path to the electrodes before recombination. To minimize low-frequency noise, we employed high-frequency light chopping and detected the response signal using trans-impedance and lock-in amplifiers. These optimizations resulted in a 10-fold improvement in responsivity and enhanced stability. Additionally, we successfully demonstrated the practical applicability of the new device.