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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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A Visual-Tactile Coulping Mechanism Sensor For Real-Time Force Calibration 用于实时力校准的视觉触觉耦合机制传感器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439598
Xiaotong Hu, Chunpeng Jiang, Bin Yang, Jingquan Liu
{"title":"A Visual-Tactile Coulping Mechanism Sensor For Real-Time Force Calibration","authors":"Xiaotong Hu, Chunpeng Jiang, Bin Yang, Jingquan Liu","doi":"10.1109/MEMS58180.2024.10439598","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439598","url":null,"abstract":"This paper reports a visual-tactile coupling mechanism sensor for force calibration in real time through integrating high sensitivity piezoresistive thin film sensor and high resolution visual-tactile sensing. The elastic layer combined with dispensing-printed flexible electrodes forms piezoresistive sensing units. It employs the spatial weighted fusion algorithm to couple displacement of markers as weights with forces measured by the piezoresistive sensing units. High resolution and improved measurement accuracy at small forces are realized, and the coefficient of variation of measured force is reduced, which contributes to enhancing reliability. The sensor will be served as a reliable data source for future human-machine interaction applications.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 3","pages":"825-828"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531321","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stretchable Fractal Electrodes Integrated on Miniature Semi-Expanded Microballoon Catheter for Directional Nerve Stimulation 集成在微型半膨胀微球导管上的可伸缩分形电极用于定向神经刺激
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439432
Xiaoli You, Fanqi Sun, Kai Xue, Xianxia Yan, Le Zhou, Minghao Wang, Zekai Liang, Kai Tao, Honglong Chang, Bowen Ji
{"title":"Stretchable Fractal Electrodes Integrated on Miniature Semi-Expanded Microballoon Catheter for Directional Nerve Stimulation","authors":"Xiaoli You, Fanqi Sun, Kai Xue, Xianxia Yan, Le Zhou, Minghao Wang, Zekai Liang, Kai Tao, Honglong Chang, Bowen Ji","doi":"10.1109/MEMS58180.2024.10439432","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439432","url":null,"abstract":"In recent years, the percutaneous balloon compression (PBC) does not require craniotomy and has gradually become the preferred treatment for trigeminal neuralgia. However, there is a lack of microballoon catheters with real-time feedback capability to replace the current personal experience from X-ray pictures. This paper reports a stretchable fractal electrode array integrated on miniature semi-expanded microballoon catheter for the first time, which can accommodate large expansion. Six electrode sites are uniformly distributed in 120° circumferential direction on two ends of the microballon. Thus, the fractal electrodes can apply directional electrical stimulation with good spatial resolution to the compressed ganglion during the microballoon expansion, along with the evoked myoelectric potential to improve treatment of trigeminal neuralgia. Optimized fractal interconnects can integrate to the semi-expanded balloon with sufficient stretchability. Besides, the electrode sites with ring ground are assembled on metal marker rings without deformation for better nerve stimulation.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"179 1","pages":"251-254"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Copyright Page 版权页
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/mems58180.2024.10439300
{"title":"Copyright Page","authors":"","doi":"10.1109/mems58180.2024.10439300","DOIUrl":"https://doi.org/10.1109/mems58180.2024.10439300","url":null,"abstract":"","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"145 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electronic Nose Based on the Integration of MEMS Multi-Sensor and CMOS Circuit 基于 MEMS 多传感器和 CMOS 电路集成的电子鼻
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439450
Xiawei Yue, Jiachuang Wang, Fangyu Zhao, Pingping Zhang, Heng Yang, T. Tao, N. Qin
{"title":"Electronic Nose Based on the Integration of MEMS Multi-Sensor and CMOS Circuit","authors":"Xiawei Yue, Jiachuang Wang, Fangyu Zhao, Pingping Zhang, Heng Yang, T. Tao, N. Qin","doi":"10.1109/MEMS58180.2024.10439450","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439450","url":null,"abstract":"This paper reports a new design of electronic nose based on MEMS (Micro Electromechanical System) multi-sensor and CMOS (Complementary Metal Oxide Semiconductor) circuit. An array of multiple gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Silicon below the suspended membrane is etching completely through the wafer. The chip is then flipped and bonded to CMOS device. It not only simplifies the integration technology with CMOS chip, but also improve the conductivity of the connection. This design shows its potential for precise and rapid response of environment gas sensing and opens new opportunities for the fabrication of electronic nose and future development of bionic olfactory microsystems.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"31 2","pages":"592-595"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Using Peacock Shape Anisotropic Magnetoresistance (AMR) and Ni Mushroom Array to Achieve Tri-Axis Magnetic Sensor 利用孔雀形各向异性磁阻 (AMR) 和镍蘑菇阵列实现三轴磁性传感器
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439533
Shihwei Lin, Meifeng Lai, W. Fang
{"title":"Using Peacock Shape Anisotropic Magnetoresistance (AMR) and Ni Mushroom Array to Achieve Tri-Axis Magnetic Sensor","authors":"Shihwei Lin, Meifeng Lai, W. Fang","doi":"10.1109/MEMS58180.2024.10439533","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439533","url":null,"abstract":"This study extends the concept of magnetic sensor with flux guide structure to demonstrate a novel tri-axis magnetic sensing chip design. The tri-axis anisotropic magneto-resistive (AMR) sensor consists of two existing pure AMR film routing for in-plane magnetic field sensing and a novel peacock shape routing with a mushroom shape structure array as magnetic flux guide to enhance the out-of-plane magnetic field detection. Due to the radial symmetry design, the peacock shape AMR film has similar sensing signals introduced by the in-plane magnetic field of different azimuths. Thus, the decouple of the out-of-plane and in-plane sensing signals is easily achieved. Measurements demonstrate that the proposed peacock shape AMR film has no resistance variation when exposed to in-plane magnetic field of different azimuths, and could detect the out-of-plane magnetic flux collected by the Ni-pillar. The sensitivity of AMR ratio in out-of-plane is -2×10-4 %/Gauss.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"29 2","pages":"52-55"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
9-Meter-Long 3d Ultrasonic Objects Detection via Packaged Lithium-Niobate PMUTs 通过封装式铌酸锂 PMUT 探测 9 米长的 3D 超声波物体
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439314
Yande Peng, Hanxiao Liu, Chunming Chen, Wei Yue, Megan Teng, P. Tsao, Seiji Umezawa, Shinsuke Ikeuchi, Yasuhiro Aida, Liwei Lin
{"title":"9-Meter-Long 3d Ultrasonic Objects Detection via Packaged Lithium-Niobate PMUTs","authors":"Yande Peng, Hanxiao Liu, Chunming Chen, Wei Yue, Megan Teng, P. Tsao, Seiji Umezawa, Shinsuke Ikeuchi, Yasuhiro Aida, Liwei Lin","doi":"10.1109/MEMS58180.2024.10439314","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439314","url":null,"abstract":"This paper reports a 9-meter-long ultrasonic 3D detector based on a packaged lithium niobate PMUTs (piezoelectric micromachined ultrasonic transducers). Compared with the state-of-the-art reports, three distinctive achievements have been demonstrated: (1) high uniformity and wide bandwidth PMUTs by optimized package designs for highly efficient ultrasonic energy transfer; (2) a long-range receiving beamforming detection scheme on a 4×4 PMUT array for up to 9 m detection rang - comparable to the longest reported range via PMUTs; and (3) 3D detection of multiple static/moving objects with the field of view exceeding 50°. As such, this device is valuable for various applications such as obstacle avoidance when both low power consumption and small form factor are desirable, including aerial drones.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"205 2","pages":"124-127"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Materials Characterization for Microneedle-Based Molecular Sensing Platform 微针分子传感平台的材料表征
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439524
Christopher E. Larson, Kevin Plaxco, Ellis Meng
{"title":"Materials Characterization for Microneedle-Based Molecular Sensing Platform","authors":"Christopher E. Larson, Kevin Plaxco, Ellis Meng","doi":"10.1109/MEMS58180.2024.10439524","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439524","url":null,"abstract":"Adaptation of electrochemical aptamer-based (EAB) sensing to a microneedle format would enable clinically actionable, real-time molecular measurements via an easily applied, minimally-invasive, painless, wearable device. As a prerequisite, here we have explored what substrate materials meet the combined requirements of both microneedles and EAB sensor fabrication. Specifically, we evaluated 17 microneedle-compatible materials for adhesion with gold, the surface required for EAB functionalization. Those exhibiting satisfactory adhesion were functionalized with an aptamer sensitive to vancomycin, challenged with a range of target concentrations, and compared. Finally, we realized a microneedle sensing patch and demonstrated its function in solution and ex vivo.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"236 1","pages":"352-355"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology 利用激光透射热解技术制作的柔性高灵敏度应变传感器与 Pdms 微通道阵列
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439302
Shaogang Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, Paddy French
{"title":"Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology","authors":"Shaogang Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, Paddy French","doi":"10.1109/MEMS58180.2024.10439302","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439302","url":null,"abstract":"In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"367-370"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531326","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Serf-Based Magnetic Scanning Platform for Multiple Cardiovascular Disease Biomarker Detection 基于 Serf 的多种心血管疾病生物标记物检测磁扫描平台
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439477
Bo Bao, Ridong Wang, Dachao Li
{"title":"A Serf-Based Magnetic Scanning Platform for Multiple Cardiovascular Disease Biomarker Detection","authors":"Bo Bao, Ridong Wang, Dachao Li","doi":"10.1109/MEMS58180.2024.10439477","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439477","url":null,"abstract":"As cardiovascular diseases (CVDs) are the leading cause of death worldwide, it is of great importance to realize a rapid and sensitive diagnosis. Cardiac troponin I (cTnI), C-reactive protein (CRP), brain-type natriuretic peptide (BNP), and heart fatty acid binding protein (H-FABP) are four significant diagnostic biomarkers for CVD. Multiple CVD biomarker detection with microfluidics, which can increase both the accuracy and speed of early CVD diagnosis, has emerged as a promising alternative to single-marker analysis. This paper presented a novel two-dimensional magnetic field scanning platform for four types of CVD biomarker detection. A high sensitivity with a detection limit of a few pg/mL for all CVD biomarkers was achieved by combining microfluidics with two-dimensional magnetic field scanning. The measurement technique provides a new magnetic methodology for applications in clinical diagnosis.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 3","pages":"68-71"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Smallest-Footprint Multi-Cells Microfluidics Separation Channel Modeling Via Integration of Lift and Dielectrophoretic (DEP) Forces 通过整合提升力和介质泳移（DEP）力实现最小脚印多细胞微流体分离通道建模
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2024-01-21 DOI: 10.1109/MEMS58180.2024.10439479
Mohammad H. Alhibshi, N. Sobahi
{"title":"The Smallest-Footprint Multi-Cells Microfluidics Separation Channel Modeling Via Integration of Lift and Dielectrophoretic (DEP) Forces","authors":"Mohammad H. Alhibshi, N. Sobahi","doi":"10.1109/MEMS58180.2024.10439479","DOIUrl":"https://doi.org/10.1109/MEMS58180.2024.10439479","url":null,"abstract":"Active and passive separation based microfluidic systems play a significant role in isolating desire cells among others. Various microfluidic systems have been developed and utilized in biomedical cell separation, requiring effective systems with high throughput that have efficient capabilities to isolate different cells and particles effectively and simultaneously. This paper demonstrates the smallest curvature microfluidic channel that separates different blood particles: red and white blood cells, platelets, antigen-presenting cells, and circulating tumor cells at minimum footprint and power consumption. The proposed work utilizes and integrates passive lift and active dielectrophoretic forces using three different electrode shapes that achieves a successful separation of different blood cells to five different outlets.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"1186-1189"},"PeriodicalIF":0.0,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140531331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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