Yande Peng, Hanxiao Liu, Chunming Chen, Wei Yue, Megan Teng, P. Tsao, Seiji Umezawa, Shinsuke Ikeuchi, Yasuhiro Aida, Liwei Lin
{"title":"9-Meter-Long 3d Ultrasonic Objects Detection via Packaged Lithium-Niobate PMUTs","authors":"Yande Peng, Hanxiao Liu, Chunming Chen, Wei Yue, Megan Teng, P. Tsao, Seiji Umezawa, Shinsuke Ikeuchi, Yasuhiro Aida, Liwei Lin","doi":"10.1109/MEMS58180.2024.10439314","DOIUrl":null,"url":null,"abstract":"This paper reports a 9-meter-long ultrasonic 3D detector based on a packaged lithium niobate PMUTs (piezoelectric micromachined ultrasonic transducers). Compared with the state-of-the-art reports, three distinctive achievements have been demonstrated: (1) high uniformity and wide bandwidth PMUTs by optimized package designs for highly efficient ultrasonic energy transfer; (2) a long-range receiving beamforming detection scheme on a 4×4 PMUT array for up to 9 m detection rang - comparable to the longest reported range via PMUTs; and (3) 3D detection of multiple static/moving objects with the field of view exceeding 50°. As such, this device is valuable for various applications such as obstacle avoidance when both low power consumption and small form factor are desirable, including aerial drones.","PeriodicalId":518439,"journal":{"name":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"205 2","pages":"124-127"},"PeriodicalIF":0.0000,"publicationDate":"2024-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS58180.2024.10439314","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper reports a 9-meter-long ultrasonic 3D detector based on a packaged lithium niobate PMUTs (piezoelectric micromachined ultrasonic transducers). Compared with the state-of-the-art reports, three distinctive achievements have been demonstrated: (1) high uniformity and wide bandwidth PMUTs by optimized package designs for highly efficient ultrasonic energy transfer; (2) a long-range receiving beamforming detection scheme on a 4×4 PMUT array for up to 9 m detection rang - comparable to the longest reported range via PMUTs; and (3) 3D detection of multiple static/moving objects with the field of view exceeding 50°. As such, this device is valuable for various applications such as obstacle avoidance when both low power consumption and small form factor are desirable, including aerial drones.